DE3688097T2 - Verfahren und Einrichtung zur Beseitigung kleiner Teilchen von einer Oberfläche. - Google Patents

Verfahren und Einrichtung zur Beseitigung kleiner Teilchen von einer Oberfläche.

Info

Publication number
DE3688097T2
DE3688097T2 DE86105296T DE3688097T DE3688097T2 DE 3688097 T2 DE3688097 T2 DE 3688097T2 DE 86105296 T DE86105296 T DE 86105296T DE 3688097 T DE3688097 T DE 3688097T DE 3688097 T2 DE3688097 T2 DE 3688097T2
Authority
DE
Germany
Prior art keywords
rinsing
surfactant
solution
small particles
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE86105296T
Other languages
English (en)
Other versions
DE3688097D1 (de
Inventor
Robert Kaiser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE3688097D1 publication Critical patent/DE3688097D1/de
Publication of DE3688097T2 publication Critical patent/DE3688097T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/028—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons
    • C23G5/02803—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/032—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing oxygen-containing compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/017—Clean surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
DE86105296T 1985-04-19 1986-04-16 Verfahren und Einrichtung zur Beseitigung kleiner Teilchen von einer Oberfläche. Expired - Fee Related DE3688097T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/725,062 US4711256A (en) 1985-04-19 1985-04-19 Method and apparatus for removal of small particles from a surface

Publications (2)

Publication Number Publication Date
DE3688097D1 DE3688097D1 (de) 1993-04-29
DE3688097T2 true DE3688097T2 (de) 1993-10-28

Family

ID=24913008

Family Applications (1)

Application Number Title Priority Date Filing Date
DE86105296T Expired - Fee Related DE3688097T2 (de) 1985-04-19 1986-04-16 Verfahren und Einrichtung zur Beseitigung kleiner Teilchen von einer Oberfläche.

Country Status (5)

Country Link
US (1) US4711256A (de)
EP (1) EP0199288B1 (de)
JP (1) JPH0666308B2 (de)
AT (1) ATE87338T1 (de)
DE (1) DE3688097T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4828751A (en) * 1987-08-28 1989-05-09 Pcr, Inc. Solvent composition for cleaning silicon wafers
DE3834396A1 (de) * 1988-10-10 1990-04-12 Telefunken Electronic Gmbh Verfahren zum entfernen von oberflaechenschichten
JPH02152234A (ja) * 1988-12-05 1990-06-12 Mitsubishi Electric Corp 蒸気乾燥方法
JP2577798B2 (ja) * 1989-08-16 1997-02-05 株式会社日立製作所 液中微粒子付着制御方法
JPH085140B2 (ja) * 1989-09-26 1996-01-24 ダイキン工業株式会社 フッ素樹脂製品の処理方法
MY114292A (en) * 1989-10-26 2002-09-30 Momentive Performance Mat Jp Method for removing residual liquid cleaning agent using a rinsing composition containing a polyorganosiloxane
US5503681A (en) * 1990-03-16 1996-04-02 Kabushiki Kaisha Toshiba Method of cleaning an object
SG48276A1 (en) * 1990-03-16 1998-04-17 Japan Field Kk Cleaning method and cleaning apparatus
US5593507A (en) * 1990-08-22 1997-01-14 Kabushiki Kaisha Toshiba Cleaning method and cleaning apparatus
AU654297B2 (en) * 1990-08-22 1994-11-03 Japan Field Company, Ltd. Method and device for cleaning
JP2787788B2 (ja) * 1990-09-26 1998-08-20 インターナショナル・ビジネス・マシーンズ・コーポレーション 残留物除去方法
JPH0793270B2 (ja) * 1991-02-15 1995-10-09 株式会社半導体プロセス研究所 半導体製造装置及びその使用方法
JPH054077A (ja) * 1991-03-27 1993-01-14 Japan Field Kk 被洗浄物の洗浄方法
US5320706A (en) * 1991-10-15 1994-06-14 Texas Instruments Incorporated Removing slurry residue from semiconductor wafer planarization
US5360509A (en) * 1993-03-08 1994-11-01 Gi Corporation Low cost method of fabricating epitaxial semiconductor devices
JPH07216392A (ja) * 1994-01-26 1995-08-15 Daikin Ind Ltd 洗浄剤及び洗浄方法
JP2914555B2 (ja) * 1994-08-30 1999-07-05 信越半導体株式会社 半導体シリコンウェーハの洗浄方法
US5536327A (en) * 1994-11-21 1996-07-16 Entropic Systems, Inc. Removal of hydrocarbon or fluorocarbon residues using coupling agent additives
JP3351924B2 (ja) * 1995-01-06 2002-12-03 忠弘 大見 洗浄方法
US5635414A (en) * 1995-03-28 1997-06-03 Zakaluk; Gregory Low cost method of fabricating shallow junction, Schottky semiconductor devices
US6132522A (en) * 1996-07-19 2000-10-17 Cfmt, Inc. Wet processing methods for the manufacture of electronic components using sequential chemical processing
US6248651B1 (en) 1998-06-24 2001-06-19 General Semiconductor, Inc. Low cost method of fabricating transient voltage suppressor semiconductor devices or the like
JP4025943B2 (ja) * 1999-02-26 2007-12-26 大阪府 機能性ポリアミド酸微粒子及び機能性ポリイミド微粒子ならびにこれらの製造方法
GB2358791A (en) * 2000-02-04 2001-08-08 Versar Inc Method composition and apparatus for cleaning internal surfaces of oxygen converters and cylinders
GB2361282A (en) 2000-04-12 2001-10-17 Versar Inc Methods, composition and apparatus for cleaning pipes using a fluorocarbon solvent and fluorinated surfactant
US7163589B2 (en) * 2001-05-23 2007-01-16 Argos Associates, Inc. Method and apparatus for decontamination of sensitive equipment
US7022437B2 (en) * 2003-01-15 2006-04-04 Asml Netherlands B.V. Perfluoropolyether liquid pellicle and methods of cleaning masks using perfluoropolyether liquid
US8863763B1 (en) * 2009-05-27 2014-10-21 WD Media, LLC Sonication cleaning with a particle counter
US8404056B1 (en) * 2009-05-27 2013-03-26 WD Media, LLC Process control for a sonication cleaning tank
US9102604B1 (en) * 2010-02-15 2015-08-11 Baxter International Inc. Methods for cleaning distilling columns

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3664806A (en) * 1963-09-13 1972-05-23 Res Dev Co Dry cleaning of textile fibers and other garment materials with chlorofluoro hydrocarbons having relatively high freezing points
US3509061A (en) * 1966-10-18 1970-04-28 Us Navy Method and compositions for displacing organic liquids from solid surfaces
US3784471A (en) * 1970-05-11 1974-01-08 Avco Corp Solid additives dispersed in perfluorinated liquids with perfluoroalkyl ether dispersants
GB1399867A (en) * 1971-09-27 1975-07-02 Ici Ltd Cleaning process
GB1440438A (en) * 1972-09-07 1976-06-23 Ici Ltd Cleaning process
US3957672A (en) * 1973-11-23 1976-05-18 The United States Of America As Represented By The Secretary Of The Navy Displacement of organic liquid films from solid surfaces by non aqueous systems
US4156619A (en) * 1975-06-11 1979-05-29 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh Process for cleaning semi-conductor discs
AT347198B (de) * 1975-07-22 1978-12-11 Hoesch Werke Ag Verfahren und vorrichtung zum behandeln von walzzunder
DE2541613A1 (de) * 1975-09-18 1977-03-24 Gernot Karau Verfahren und vorrichtung zur entfettung und/oder reinigung von metallspaenen, schuettguetern, kleinteilen o.dgl.
US4111715A (en) * 1976-03-15 1978-09-05 Westinghouse Electric Corp. Apparatus and method for chemically removing plastics
DE2656384B2 (de) * 1976-12-13 1980-04-17 Chemische Fabrik Kreussler & Co Gmbh, 6200 Wiesbaden Verfahren zur Reinigung von Textilien in organischen Lösungsmittelbadern
GB1544841A (en) * 1977-01-04 1979-04-25 Plessey Co Ltd Fluid for cleaning electrical contacts
JPS53132173A (en) * 1977-04-23 1978-11-17 Kamaya Kagaku Kogyo Co Ltd Method of cleaning glass surface
JPS5835108B2 (ja) * 1979-08-03 1983-07-30 ダイキン工業株式会社 物品の洗滌乾燥方法
US4269630A (en) * 1979-10-01 1981-05-26 George M. Stephenson Two-step process and composition for cleaning polished surfaces
JPS58204100A (ja) * 1982-05-24 1983-11-28 ダイキン工業株式会社 表面清浄化用組成物

Also Published As

Publication number Publication date
EP0199288B1 (de) 1993-03-24
JPS61292325A (ja) 1986-12-23
EP0199288A2 (de) 1986-10-29
JPH0666308B2 (ja) 1994-08-24
EP0199288A3 (en) 1988-08-17
US4711256A (en) 1987-12-08
ATE87338T1 (de) 1993-04-15
DE3688097D1 (de) 1993-04-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee