DE3731127C2 - - Google Patents
Info
- Publication number
- DE3731127C2 DE3731127C2 DE3731127A DE3731127A DE3731127C2 DE 3731127 C2 DE3731127 C2 DE 3731127C2 DE 3731127 A DE3731127 A DE 3731127A DE 3731127 A DE3731127 A DE 3731127A DE 3731127 C2 DE3731127 C2 DE 3731127C2
- Authority
- DE
- Germany
- Prior art keywords
- target
- titanium
- arc
- composition
- doping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 44
- 238000000576 coating method Methods 0.000 claims description 42
- 239000011248 coating agent Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 28
- 239000010936 titanium Substances 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 15
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 239000010931 gold Substances 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 claims description 4
- PMTRSEDNJGMXLN-UHFFFAOYSA-N titanium zirconium Chemical compound [Ti].[Zr] PMTRSEDNJGMXLN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 229910001369 Brass Inorganic materials 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 239000010951 brass Substances 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
- 229910001873 dinitrogen Inorganic materials 0.000 claims 4
- 229910001093 Zr alloy Inorganic materials 0.000 claims 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- 229910001297 Zn alloy Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000010938 white gold Substances 0.000 claims 1
- 229910000832 white gold Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 description 21
- 239000002019 doping agent Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000003086 colorant Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000001455 metallic ions Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- COEZWFYORILMOM-UHFFFAOYSA-N sodium 4-[(2,4-dihydroxyphenyl)diazenyl]benzenesulfonic acid Chemical compound [Na+].OC1=CC(O)=CC=C1N=NC1=CC=C(S(O)(=O)=O)C=C1 COEZWFYORILMOM-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2520787A | 1987-03-12 | 1987-03-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3731127A1 DE3731127A1 (de) | 1988-09-22 |
| DE3731127C2 true DE3731127C2 (enrdf_load_stackoverflow) | 1990-11-15 |
Family
ID=21824663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19873731127 Granted DE3731127A1 (de) | 1987-03-12 | 1987-09-16 | Verfahren und vorrichtung zur vakuum-lichtbogenplasma-ablagerung dekorativer und abnutzungsfester beschichtungen |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS63223161A (enrdf_load_stackoverflow) |
| KR (1) | KR880011362A (enrdf_load_stackoverflow) |
| CH (1) | CH675258A5 (enrdf_load_stackoverflow) |
| DE (1) | DE3731127A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2612204A1 (enrdf_load_stackoverflow) |
| NL (1) | NL8702404A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19517120A1 (de) * | 1994-05-13 | 1995-11-16 | Kobe Steel Ltd | Beschichtetes Teil mit ausgezeichneter Härte und Haftung |
| DE10001381A1 (de) * | 2000-01-14 | 2001-07-19 | Hauzer Techno Coating Europ B | PVD-Verfahren zur Herstellung einer gefärbten, gegenüber Fingerabdrücken unempfindlichen Beschichtung auf Gegenständen sowie Gegenstände mit einer solchen Beschichtung |
| WO2014207154A1 (de) | 2013-06-26 | 2014-12-31 | Oerlikon Trading Ag, Truebbach | Dekorative hipims-hartstoffschichten |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0404973A1 (de) * | 1989-06-27 | 1991-01-02 | Hauzer Holding B.V. | Verfahren und Vorrichtung zur Beschichtung von Substraten |
| DE4006456C1 (en) * | 1990-03-01 | 1991-05-29 | Balzers Ag, Balzers, Li | Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface |
| WO1992019789A1 (en) * | 1991-04-29 | 1992-11-12 | Nauchno-Proizvodstvennoe Predpriyatie 'novatekh' | Electric arc evaporator of metals |
| DE19745407C2 (de) * | 1996-07-31 | 2003-02-27 | Fraunhofer Ges Forschung | Verfahren zur Glanzbeschichtung von Kunststoffteilen, vorzugsweise für Fahrzeuge, und danach beschichtetes Kunststoffteil |
| DE19809409A1 (de) * | 1998-03-05 | 1999-09-09 | Leybold Systems Gmbh | Messingfarbige Beschichtung mit einer farbgebenden nitridischen Schicht |
| DE19905881A1 (de) * | 1999-01-22 | 2000-08-03 | Muerrle Norbert | Verfahren zur Beschichtung eines aus Edelmetall oder einem Nicht-Edelmetall gefertigten Schmuckstücks sowie ein derartiges Schmuckstück |
| RU2196847C2 (ru) * | 2000-05-18 | 2003-01-20 | Уральский электрохимический комбинат | Катод электродугового испарителя |
| US9997338B2 (en) * | 2005-03-24 | 2018-06-12 | Oerlikon Surface Solutions Ag, Pfäffikon | Method for operating a pulsed arc source |
| JP5073998B2 (ja) * | 2006-08-28 | 2012-11-14 | 眞 八藤 | 銀器類の改良方法 |
| RU2495150C1 (ru) * | 2012-06-26 | 2013-10-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Способ получения многослойного покрытия для режущего инструмента |
| JP7014816B2 (ja) * | 2017-12-19 | 2022-02-01 | 日清エンジニアリング株式会社 | 複合粒子および複合粒子の製造方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
| US3793179A (en) * | 1971-07-19 | 1974-02-19 | L Sablev | Apparatus for metal evaporation coating |
| US3900592A (en) * | 1973-07-25 | 1975-08-19 | Airco Inc | Method for coating a substrate to provide a titanium or zirconium nitride or carbide deposit having a hardness gradient which increases outwardly from the substrate |
| JPS50123579A (enrdf_load_stackoverflow) * | 1974-03-19 | 1975-09-29 | ||
| CH619344B (de) * | 1977-12-23 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
| CH624817B (de) * | 1979-09-04 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
| US4351855A (en) * | 1981-02-24 | 1982-09-28 | Eduard Pinkhasov | Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum |
| DE3107914A1 (de) * | 1981-03-02 | 1982-09-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren und vorrichtung zum beschichten von formteilen durch katodenzerstaeubung |
| GB2105729B (en) * | 1981-09-15 | 1985-06-12 | Itt Ind Ltd | Surface processing of a substrate material |
| US4415521A (en) * | 1982-03-15 | 1983-11-15 | Celanese Corporation | Process for achieving higher orientation in partially oriented yarns |
| SU1128618A1 (ru) * | 1982-10-10 | 1987-03-07 | Всесоюзный Научно-Исследовательский Инструментальный Институт | Материал износостойкого покрыти металлорежущего инструмента |
| US4540596A (en) * | 1983-05-06 | 1985-09-10 | Smith International, Inc. | Method of producing thin, hard coating |
| US4430184A (en) * | 1983-05-09 | 1984-02-07 | Vac-Tec Systems, Inc. | Evaporation arc stabilization |
| US4556471A (en) * | 1983-10-14 | 1985-12-03 | Multi-Arc Vacuum Systems Inc. | Physical vapor deposition apparatus |
| IL71530A (en) * | 1984-04-12 | 1987-09-16 | Univ Ramot | Method and apparatus for surface-treating workpieces |
| DE3428951A1 (de) * | 1984-08-06 | 1986-02-13 | Leybold-Heraeus GmbH, 5000 Köln | Mit einer deckschicht aus gold oder einem goldhaltigen material ueberzogener dekorativer gebrauchsgegenstand und verfahren zu seiner herstellung |
| JPS61183458A (ja) * | 1985-02-08 | 1986-08-16 | Citizen Watch Co Ltd | 黒色イオンプレ−テイング膜 |
| EP0211413A3 (en) * | 1985-08-09 | 1989-03-15 | The Perkin-Elmer Corporation | Arc ignition device |
-
1987
- 1987-08-26 FR FR8711938A patent/FR2612204A1/fr not_active Withdrawn
- 1987-09-16 DE DE19873731127 patent/DE3731127A1/de active Granted
- 1987-09-22 JP JP62238596A patent/JPS63223161A/ja active Granted
- 1987-09-24 CH CH3706/87A patent/CH675258A5/de not_active IP Right Cessation
- 1987-10-09 NL NL8702404A patent/NL8702404A/nl not_active Application Discontinuation
- 1987-11-11 KR KR870012679A patent/KR880011362A/ko not_active Ceased
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19517120A1 (de) * | 1994-05-13 | 1995-11-16 | Kobe Steel Ltd | Beschichtetes Teil mit ausgezeichneter Härte und Haftung |
| DE19517120C2 (de) * | 1994-05-13 | 1998-07-02 | Kobe Steel Ltd | Beschichtetes Teil mit ausgezeichneter Härte und Haftung, seine Verwendung und Verfahren zur Herstellung |
| DE10001381A1 (de) * | 2000-01-14 | 2001-07-19 | Hauzer Techno Coating Europ B | PVD-Verfahren zur Herstellung einer gefärbten, gegenüber Fingerabdrücken unempfindlichen Beschichtung auf Gegenständen sowie Gegenstände mit einer solchen Beschichtung |
| WO2014207154A1 (de) | 2013-06-26 | 2014-12-31 | Oerlikon Trading Ag, Truebbach | Dekorative hipims-hartstoffschichten |
| US11060181B2 (en) | 2013-06-26 | 2021-07-13 | Oerlikon Surface Solutions Ag, Pfaffikon | Decorative HIPIMS hard material layers |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2612204A1 (fr) | 1988-09-16 |
| CH675258A5 (enrdf_load_stackoverflow) | 1990-09-14 |
| DE3731127A1 (de) | 1988-09-22 |
| NL8702404A (nl) | 1988-10-03 |
| JPH045750B2 (enrdf_load_stackoverflow) | 1992-02-03 |
| JPS63223161A (ja) | 1988-09-16 |
| KR880011362A (ko) | 1988-10-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8330 | Complete disclaimer |