GB1437289A - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
GB1437289A
GB1437289A GB2374874A GB2374874A GB1437289A GB 1437289 A GB1437289 A GB 1437289A GB 2374874 A GB2374874 A GB 2374874A GB 2374874 A GB2374874 A GB 2374874A GB 1437289 A GB1437289 A GB 1437289A
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
vacuum
sputter
pump
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2374874A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB1437289A publication Critical patent/GB1437289A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F04B37/04—Selection of specific absorption or adsorption materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

1437289 Ion pumps VARIAN ASSOCIATES 29 May 1974 [4 June 1973] 23748/74 Heading H1D [Also in Division C7] A component of a vacuum pump (e.g. a sputter-ion pump for pumping hydrogen) which in use, will be exposed to a vacuum environment, is made from an alloy containing a major amount of one or more elements of Group IVB of the Periodic Table (e.g. Ti, Zr and Hf) which is so compounded that the transition temperature HCP to BCC is lower than for the major constituent alone. Specific alloys mentioned are Ti 73%, V 13%, Cr 11% and Al 3% and Ti 78% Mo 11À5% Zr 6% and Sn 4À5%. Reference is made to construction of a vacuum chamber, anode or sputter cathode according to the invention.
GB2374874A 1973-06-04 1974-05-29 Vacuum pump Expired GB1437289A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US36702573A 1973-06-04 1973-06-04

Publications (1)

Publication Number Publication Date
GB1437289A true GB1437289A (en) 1976-05-26

Family

ID=23445620

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2374874A Expired GB1437289A (en) 1973-06-04 1974-05-29 Vacuum pump

Country Status (5)

Country Link
JP (1) JPS5021310A (en)
DE (1) DE2426387A1 (en)
FR (1) FR2231862B1 (en)
GB (1) GB1437289A (en)
IT (1) IT1014746B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133610A (en) * 1982-12-28 1984-07-25 Ishimaru Hajime An ion pump
FR2818363A1 (en) * 2000-12-20 2002-06-21 Sagem Device for linking cold source with element to be carried to cryogenic temperature incorporating tube of alloy able to withstand cryogenic temperatures

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514129A (en) * 1978-07-13 1980-01-31 Honda Motor Co Ltd Continuous treatment device of brazing and gas soft nitriding
JPS55149197U (en) * 1979-04-12 1980-10-27
DE3235681C2 (en) * 1981-11-02 1986-04-24 Maja Feodos'evna Bojarina Non-evaporable getter material
JPS61200652U (en) * 1985-06-07 1986-12-16
JPS63195431U (en) * 1987-06-02 1988-12-15

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1248184A (en) * 1969-04-03 1971-09-29 Westinghouse Electric Corp Yttrium alloy getter
US3684401A (en) * 1970-11-17 1972-08-15 Westinghouse Electric Corp Cathode-getter materials for sputter-ion pumps

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133610A (en) * 1982-12-28 1984-07-25 Ishimaru Hajime An ion pump
FR2818363A1 (en) * 2000-12-20 2002-06-21 Sagem Device for linking cold source with element to be carried to cryogenic temperature incorporating tube of alloy able to withstand cryogenic temperatures

Also Published As

Publication number Publication date
DE2426387A1 (en) 1974-12-19
IT1014746B (en) 1977-04-30
JPS5021310A (en) 1975-03-06
FR2231862B1 (en) 1978-01-20
FR2231862A1 (en) 1974-12-27

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Legal Events

Date Code Title Description
PS Patent sealed
PLE Entries relating assignments, transmissions, licences in the register of patents
PCNP Patent ceased through non-payment of renewal fee