FR2538614B1 - Pompe a ions - Google Patents

Pompe a ions

Info

Publication number
FR2538614B1
FR2538614B1 FR8315346A FR8315346A FR2538614B1 FR 2538614 B1 FR2538614 B1 FR 2538614B1 FR 8315346 A FR8315346 A FR 8315346A FR 8315346 A FR8315346 A FR 8315346A FR 2538614 B1 FR2538614 B1 FR 2538614B1
Authority
FR
France
Prior art keywords
ion pump
ion
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8315346A
Other languages
English (en)
French (fr)
Other versions
FR2538614A1 (fr
Inventor
Hajime Ishimaru
Katsuya Narushima
Takashi Momose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of FR2538614A1 publication Critical patent/FR2538614A1/fr
Application granted granted Critical
Publication of FR2538614B1 publication Critical patent/FR2538614B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors
FR8315346A 1982-12-28 1983-09-27 Pompe a ions Expired FR2538614B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57232749A JPS59123152A (ja) 1982-12-28 1982-12-28 イオンポンプ

Publications (2)

Publication Number Publication Date
FR2538614A1 FR2538614A1 (fr) 1984-06-29
FR2538614B1 true FR2538614B1 (fr) 1987-06-19

Family

ID=16944151

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8315346A Expired FR2538614B1 (fr) 1982-12-28 1983-09-27 Pompe a ions

Country Status (5)

Country Link
US (1) US4594054A (enExample)
JP (1) JPS59123152A (enExample)
DE (1) DE3343191A1 (enExample)
FR (1) FR2538614B1 (enExample)
GB (1) GB2133610B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254456U (enExample) * 1985-09-26 1987-04-04
JPS6351037A (ja) * 1986-08-20 1988-03-04 Toshiba Corp 電子ビ−ム装置の陽極室
DE10130464B4 (de) * 2001-06-23 2010-09-16 Thales Electron Devices Gmbh Plasmabeschleuniger-Anordnung
US20040062659A1 (en) * 2002-07-12 2004-04-01 Sinha Mahadeva P. Ion pump with combined housing and cathode
US7413412B2 (en) * 2004-06-28 2008-08-19 Hewlett-Packard Development Company, L.P. Vacuum micropump and gauge
EP2112678B1 (en) * 2007-02-16 2021-03-31 National Institute of Information and Communications Technology Vacuum conveyance system
EP2249373B1 (en) * 2008-02-14 2017-08-02 National Institute of Information and Communications Technology Ion pump system and electromagnetic field generator
EP2151849B1 (en) * 2008-08-08 2011-12-14 Agilent Technologies Italia S.p.A. Vacuum pumping system comprising a plurality of sputter ion pumps
JP5786140B2 (ja) * 2009-10-30 2015-09-30 パナソニックＩｐマネジメント株式会社 電解コンデンサ用電極箔およびこれを用いた電解コンデンサ
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US9960025B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Cold-matter system having ion pump integrated with channel cell
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
GB2627461A (en) * 2023-02-22 2024-08-28 Edwards Vacuum Llc Sputter Ion pump module and vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device
NL251847A (enExample) * 1959-05-25
FR1485659A (fr) * 1966-05-09 1967-06-23 Alcatel Sa Manomètre à cathode froide à plasmas multiples
GB1437289A (en) * 1973-06-04 1976-05-26 Varian Associates Vacuum pump
US4097195A (en) * 1975-02-12 1978-06-27 Varian Associates, Inc. High vacuum pump
US3994625A (en) * 1975-02-18 1976-11-30 Varian Associates Sputter-ion pump having improved cooling and improved magnetic circuitry
DE2640781C3 (de) * 1976-09-10 1979-08-23 Deutsches Elektronen-Synchrotron Desy, 2000 Hamburg lonengetterpumpe
DE2713214A1 (de) * 1977-03-25 1978-09-28 Leybold Heraeus Gmbh & Co Kg Ionenzerstaeuberpumpe
GB2040555A (en) * 1978-11-21 1980-08-28 Westinghouse Electric Corp Gettering vacuum systems

Also Published As

Publication number Publication date
GB2133610A (en) 1984-07-25
GB2133610B (en) 1986-05-14
FR2538614A1 (fr) 1984-06-29
US4594054A (en) 1986-06-10
JPS6112333B2 (enExample) 1986-04-08
GB8326304D0 (en) 1983-11-02
JPS59123152A (ja) 1984-07-16
DE3343191A1 (de) 1984-07-05

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Legal Events

Date Code Title Description
ST Notification of lapse