DE68919004D1 - Elektronenmikroskop. - Google Patents

Elektronenmikroskop.

Info

Publication number
DE68919004D1
DE68919004D1 DE68919004T DE68919004T DE68919004D1 DE 68919004 D1 DE68919004 D1 DE 68919004D1 DE 68919004 T DE68919004 T DE 68919004T DE 68919004 T DE68919004 T DE 68919004T DE 68919004 D1 DE68919004 D1 DE 68919004D1
Authority
DE
Germany
Prior art keywords
electron microscope
microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68919004T
Other languages
English (en)
Other versions
DE68919004T2 (de
Inventor
Tadashi Ohtaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE68919004D1 publication Critical patent/DE68919004D1/de
Publication of DE68919004T2 publication Critical patent/DE68919004T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
DE68919004T 1988-07-22 1989-07-19 Elektronenmikroskop. Expired - Fee Related DE68919004T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63182991A JPH0760661B2 (ja) 1988-07-22 1988-07-22 電子顕微鏡

Publications (2)

Publication Number Publication Date
DE68919004D1 true DE68919004D1 (de) 1994-12-01
DE68919004T2 DE68919004T2 (de) 1995-03-16

Family

ID=16127843

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68919004T Expired - Fee Related DE68919004T2 (de) 1988-07-22 1989-07-19 Elektronenmikroskop.

Country Status (4)

Country Link
US (1) US5029249A (de)
EP (1) EP0352085B1 (de)
JP (1) JPH0760661B2 (de)
DE (1) DE68919004T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0756443B2 (ja) * 1990-12-20 1995-06-14 株式会社島津製作所 生体試料観察用走査型トンネル顕微鏡
US5748866A (en) * 1994-06-30 1998-05-05 International Business Machines Corporation Virtual display adapters using a digital signal processing to reformat different virtual displays into a common format and display
SG74599A1 (en) * 1997-09-27 2000-08-22 Inst Of Material Res & Enginee Portable high resolution scanning electron microscope column using permanent magnet electron lenses
US6297512B1 (en) * 1998-03-31 2001-10-02 Cirrus Logic, Inc. Double shield for electron and ion beam columns
JP3117950B2 (ja) * 1998-05-21 2000-12-18 セイコーインスツルメンツ株式会社 荷電粒子装置
US6515282B1 (en) * 2000-03-28 2003-02-04 Applied Materials, Inc. Testing of interconnection circuitry using two modulated charged particle beams
US20020148971A1 (en) * 2001-03-05 2002-10-17 Michael Sogard Lens assembly for electron beam column
JP4621097B2 (ja) * 2005-09-14 2011-01-26 株式会社日立ハイテクノロジーズ 電子線装置およびその制御方法
DE602007007468D1 (de) 2007-07-27 2010-08-12 Integrated Circuit Testing Magnetische Linsenanordnung
CN102163529B (zh) * 2011-03-15 2012-07-25 北京航空航天大学 电子显微镜的聚光镜用可动光阑装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2637000A (en) * 1951-02-15 1953-04-28 Magnetic electron -lens
US3346736A (en) * 1964-09-22 1967-10-10 Applied Res Lab Inc Electron probe apparatus having an objective lens with an aperture for restricting fluid flow
US3535515A (en) * 1967-06-14 1970-10-20 Us Navy Ultrasonic apparatus for electron microscope
DE1804199C3 (de) * 1968-03-26 1975-12-18 Siemens Ag, 1000 Berlin Und 8000 Muenchen Korpuskularstrahlgerät zur wahlweisen Abbildung eines Präparates oder seines Beugungsdiagrammes
GB1213374A (en) * 1968-10-15 1970-11-25 Ass Elect Ind Improvements in or relating to electron optical systems
DE2307822C3 (de) * 1973-02-16 1982-03-18 Siemens AG, 1000 Berlin und 8000 München Supraleitendes Linsensystem für Korpuskularstrahlung
JPS51110964A (ja) * 1975-03-26 1976-09-30 Hitachi Ltd Sosagatadenshikenbikyo
JPS5398772A (en) * 1977-02-09 1978-08-29 Hitachi Ltd Corpuscular ray unit having atomosphere containing argon
DE3423149A1 (de) * 1984-06-22 1986-01-02 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop
NL8402340A (nl) * 1984-07-25 1986-02-17 Philips Nv Microscoop voor niet-gedifferentieerde fase-beeldvorming.
JPS61138441A (ja) * 1984-11-29 1986-06-25 Fuji Photo Film Co Ltd 電子顕微鏡像記録再生方法
JPH0616386B2 (ja) * 1986-01-10 1994-03-02 株式会社日立製作所 粒子線装置の絞りの清浄化法および装置
JPS62260335A (ja) * 1986-05-06 1987-11-12 Hitachi Ltd パタ−ン検査方法および装置
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
JPS6322062U (de) * 1986-07-26 1988-02-13
US4823006A (en) * 1987-05-21 1989-04-18 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope

Also Published As

Publication number Publication date
EP0352085A2 (de) 1990-01-24
DE68919004T2 (de) 1995-03-16
US5029249A (en) 1991-07-02
JPH0233844A (ja) 1990-02-05
EP0352085B1 (de) 1994-10-26
EP0352085A3 (en) 1990-11-28
JPH0760661B2 (ja) 1995-06-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee