DE3684508D1 - Halbleiterwafer-praezisionschneidevorrichtung mit integrierten kompensatoren zur verringerung der durch temperaturaenderungen verursachten fehler. - Google Patents

Halbleiterwafer-praezisionschneidevorrichtung mit integrierten kompensatoren zur verringerung der durch temperaturaenderungen verursachten fehler.

Info

Publication number
DE3684508D1
DE3684508D1 DE8686106728T DE3684508T DE3684508D1 DE 3684508 D1 DE3684508 D1 DE 3684508D1 DE 8686106728 T DE8686106728 T DE 8686106728T DE 3684508 T DE3684508 T DE 3684508T DE 3684508 D1 DE3684508 D1 DE 3684508D1
Authority
DE
Germany
Prior art keywords
compensators
integrated
reduce
semiconductor wafer
cutting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686106728T
Other languages
English (en)
Inventor
Shinji Sekiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Disco Abrasive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP61011900A external-priority patent/JPS62173147A/ja
Application filed by Disco Corp, Disco Abrasive Systems Ltd filed Critical Disco Corp
Application granted granted Critical
Publication of DE3684508D1 publication Critical patent/DE3684508D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D59/00—Accessories specially designed for sawing machines or sawing devices
    • B23D59/001—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade
    • B23D59/002—Measuring or control devices, e.g. for automatic control of work feed pressure on band saw blade for the position of the saw blade
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0003—Arrangements for preventing undesired thermal effects on tools or parts of the machine
    • B23Q11/0007—Arrangements for preventing undesired thermal effects on tools or parts of the machine by compensating occurring thermal dilations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/08—Control or regulation of cutting velocity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37096—Invar scale, low temperature coefficient
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45044—Cutting
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49207—Compensate thermal displacement using measured distance

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Dicing (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE8686106728T 1985-05-17 1986-05-16 Halbleiterwafer-praezisionschneidevorrichtung mit integrierten kompensatoren zur verringerung der durch temperaturaenderungen verursachten fehler. Expired - Lifetime DE3684508D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7233385 1985-05-17
JP61011900A JPS62173147A (ja) 1986-01-24 1986-01-24 温度変化に起因する誤差が低減された精密装置

Publications (1)

Publication Number Publication Date
DE3684508D1 true DE3684508D1 (de) 1992-04-30

Family

ID=26347421

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686106728T Expired - Lifetime DE3684508D1 (de) 1985-05-17 1986-05-16 Halbleiterwafer-praezisionschneidevorrichtung mit integrierten kompensatoren zur verringerung der durch temperaturaenderungen verursachten fehler.

Country Status (4)

Country Link
US (1) US4705016A (de)
EP (1) EP0202630B1 (de)
KR (1) KR910007235B1 (de)
DE (1) DE3684508D1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4919575A (en) * 1988-05-20 1990-04-24 Toyoda Koki Kabushiki Kaisha Apparatus for compensating for the thermal displacement of the main spindle of a machine tool
JPH03159148A (ja) * 1989-11-16 1991-07-09 Advantest Corp 位置決め装置及びこの位置決め装置を利用したｉｃ試験装置
US5303458A (en) * 1992-03-31 1994-04-19 Hardinge Brothers, Inc. Method and apparatus for detecting and compensating thermal growth in machine tools
DE4320728C2 (de) * 1993-06-23 2001-08-02 Heidenhain Gmbh Dr Johannes Lagemeßeinrichtung
DE19510625A1 (de) * 1995-03-23 1996-09-26 Wacker Siltronic Halbleitermat Drahtsäge und Verfahren zum Abtrennen von Scheiben von einem Werkstück
US6006739A (en) * 1996-11-12 1999-12-28 Micron Technology, Inc. Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
US6493934B2 (en) 1996-11-12 2002-12-17 Salman Akram Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
US6250192B1 (en) 1996-11-12 2001-06-26 Micron Technology, Inc. Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
US6102023A (en) * 1997-07-02 2000-08-15 Disco Corporation Precision cutting apparatus and cutting method using the same
JPH11316928A (ja) * 1998-05-06 1999-11-16 Tdk Corp スライダの製造方法および装置
US6357330B1 (en) * 1999-01-07 2002-03-19 Intel Corporation Method and apparatus for cutting a wafer
JP2001259961A (ja) * 2000-03-15 2001-09-25 Disco Abrasive Syst Ltd 加工装置
JP2001347416A (ja) * 2000-06-06 2001-12-18 Matsushita Electric Ind Co Ltd 切断装置及び切断方法
US6705925B1 (en) * 2000-10-20 2004-03-16 Lightwave Microsystems Apparatus and method to dice integrated circuits from a wafer using a pressurized jet
EP1328372B1 (de) * 2000-10-26 2006-11-29 Xsil Technology Limited Steueurung von laserbearbeitung
US20020185121A1 (en) * 2001-06-06 2002-12-12 Farnworth Warren M. Group encapsulated dicing chuck
SG105541A1 (en) * 2001-07-31 2004-08-27 Advanced Systems Automation Method and apparatus for singulating semiconductor packages on a lead frame
DE102008055770B3 (de) * 2008-11-04 2010-11-04 Wilhelm Altendorf Gmbh & Co. Kg Steuerungsverfahren für eine Formatkreissäge
JP5099111B2 (ja) * 2009-12-24 2012-12-12 信越半導体株式会社 両面研磨装置
JP6021909B2 (ja) * 2011-07-21 2016-11-09 ブルックス オートメーション インコーポレイテッド 低温試料グループホルダーにおける寸法変化の補正のための方法と装置
JP6314565B2 (ja) * 2014-03-18 2018-04-25 セイコーエプソン株式会社 画像記録装置および画像記録方法
AT515951B1 (de) * 2014-06-24 2016-05-15 Anton Paar Gmbh Positioniereinheit
CN205668186U (zh) * 2016-05-12 2016-11-02 东莞市晶研仪器科技有限公司 智能bga芯片维修仪器
CN108067939B (zh) * 2016-11-18 2021-08-03 成都飞机工业（集团）有限责任公司 一种空间点位测量基准误差补偿方法
CN107443152A (zh) * 2017-08-03 2017-12-08 安徽科创生产力促进中心有限责任公司 一种摇臂钻床可调节精度增加装置
SG11202003712WA (en) * 2017-08-28 2020-05-28 Shinkawa Kk Device and method for linearly moving first and second moving bodies relative to target object
CN109483748B (zh) * 2019-01-11 2021-08-17 上海大学(浙江·嘉兴)新兴产业研究院 一种高精度晶圆切割机集中控制系统、方法和装置
EP3812696A1 (de) * 2019-10-21 2021-04-28 Mitutoyo Corporation Messvorrichtung zur messung der dimension eines werkstücks

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2664787A (en) * 1952-02-16 1954-01-05 Cincinnati Milling Machine Co Thermal compensator
USB295344I5 (de) * 1958-02-03
FR1452173A (fr) * 1965-07-26 1966-02-25 Ernault Somua H Perfectionnement aux dispositifs de servo-commande de chariots de machines à copier
US3579073A (en) * 1970-05-20 1971-05-18 Richard Johnstone Spindle growth compensator
JPS5583567A (en) * 1978-12-19 1980-06-24 Okamoto Kosaku Kikai Seisakusho:Kk Grinder
US4564000A (en) * 1984-07-06 1986-01-14 The United States Of America As Represented By The Secretary Of The Army Precision cutting of millimeter wave ferrite materials
US4615615A (en) * 1984-09-27 1986-10-07 Flexible Manufacturing Systems, Inc. Laser positioning system
DD228048A1 (de) * 1984-11-01 1985-10-02 Zeiss Jena Veb Carl Laengenmesseinrichtung

Also Published As

Publication number Publication date
EP0202630A3 (en) 1990-01-10
KR860009474A (ko) 1986-12-23
US4705016A (en) 1987-11-10
EP0202630B1 (de) 1992-03-25
EP0202630A2 (de) 1986-11-26
KR910007235B1 (ko) 1991-09-24

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