CA700880A - Cold cathode ionization gauge - Google Patents

Cold cathode ionization gauge

Info

Publication number
CA700880A
CA700880A CA700880A CA700880DA CA700880A CA 700880 A CA700880 A CA 700880A CA 700880 A CA700880 A CA 700880A CA 700880D A CA700880D A CA 700880DA CA 700880 A CA700880 A CA 700880A
Authority
CA
Canada
Prior art keywords
cold cathode
ionization gauge
cathode ionization
gauge
cold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA700880A
Inventor
L. Jepsen Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Publication date
Application granted granted Critical
Publication of CA700880A publication Critical patent/CA700880A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
CA700880A Cold cathode ionization gauge Expired CA700880A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA700880T

Publications (1)

Publication Number Publication Date
CA700880A true CA700880A (en) 1964-12-29

Family

ID=36014533

Family Applications (1)

Application Number Title Priority Date Filing Date
CA700880A Expired CA700880A (en) Cold cathode ionization gauge

Country Status (1)

Country Link
CA (1) CA700880A (en)

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