DE3343191A1 - Ionenpumpe - Google Patents
IonenpumpeInfo
- Publication number
- DE3343191A1 DE3343191A1 DE19833343191 DE3343191A DE3343191A1 DE 3343191 A1 DE3343191 A1 DE 3343191A1 DE 19833343191 DE19833343191 DE 19833343191 DE 3343191 A DE3343191 A DE 3343191A DE 3343191 A1 DE3343191 A1 DE 3343191A1
- Authority
- DE
- Germany
- Prior art keywords
- pump housing
- pump
- anode
- aluminum
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 108010083687 Ion Pumps Proteins 0.000 claims description 22
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 150000002739 metals Chemical class 0.000 claims description 8
- 239000012212 insulator Substances 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 239000011777 magnesium Substances 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 102000006391 Ion Pumps Human genes 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- -1 nitrogen ions Chemical class 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 241001676573 Minium Species 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000010006 flight Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57232749A JPS59123152A (ja) | 1982-12-28 | 1982-12-28 | イオンポンプ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3343191A1 true DE3343191A1 (de) | 1984-07-05 |
Family
ID=16944151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19833343191 Ceased DE3343191A1 (de) | 1982-12-28 | 1983-11-29 | Ionenpumpe |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4594054A (enExample) |
| JP (1) | JPS59123152A (enExample) |
| DE (1) | DE3343191A1 (enExample) |
| FR (1) | FR2538614B1 (enExample) |
| GB (1) | GB2133610B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6254456U (enExample) * | 1985-09-26 | 1987-04-04 | ||
| JPS6351037A (ja) * | 1986-08-20 | 1988-03-04 | Toshiba Corp | 電子ビ−ム装置の陽極室 |
| DE10130464B4 (de) * | 2001-06-23 | 2010-09-16 | Thales Electron Devices Gmbh | Plasmabeschleuniger-Anordnung |
| US20040062659A1 (en) * | 2002-07-12 | 2004-04-01 | Sinha Mahadeva P. | Ion pump with combined housing and cathode |
| US7413412B2 (en) * | 2004-06-28 | 2008-08-19 | Hewlett-Packard Development Company, L.P. | Vacuum micropump and gauge |
| EP2112678B1 (en) * | 2007-02-16 | 2021-03-31 | National Institute of Information and Communications Technology | Vacuum conveyance system |
| EP2249373B1 (en) * | 2008-02-14 | 2017-08-02 | National Institute of Information and Communications Technology | Ion pump system and electromagnetic field generator |
| EP2151849B1 (en) * | 2008-08-08 | 2011-12-14 | Agilent Technologies Italia S.p.A. | Vacuum pumping system comprising a plurality of sputter ion pumps |
| JP5786140B2 (ja) * | 2009-10-30 | 2015-09-30 | パナソニックＩｐマネジメント株式会社 | 電解コンデンサ用電極箔およびこれを用いた電解コンデンサ |
| US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
| US9960025B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Cold-matter system having ion pump integrated with channel cell |
| US10665437B2 (en) * | 2015-02-10 | 2020-05-26 | Hamilton Sundstrand Corporation | System and method for enhanced ion pump lifespan |
| US10460917B2 (en) * | 2016-05-26 | 2019-10-29 | AOSense, Inc. | Miniature ion pump |
| GB2627461A (en) * | 2023-02-22 | 2024-08-28 | Edwards Vacuum Llc | Sputter Ion pump module and vacuum pump |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3535055A (en) * | 1959-05-25 | 1970-10-20 | Bendix Corp | Cold-cathode discharge ion pump |
| DE2426387A1 (de) * | 1973-06-04 | 1974-12-19 | Varian Associates | Bauelement fuer vakuumpumpen |
| DE2640781B2 (de) * | 1976-09-10 | 1978-12-07 | Deutsches Elektronen-Synchrotron Desy, 2000 Hamburg | Ionengetterpumpe |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2755014A (en) * | 1953-04-24 | 1956-07-17 | Gen Electric | Ionic vacuum pump device |
| FR1485659A (fr) * | 1966-05-09 | 1967-06-23 | Alcatel Sa | Manomètre à cathode froide à plasmas multiples |
| US4097195A (en) * | 1975-02-12 | 1978-06-27 | Varian Associates, Inc. | High vacuum pump |
| US3994625A (en) * | 1975-02-18 | 1976-11-30 | Varian Associates | Sputter-ion pump having improved cooling and improved magnetic circuitry |
| DE2713214A1 (de) * | 1977-03-25 | 1978-09-28 | Leybold Heraeus Gmbh & Co Kg | Ionenzerstaeuberpumpe |
| GB2040555A (en) * | 1978-11-21 | 1980-08-28 | Westinghouse Electric Corp | Gettering vacuum systems |
-
1982
- 1982-12-28 JP JP57232749A patent/JPS59123152A/ja active Granted
-
1983
- 1983-09-27 FR FR8315346A patent/FR2538614B1/fr not_active Expired
- 1983-09-30 GB GB08326304A patent/GB2133610B/en not_active Expired
- 1983-11-18 US US06/553,241 patent/US4594054A/en not_active Expired - Fee Related
- 1983-11-29 DE DE19833343191 patent/DE3343191A1/de not_active Ceased
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3535055A (en) * | 1959-05-25 | 1970-10-20 | Bendix Corp | Cold-cathode discharge ion pump |
| DE2426387A1 (de) * | 1973-06-04 | 1974-12-19 | Varian Associates | Bauelement fuer vakuumpumpen |
| DE2640781B2 (de) * | 1976-09-10 | 1978-12-07 | Deutsches Elektronen-Synchrotron Desy, 2000 Hamburg | Ionengetterpumpe |
Non-Patent Citations (1)
| Title |
|---|
| "J. Vac. Sci. Technol." 13(1976) 498-502 * |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2133610A (en) | 1984-07-25 |
| GB2133610B (en) | 1986-05-14 |
| FR2538614A1 (fr) | 1984-06-29 |
| US4594054A (en) | 1986-06-10 |
| FR2538614B1 (fr) | 1987-06-19 |
| JPS6112333B2 (enExample) | 1986-04-08 |
| GB8326304D0 (en) | 1983-11-02 |
| JPS59123152A (ja) | 1984-07-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8131 | Rejection |