GB2133610B - An ion pump - Google Patents

An ion pump

Info

Publication number
GB2133610B
GB2133610B GB08326304A GB8326304A GB2133610B GB 2133610 B GB2133610 B GB 2133610B GB 08326304 A GB08326304 A GB 08326304A GB 8326304 A GB8326304 A GB 8326304A GB 2133610 B GB2133610 B GB 2133610B
Authority
GB
United Kingdom
Prior art keywords
ion pump
ion
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08326304A
Other languages
English (en)
Other versions
GB2133610A (en
GB8326304D0 (en
Inventor
Hajime Shimaru
Katsuya Narushima
Takashi Momose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ishimaru Hajime
Original Assignee
Ishimaru Hajime
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishimaru Hajime filed Critical Ishimaru Hajime
Publication of GB8326304D0 publication Critical patent/GB8326304D0/en
Publication of GB2133610A publication Critical patent/GB2133610A/en
Application granted granted Critical
Publication of GB2133610B publication Critical patent/GB2133610B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors
GB08326304A 1982-12-28 1983-09-30 An ion pump Expired GB2133610B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57232749A JPS59123152A (ja) 1982-12-28 1982-12-28 イオンポンプ

Publications (3)

Publication Number Publication Date
GB8326304D0 GB8326304D0 (en) 1983-11-02
GB2133610A GB2133610A (en) 1984-07-25
GB2133610B true GB2133610B (en) 1986-05-14

Family

ID=16944151

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08326304A Expired GB2133610B (en) 1982-12-28 1983-09-30 An ion pump

Country Status (5)

Country Link
US (1) US4594054A (enExample)
JP (1) JPS59123152A (enExample)
DE (1) DE3343191A1 (enExample)
FR (1) FR2538614B1 (enExample)
GB (1) GB2133610B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254456U (enExample) * 1985-09-26 1987-04-04
JPS6351037A (ja) * 1986-08-20 1988-03-04 Toshiba Corp 電子ビ−ム装置の陽極室
DE10130464B4 (de) * 2001-06-23 2010-09-16 Thales Electron Devices Gmbh Plasmabeschleuniger-Anordnung
US20040062659A1 (en) * 2002-07-12 2004-04-01 Sinha Mahadeva P. Ion pump with combined housing and cathode
US7413412B2 (en) * 2004-06-28 2008-08-19 Hewlett-Packard Development Company, L.P. Vacuum micropump and gauge
EP2112678B1 (en) * 2007-02-16 2021-03-31 National Institute of Information and Communications Technology Vacuum conveyance system
EP2249373B1 (en) * 2008-02-14 2017-08-02 National Institute of Information and Communications Technology Ion pump system and electromagnetic field generator
EP2151849B1 (en) * 2008-08-08 2011-12-14 Agilent Technologies Italia S.p.A. Vacuum pumping system comprising a plurality of sputter ion pumps
JP5786140B2 (ja) * 2009-10-30 2015-09-30 パナソニックＩｐマネジメント株式会社 電解コンデンサ用電極箔およびこれを用いた電解コンデンサ
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US9960025B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Cold-matter system having ion pump integrated with channel cell
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
GB2627461A (en) * 2023-02-22 2024-08-28 Edwards Vacuum Llc Sputter Ion pump module and vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device
NL251847A (enExample) * 1959-05-25
FR1485659A (fr) * 1966-05-09 1967-06-23 Alcatel Sa Manomètre à cathode froide à plasmas multiples
GB1437289A (en) * 1973-06-04 1976-05-26 Varian Associates Vacuum pump
US4097195A (en) * 1975-02-12 1978-06-27 Varian Associates, Inc. High vacuum pump
US3994625A (en) * 1975-02-18 1976-11-30 Varian Associates Sputter-ion pump having improved cooling and improved magnetic circuitry
DE2640781C3 (de) * 1976-09-10 1979-08-23 Deutsches Elektronen-Synchrotron Desy, 2000 Hamburg lonengetterpumpe
DE2713214A1 (de) * 1977-03-25 1978-09-28 Leybold Heraeus Gmbh & Co Kg Ionenzerstaeuberpumpe
GB2040555A (en) * 1978-11-21 1980-08-28 Westinghouse Electric Corp Gettering vacuum systems

Also Published As

Publication number Publication date
GB2133610A (en) 1984-07-25
FR2538614A1 (fr) 1984-06-29
US4594054A (en) 1986-06-10
FR2538614B1 (fr) 1987-06-19
JPS6112333B2 (enExample) 1986-04-08
GB8326304D0 (en) 1983-11-02
JPS59123152A (ja) 1984-07-16
DE3343191A1 (de) 1984-07-05

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19920930