DE3590145T1 - Oberflächenrauheit-Meßgerät - Google Patents
Oberflächenrauheit-MeßgerätInfo
- Publication number
- DE3590145T1 DE3590145T1 DE19853590145 DE3590145T DE3590145T1 DE 3590145 T1 DE3590145 T1 DE 3590145T1 DE 19853590145 DE19853590145 DE 19853590145 DE 3590145 T DE3590145 T DE 3590145T DE 3590145 T1 DE3590145 T1 DE 3590145T1
- Authority
- DE
- Germany
- Prior art keywords
- measuring device
- measuring
- surface roughness
- circuit
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003746 surface roughness Effects 0.000 title claims description 25
- 238000000034 method Methods 0.000 claims description 22
- 239000000523 sample Substances 0.000 claims description 20
- 238000006073 displacement reaction Methods 0.000 claims description 18
- 238000012545 processing Methods 0.000 claims description 11
- 238000012937 correction Methods 0.000 claims description 7
- 238000005070 sampling Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 3
- 230000005674 electromagnetic induction Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 5
- 230000004044 response Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241001067759 Senta Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7133884A JPS60214207A (ja) | 1984-04-10 | 1984-04-10 | 表面粗さ測定機 |
| JP7133984A JPS60214212A (ja) | 1984-04-10 | 1984-04-10 | 測定装置 |
| JP7133784A JPS60214206A (ja) | 1984-04-10 | 1984-04-10 | 表面粗さ測定機 |
| JP7133684A JPS60214205A (ja) | 1984-04-10 | 1984-04-10 | 表面粗さ測定機 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3590145T1 true DE3590145T1 (de) | 1986-04-24 |
Family
ID=27465357
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853590145 Pending DE3590145T1 (de) | 1984-04-10 | 1985-04-10 | Oberflächenrauheit-Meßgerät |
| DE3590145A Revoked DE3590145C2 (en, 2012) | 1984-04-10 | 1985-04-10 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3590145A Revoked DE3590145C2 (en, 2012) | 1984-04-10 | 1985-04-10 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4665739A (en, 2012) |
| DE (2) | DE3590145T1 (en, 2012) |
| GB (1) | GB2165361B (en, 2012) |
| WO (1) | WO1985004707A1 (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3990128C2 (de) * | 1989-02-16 | 1994-10-13 | Bando Chemical Ind | Vorrichtung zum Prüfen einer Firstlinie elastischer Körper |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4765181A (en) * | 1985-08-08 | 1988-08-23 | Tokyo Seimitsu Co., Ltd. | Surface texture measuring instrument |
| GB8605324D0 (en) * | 1986-03-04 | 1986-04-09 | Rank Taylor Hobson Ltd | Metrological apparatus |
| JPH0419461Y2 (en, 2012) * | 1987-04-06 | 1992-05-01 | ||
| US4776212A (en) * | 1987-06-19 | 1988-10-11 | Federal Products Corporation | Pocket surface roughness gage |
| US4928517A (en) * | 1987-08-10 | 1990-05-29 | Precision Devices Inc. | Surface measuring instrument link arm assembly |
| FR2645638A1 (fr) * | 1989-04-11 | 1990-10-12 | Inst Superieur Etat Surfaces | Procede et dispositif de mesurage profilometrique de large echelle et leurs applications a la mesure de l'etat de surfaces de forme quelconque |
| US5150314A (en) * | 1989-06-23 | 1992-09-22 | Rank Taylor Hobson Limited | Metrological apparatus and calibration method therefor |
| US5189906A (en) * | 1989-11-28 | 1993-03-02 | Digital Instruments, Inc. | Compact atomic force microscope |
| US5085070A (en) * | 1990-02-07 | 1992-02-04 | At&T Bell Laboratories | Capacitive force-balance system for measuring small forces and pressures |
| DE4214523C2 (de) * | 1992-05-01 | 1994-09-22 | Juergen Dr Manthey | Verfahren zur Beeinflussung der Körperhaltung |
| CN1037125C (zh) * | 1992-07-10 | 1998-01-21 | 山东工业大学 | 一种检测表面粗糙度的方法及装置 |
| GB2272059B (en) * | 1992-10-20 | 1996-03-20 | Mitutoyo Corp | Surface-roughness measuring apparatus |
| CA2112792A1 (en) * | 1993-01-29 | 1994-07-30 | Donald F. Rogowski | Paper surface roughness analyzer |
| JP3199141B2 (ja) * | 1993-07-07 | 2001-08-13 | ソニー株式会社 | ドラムリード測定装置と測定方法 |
| GB2281779B (en) * | 1993-09-14 | 1997-04-23 | Rank Taylor Hobson Ltd | Metrological instrument |
| US5838445A (en) * | 1995-06-07 | 1998-11-17 | Micron Technology, Inc. | Method and apparatus for determining surface roughness |
| GB2339287B (en) * | 1998-07-09 | 2002-12-24 | Taylor Hobson Ltd | Transducer circuit |
| JP3373465B2 (ja) * | 1999-11-01 | 2003-02-04 | 株式会社ミツトヨ | 表面性状測定機 |
| FR2810111B1 (fr) | 2000-06-09 | 2004-04-02 | Univ Haute Alsace | Dispositif pour evaluer l'etat de surface d'un materiau et procede de mise en oeuvre dudit dispositif |
| JP3632153B2 (ja) * | 2000-11-06 | 2005-03-23 | 株式会社東京精密 | 粗さ測定方法及び粗さ測定装置 |
| JP4568621B2 (ja) * | 2005-02-28 | 2010-10-27 | 株式会社ミツトヨ | 表面性状測定機の真直度補正方法および表面性状測定機 |
| EP1783454B1 (en) * | 2005-11-08 | 2009-09-16 | Mitutoyo Corporation | Form measuring instrument |
| US20080208524A1 (en) * | 2007-02-21 | 2008-08-28 | Elcometer Instruments Limited | Surface profile measuring instrument |
| CN101216281B (zh) * | 2008-01-04 | 2010-04-21 | 洛阳轴研科技股份有限公司 | 一种可用于测量轴承及其它零件表面形貌的测量仪 |
| KR101990157B1 (ko) * | 2011-05-03 | 2019-06-17 | 스말테크 인터내셔날, 엘엘씨 | 미세-방전 기반 계측 시스템 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB553108A (en) * | 1941-12-02 | 1943-05-07 | Harry Shaw | Improvements in or relating to apparatus for determining the roughness of surfaces |
| DE891374C (de) * | 1942-04-23 | 1953-09-28 | Johannes Dr-Ing Perthen | Einrichtung zur Abtastung von Oberflaechen und Modellen |
| US2397923A (en) * | 1943-02-26 | 1946-04-09 | Brush Dev Co | Roughness measuring means |
| GB1318701A (en) * | 1970-01-30 | 1973-05-31 | Rank Organisation Ltd | Methods of waveform analysis and apparatus therefor |
| US3795132A (en) * | 1972-05-30 | 1974-03-05 | Caterpillar Tractor Co | Curved surface finish analyzer |
| JPS582361B2 (ja) * | 1974-08-22 | 1983-01-17 | カブシキガイシヤ コサカケンキユウシヨ | ヘイキンケイシヤセイブンジヨキヨソウチ |
| DE2617707C2 (de) * | 1975-04-23 | 1986-02-20 | The Rank Organisation Ltd., London | Vorrichtung zum Vermessen einer Oberfläche |
| DE2535912A1 (de) * | 1975-08-12 | 1977-02-17 | Salje Ernst | Verfahren und vorrichtung zur rauhigkeitspruefung von oberflaechen |
| DE2620895C3 (de) * | 1976-05-12 | 1980-11-20 | Hommelwerke Gmbh, 7220 Schwenningen | Einrichtung zur Messung der mittleren Rauhtiefe einer Werkstückoberfläche |
| DE2654421C2 (de) * | 1976-12-01 | 1985-06-27 | Hommelwerke GmbH, 7730 Villingen-Schwenningen | Meßvorrichtung zur Messung der Oberflächenbeschaffenheit eines Werkstücks |
| US4133204A (en) * | 1978-05-15 | 1979-01-09 | The United States Of America As Represented By The Secretary Of The Navy | Roughness diagnostic tool |
| US4200986A (en) * | 1978-09-21 | 1980-05-06 | Ait Corporation | Digital indicator |
| JPS5810602A (ja) * | 1981-07-10 | 1983-01-21 | Shikishima Boseki Kk | 糸条の太さ斑解析装置 |
| JPS5930008A (ja) * | 1982-08-12 | 1984-02-17 | Toshiba Corp | 表面形状解析オンライン評価装置 |
| US4573131A (en) * | 1983-08-31 | 1986-02-25 | John Corbin | Method and apparatus for measuring surface roughness |
-
1985
- 1985-04-10 DE DE19853590145 patent/DE3590145T1/de active Pending
- 1985-04-10 WO PCT/JP1985/000181 patent/WO1985004707A1/ja active Application Filing
- 1985-04-10 US US06/757,832 patent/US4665739A/en not_active Expired - Fee Related
- 1985-04-10 DE DE3590145A patent/DE3590145C2/de not_active Revoked
- 1985-04-10 GB GB08527703A patent/GB2165361B/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3990128C2 (de) * | 1989-02-16 | 1994-10-13 | Bando Chemical Ind | Vorrichtung zum Prüfen einer Firstlinie elastischer Körper |
Also Published As
| Publication number | Publication date |
|---|---|
| GB8527703D0 (en) | 1985-12-11 |
| GB2165361B (en) | 1988-01-27 |
| WO1985004707A1 (en) | 1985-10-24 |
| GB2165361A (en) | 1986-04-09 |
| DE3590145C2 (en, 2012) | 1990-02-22 |
| US4665739A (en) | 1987-05-19 |
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