DE3733100C2 - - Google Patents
Info
- Publication number
- DE3733100C2 DE3733100C2 DE3733100A DE3733100A DE3733100C2 DE 3733100 C2 DE3733100 C2 DE 3733100C2 DE 3733100 A DE3733100 A DE 3733100A DE 3733100 A DE3733100 A DE 3733100A DE 3733100 C2 DE3733100 C2 DE 3733100C2
- Authority
- DE
- Germany
- Prior art keywords
- base layer
- type base
- type
- anode
- carrier recombination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000006798 recombination Effects 0.000 claims description 11
- 238000005215 recombination Methods 0.000 claims description 11
- 239000002800 charge carrier Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 238000002513 implantation Methods 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D18/00—Thyristors
- H10D18/60—Gate-turn-off devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/50—Physical imperfections
- H10D62/53—Physical imperfections the imperfections being within the semiconductor body
Landscapes
- Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Thyristors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61234855A JP2604580B2 (ja) | 1986-10-01 | 1986-10-01 | アノード短絡形ゲートターンオフサイリスタ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE3733100A1 DE3733100A1 (de) | 1988-04-14 |
| DE3733100C2 true DE3733100C2 (en:Method) | 1993-03-18 |
| DE3733100C3 DE3733100C3 (de) | 1997-01-02 |
Family
ID=16977404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3733100A Expired - Lifetime DE3733100C3 (de) | 1986-10-01 | 1987-09-30 | Abschalt-Thyristor |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2604580B2 (en:Method) |
| DE (1) | DE3733100C3 (en:Method) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS649658A (en) * | 1987-07-01 | 1989-01-12 | Mitsubishi Electric Corp | Gto thyristor |
| GB2213988B (en) * | 1987-12-18 | 1992-02-05 | Matsushita Electric Works Ltd | Semiconductor device |
| EP0343369A1 (de) * | 1988-05-19 | 1989-11-29 | Siemens Aktiengesellschaft | Verfahren zum Herstellen eines Thyristors |
| DE3832208A1 (de) * | 1988-09-22 | 1990-03-29 | Asea Brown Boveri | Steuerbares leistungshalbleiterbauelement |
| US5182626A (en) * | 1989-09-20 | 1993-01-26 | Mitsubishi Denki Kabushiki Kaisha | Insulated gate bipolar transistor and method of manufacturing the same |
| JPH0680820B2 (ja) * | 1989-10-16 | 1994-10-12 | 株式会社東芝 | 過電圧保護機能付半導体装置及びその製造方法 |
| US5191438A (en) * | 1989-12-12 | 1993-03-02 | Sharp Kabushiki Kaisha | Facsimile device with skew correction and text line direction detection |
| JP2739002B2 (ja) * | 1991-12-20 | 1998-04-08 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
| DE69319465T2 (de) * | 1992-02-20 | 1998-11-12 | Hitachi Ltd | Gate-Turn-Off-Thyristor und dessen Verwendung in Leistungwandlern |
| DE19711438A1 (de) * | 1997-03-19 | 1998-09-24 | Asea Brown Boveri | Thyristor |
| KR100498943B1 (ko) * | 1998-08-05 | 2005-07-04 | 엠이엠씨 일렉트로닉 머티리얼즈 인코포레이티드 | 고성능 실리콘 전력장치에서의 불균일한 소수 캐리어 수명 분포 |
| DE102005037573B4 (de) * | 2005-08-09 | 2007-05-31 | Infineon Technologies Ag | Thyristor mit Freiwerdeschutz in Form eines Thyristorsystems und Verfahren zur Herstellung des Thyristorsystems |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5021345A (en:Method) * | 1973-06-27 | 1975-03-06 | ||
| US4056408A (en) * | 1976-03-17 | 1977-11-01 | Westinghouse Electric Corporation | Reducing the switching time of semiconductor devices by nuclear irradiation |
| US4311534A (en) * | 1980-06-27 | 1982-01-19 | Westinghouse Electric Corp. | Reducing the reverse recovery charge of thyristors by nuclear irradiation |
| DE3117202A1 (de) * | 1981-04-30 | 1982-11-18 | Brown, Boveri & Cie Ag, 6800 Mannheim | Verfahren zum einstellen der lebensdauer der minoritaetsladungstraeger in halbleiterschaltern mit protonenstrahlen |
| JPS58114467A (ja) * | 1981-12-28 | 1983-07-07 | Toyo Electric Mfg Co Ltd | 高速ダイオ−ド |
| DE3423287A1 (de) * | 1983-07-01 | 1985-01-03 | Brown, Boveri & Cie Ag, 6800 Mannheim | Halbleiter-bauelement mit mindestens einem pn-uebergang und mit in der tiefe der basisschicht scharf lokalisierten ionen, verfahren zu dessen herstellung und seine verwendung |
| JPH0691244B2 (ja) * | 1984-04-27 | 1994-11-14 | 三菱電機株式会社 | ゲートターンオフサイリスタの製造方法 |
| GB2171555A (en) * | 1985-02-20 | 1986-08-28 | Philips Electronic Associated | Bipolar semiconductor device with implanted recombination region |
-
1986
- 1986-10-01 JP JP61234855A patent/JP2604580B2/ja not_active Expired - Lifetime
-
1987
- 1987-09-30 DE DE3733100A patent/DE3733100C3/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE3733100C3 (de) | 1997-01-02 |
| JPS6388863A (ja) | 1988-04-19 |
| DE3733100A1 (de) | 1988-04-14 |
| JP2604580B2 (ja) | 1997-04-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3733100C2 (en:Method) | ||
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| WO2000035020A1 (de) | Laterales hochvolt-halbleiterbaulement mit reduziertem spezifischem einschaltwiderstand | |
| CH657478A5 (en) | Power semiconductor component | |
| DE2339440A1 (de) | Verbesserte thyristoren und verfahren zu ihrer herstellung | |
| DE3831279C2 (de) | Leistungsdiode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8320 | Willingness to grant licences declared (paragraph 23) | ||
| 8366 | Restricted maintained after opposition proceedings | ||
| 8325 | Change of the main classification |
Ipc: H01L 29/744 |
|
| 8305 | Restricted maintenance of patent after opposition | ||
| D4 | Patent maintained restricted |