JPS6235300U - - Google Patents
Info
- Publication number
- JPS6235300U JPS6235300U JP12799985U JP12799985U JPS6235300U JP S6235300 U JPS6235300 U JP S6235300U JP 12799985 U JP12799985 U JP 12799985U JP 12799985 U JP12799985 U JP 12799985U JP S6235300 U JPS6235300 U JP S6235300U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- degassing
- electrons
- ultra
- high vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007872 degassing Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
Landscapes
- Particle Accelerators (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12799985U JPS6235300U (de) | 1985-08-21 | 1985-08-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12799985U JPS6235300U (de) | 1985-08-21 | 1985-08-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6235300U true JPS6235300U (de) | 1987-03-02 |
Family
ID=31023269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12799985U Pending JPS6235300U (de) | 1985-08-21 | 1985-08-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6235300U (de) |
-
1985
- 1985-08-21 JP JP12799985U patent/JPS6235300U/ja active Pending