FR1485659A - Manomètre à cathode froide à plasmas multiples - Google Patents

Manomètre à cathode froide à plasmas multiples

Info

Publication number
FR1485659A
FR1485659A FR60805A FR60805A FR1485659A FR 1485659 A FR1485659 A FR 1485659A FR 60805 A FR60805 A FR 60805A FR 60805 A FR60805 A FR 60805A FR 1485659 A FR1485659 A FR 1485659A
Authority
FR
France
Prior art keywords
pressure gauge
cold cathode
cathode pressure
multiple plasma
plasma cold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR60805A
Other languages
English (en)
Inventor
Jacques Tallon
Gilbert Gontero
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA filed Critical Alcatel SA
Priority to FR60805A priority Critical patent/FR1485659A/fr
Priority to DE19671648689 priority patent/DE1648689B1/de
Priority to CH641167A priority patent/CH452923A/fr
Priority to US636883A priority patent/US3493807A/en
Priority to GB21282/67A priority patent/GB1156607A/en
Priority to NL676706424A priority patent/NL141027B/xx
Application granted granted Critical
Publication of FR1485659A publication Critical patent/FR1485659A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR60805A 1966-05-09 1966-05-09 Manomètre à cathode froide à plasmas multiples Expired FR1485659A (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR60805A FR1485659A (fr) 1966-05-09 1966-05-09 Manomètre à cathode froide à plasmas multiples
DE19671648689 DE1648689B1 (de) 1966-05-09 1967-05-03 Kaltkatoden ionisationsmanometer
CH641167A CH452923A (fr) 1966-05-09 1967-05-05 Manomètre à ionisation à cathode froide et à plasmas multiples
US636883A US3493807A (en) 1966-05-09 1967-05-08 Cold cathode manometer
GB21282/67A GB1156607A (en) 1966-05-09 1967-05-08 Cold Cathode Ionization Gauge
NL676706424A NL141027B (nl) 1966-05-09 1967-05-08 Ionisatiemanometer.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR60805A FR1485659A (fr) 1966-05-09 1966-05-09 Manomètre à cathode froide à plasmas multiples

Publications (1)

Publication Number Publication Date
FR1485659A true FR1485659A (fr) 1967-06-23

Family

ID=8608151

Family Applications (1)

Application Number Title Priority Date Filing Date
FR60805A Expired FR1485659A (fr) 1966-05-09 1966-05-09 Manomètre à cathode froide à plasmas multiples

Country Status (6)

Country Link
US (1) US3493807A (fr)
CH (1) CH452923A (fr)
DE (1) DE1648689B1 (fr)
FR (1) FR1485659A (fr)
GB (1) GB1156607A (fr)
NL (1) NL141027B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3120125A1 (fr) 2021-02-25 2022-08-26 Saint-Gobain Glass France Dispositif de mesure de pression vide secondaire et système embarqué pour mesure de pression de vide résiduel

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59123152A (ja) * 1982-12-28 1984-07-16 Hajime Ishimaru イオンポンプ
GB9302587D0 (en) * 1993-02-10 1993-03-24 Boc Group The Magnitc structures
DE19734914C1 (de) * 1997-08-12 1998-12-10 Saskia Solar Und Energietechni Vakuumsensor nach dem Penning-Prinzip
DE10243634B4 (de) 2002-09-19 2005-02-03 Otto-Von-Guericke-Universität Magdeburg Kaltkatoden-Ionisationsmanometer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
US2941099A (en) * 1958-11-17 1960-06-14 Central Scientific Co Cold cathode ionization gauge
US3376455A (en) * 1966-02-28 1968-04-02 Varian Associates Ionic vacuum pump having multiple externally mounted magnetic circuits

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3120125A1 (fr) 2021-02-25 2022-08-26 Saint-Gobain Glass France Dispositif de mesure de pression vide secondaire et système embarqué pour mesure de pression de vide résiduel
WO2022180085A1 (fr) 2021-02-25 2022-09-01 Saint-Gobain Glass France Dispositif de mesure de pression vide secondaire et système embarqué pour mesure de pression de vide résiduel

Also Published As

Publication number Publication date
NL6706424A (fr) 1967-11-10
DE1648689B1 (de) 1971-05-06
GB1156607A (en) 1969-07-02
US3493807A (en) 1970-02-03
CH452923A (fr) 1968-03-15
NL141027B (nl) 1974-01-15

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