JPS6112333B2 - - Google Patents

Info

Publication number
JPS6112333B2
JPS6112333B2 JP57232749A JP23274982A JPS6112333B2 JP S6112333 B2 JPS6112333 B2 JP S6112333B2 JP 57232749 A JP57232749 A JP 57232749A JP 23274982 A JP23274982 A JP 23274982A JP S6112333 B2 JPS6112333 B2 JP S6112333B2
Authority
JP
Japan
Prior art keywords
pump
pump casing
anode
aluminum
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57232749A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59123152A (ja
Inventor
Hajime Ishimaru
Katsuya Narishima
Takashi Momose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP57232749A priority Critical patent/JPS59123152A/ja
Priority to FR8315346A priority patent/FR2538614B1/fr
Priority to GB08326304A priority patent/GB2133610B/en
Priority to US06/553,241 priority patent/US4594054A/en
Priority to DE19833343191 priority patent/DE3343191A1/de
Publication of JPS59123152A publication Critical patent/JPS59123152A/ja
Publication of JPS6112333B2 publication Critical patent/JPS6112333B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Landscapes

  • Electron Tubes For Measurement (AREA)
JP57232749A 1982-12-28 1982-12-28 イオンポンプ Granted JPS59123152A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP57232749A JPS59123152A (ja) 1982-12-28 1982-12-28 イオンポンプ
FR8315346A FR2538614B1 (fr) 1982-12-28 1983-09-27 Pompe a ions
GB08326304A GB2133610B (en) 1982-12-28 1983-09-30 An ion pump
US06/553,241 US4594054A (en) 1982-12-28 1983-11-18 Ion pump
DE19833343191 DE3343191A1 (de) 1982-12-28 1983-11-29 Ionenpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57232749A JPS59123152A (ja) 1982-12-28 1982-12-28 イオンポンプ

Publications (2)

Publication Number Publication Date
JPS59123152A JPS59123152A (ja) 1984-07-16
JPS6112333B2 true JPS6112333B2 (enExample) 1986-04-08

Family

ID=16944151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57232749A Granted JPS59123152A (ja) 1982-12-28 1982-12-28 イオンポンプ

Country Status (5)

Country Link
US (1) US4594054A (enExample)
JP (1) JPS59123152A (enExample)
DE (1) DE3343191A1 (enExample)
FR (1) FR2538614B1 (enExample)
GB (1) GB2133610B (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254456U (enExample) * 1985-09-26 1987-04-04
JPS6351037A (ja) * 1986-08-20 1988-03-04 Toshiba Corp 電子ビ−ム装置の陽極室
DE10130464B4 (de) * 2001-06-23 2010-09-16 Thales Electron Devices Gmbh Plasmabeschleuniger-Anordnung
US20040062659A1 (en) * 2002-07-12 2004-04-01 Sinha Mahadeva P. Ion pump with combined housing and cathode
US7413412B2 (en) * 2004-06-28 2008-08-19 Hewlett-Packard Development Company, L.P. Vacuum micropump and gauge
WO2008099610A1 (ja) * 2007-02-16 2008-08-21 National Institute Of Information And Communications Technology イオンポンプ装置
EP2249373B1 (en) * 2008-02-14 2017-08-02 National Institute of Information and Communications Technology Ion pump system and electromagnetic field generator
EP2151849B1 (en) * 2008-08-08 2011-12-14 Agilent Technologies Italia S.p.A. Vacuum pumping system comprising a plurality of sputter ion pumps
CN102597286B (zh) * 2009-10-30 2014-10-15 松下电器产业株式会社 电极箔及使用该电极箔的电容器
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US9960025B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Cold-matter system having ion pump integrated with channel cell
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
GB2627461A (en) * 2023-02-22 2024-08-28 Edwards Vacuum Llc Sputter Ion pump module and vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device
NL251847A (enExample) * 1959-05-25
FR1485659A (fr) * 1966-05-09 1967-06-23 Alcatel Sa Manomètre à cathode froide à plasmas multiples
GB1437289A (en) * 1973-06-04 1976-05-26 Varian Associates Vacuum pump
US4097195A (en) * 1975-02-12 1978-06-27 Varian Associates, Inc. High vacuum pump
US3994625A (en) * 1975-02-18 1976-11-30 Varian Associates Sputter-ion pump having improved cooling and improved magnetic circuitry
DE2640781C3 (de) * 1976-09-10 1979-08-23 Deutsches Elektronen-Synchrotron Desy, 2000 Hamburg lonengetterpumpe
DE2713214A1 (de) * 1977-03-25 1978-09-28 Leybold Heraeus Gmbh & Co Kg Ionenzerstaeuberpumpe
GB2040555A (en) * 1978-11-21 1980-08-28 Westinghouse Electric Corp Gettering vacuum systems

Also Published As

Publication number Publication date
GB2133610A (en) 1984-07-25
GB2133610B (en) 1986-05-14
GB8326304D0 (en) 1983-11-02
DE3343191A1 (de) 1984-07-05
FR2538614B1 (fr) 1987-06-19
JPS59123152A (ja) 1984-07-16
FR2538614A1 (fr) 1984-06-29
US4594054A (en) 1986-06-10

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