WO2008099610A1 - イオンポンプ装置 - Google Patents

イオンポンプ装置 Download PDF

Info

Publication number
WO2008099610A1
WO2008099610A1 PCT/JP2008/000225 JP2008000225W WO2008099610A1 WO 2008099610 A1 WO2008099610 A1 WO 2008099610A1 JP 2008000225 W JP2008000225 W JP 2008000225W WO 2008099610 A1 WO2008099610 A1 WO 2008099610A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
casing
cylindrical magnets
ion pump
outer circumference
Prior art date
Application number
PCT/JP2008/000225
Other languages
English (en)
French (fr)
Inventor
Shukichi Tanaka
Original Assignee
National Institute Of Information And Communications Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute Of Information And Communications Technology filed Critical National Institute Of Information And Communications Technology
Priority to US12/527,193 priority Critical patent/US8246314B2/en
Priority to EP08710379.2A priority patent/EP2120255B1/en
Priority to JP2008558010A priority patent/JP4831548B2/ja
Publication of WO2008099610A1 publication Critical patent/WO2008099610A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

　【課題】　本発明は，持ち運びできるイオンポンプを提供することを目的とする。 　【解決手段】　上記課題は，ケーシング（１），第１の電極（２），第２の電極（３），複数の円筒状磁石（４），及び接続部（５）を具備するイオンポンプ（６）により解決される。第１の電極（２）は，ケーシング（１）の内側に設けられる。第２の電極（３）は，ケーシング（１）の内壁に固定される。第２の電極（３）は，第１の電極（２）の外周に設置され，第１の電極と第２の電極とは極性が異なる。円筒状磁石（４）は，第２の電極（３）の外周を囲うように設置される。そして，複数の円筒状磁石（４）は，第２の電極（３）の外周を囲うように設置される。複数の円筒状磁石（４）は，ケーシング（１）の中心軸方向に空間を空けて並んで配置される。 　
PCT/JP2008/000225 2007-02-16 2008-02-14 イオンポンプ装置 WO2008099610A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/527,193 US8246314B2 (en) 2007-02-16 2008-02-14 Ion pump device
EP08710379.2A EP2120255B1 (en) 2007-02-16 2008-02-14 Ion pump device
JP2008558010A JP4831548B2 (ja) 2007-02-16 2008-02-14 イオンポンプ及び真空運搬装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007035570 2007-02-16
JP2007-035568 2007-02-16
JP2007-035570 2007-02-16
JP2007035568 2007-02-16

Publications (1)

Publication Number Publication Date
WO2008099610A1 true WO2008099610A1 (ja) 2008-08-21

Family

ID=39689857

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2008/000227 WO2008099612A1 (ja) 2007-02-16 2008-02-14 真空運搬システム
PCT/JP2008/000225 WO2008099610A1 (ja) 2007-02-16 2008-02-14 イオンポンプ装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000227 WO2008099612A1 (ja) 2007-02-16 2008-02-14 真空運搬システム

Country Status (4)

Country Link
US (2) US8328526B2 (ja)
EP (2) EP2120255B1 (ja)
JP (2) JP4831549B2 (ja)
WO (2) WO2008099612A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019091576A (ja) * 2017-11-13 2019-06-13 国立研究開発法人情報通信研究機構 真空作成装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4835756B2 (ja) * 2008-02-14 2011-12-14 独立行政法人情報通信研究機構 イオンポンプシステム及び電磁場発生装置
JP6327974B2 (ja) 2014-06-30 2018-05-23 国立研究開発法人情報通信研究機構 積層型超高真空作成装置
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0465057A (ja) * 1990-07-04 1992-03-02 Hitachi Ltd 荷電粒子線装置
JPH07312202A (ja) * 1994-03-22 1995-11-28 Ulvac Japan Ltd スパッタイオンポンプ
JP2003222574A (ja) * 2002-01-30 2003-08-08 Sumitomo Chem Co Ltd 試料処理装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump
FR1419326A (fr) * 1964-01-02 1966-02-17 Thomson Houston Comp Francaise Perfectionnements aux pompes ioniques
US4389166A (en) * 1979-10-22 1983-06-21 Harvey-Westbury Corp. Self-contained portable air compressor
JPS59123152A (ja) * 1982-12-28 1984-07-16 Hajime Ishimaru イオンポンプ
DE69132441T2 (de) * 1990-06-20 2001-06-07 Hitachi Ltd Ladungsträgerstrahlgerät
JP2732961B2 (ja) * 1991-07-18 1998-03-30 株式会社日立製作所 荷電粒子線装置
JPH06232238A (ja) * 1993-02-05 1994-08-19 Hitachi Ltd 試料処理装置および試料処理方法
JPH06349928A (ja) * 1993-06-03 1994-12-22 Hitachi Ltd 試料搬送装置
JPH0927294A (ja) 1995-07-12 1997-01-28 Ebara Corp イオンポンプ
JPH0927542A (ja) 1995-07-13 1997-01-28 Hitachi Ltd 搬送容器
US6090176A (en) * 1997-03-18 2000-07-18 Kabushiki Kaisha Toshiba Sample transferring method and sample transfer supporting apparatus
JP3978850B2 (ja) * 1998-03-05 2007-09-19 いすゞ自動車株式会社 断熱壁部材
US6351983B1 (en) * 1999-04-12 2002-03-05 The Regents Of The University Of California Portable gas chromatograph mass spectrometer for on-site chemical analyses
WO2001069645A1 (fr) 2000-03-13 2001-09-20 Ulvac, Inc. Pompe ionique a projection
DE10014034C2 (de) * 2000-03-22 2002-01-24 Thomson Tubes Electroniques Gm Plasma-Beschleuniger-Anordnung
US6835048B2 (en) * 2002-12-18 2004-12-28 Varian, Inc. Ion pump having secondary magnetic field
JP2004245660A (ja) * 2003-02-13 2004-09-02 Seiko Instruments Inc 小片試料の作製とその壁面の観察方法及びそのシステム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0465057A (ja) * 1990-07-04 1992-03-02 Hitachi Ltd 荷電粒子線装置
JPH07312202A (ja) * 1994-03-22 1995-11-28 Ulvac Japan Ltd スパッタイオンポンプ
JP2003222574A (ja) * 2002-01-30 2003-08-08 Sumitomo Chem Co Ltd 試料処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019091576A (ja) * 2017-11-13 2019-06-13 国立研究開発法人情報通信研究機構 真空作成装置
JP7008976B2 (ja) 2017-11-13 2022-01-25 国立研究開発法人情報通信研究機構 真空作成装置

Also Published As

Publication number Publication date
US20100098556A1 (en) 2010-04-22
WO2008099612A1 (ja) 2008-08-21
EP2120255A1 (en) 2009-11-18
JP4831548B2 (ja) 2011-12-07
JP4831549B2 (ja) 2011-12-07
EP2112678A4 (en) 2012-07-18
JPWO2008099610A1 (ja) 2010-05-27
EP2120255B1 (en) 2018-07-18
US8328526B2 (en) 2012-12-11
US20100143159A1 (en) 2010-06-10
EP2120255A4 (en) 2012-07-18
EP2112678A1 (en) 2009-10-28
EP2112678B1 (en) 2021-03-31
JPWO2008099612A1 (ja) 2010-05-27
US8246314B2 (en) 2012-08-21

Similar Documents

Publication Publication Date Title
WO2010039786A3 (en) Electric machine
EP2447534A3 (en) Electrically powered pump
USD662099S1 (en) Portable housing and keypad
EP2749737A3 (en) Electric pump
MX2014005795A (es) Celda transductora micro-torneada capacitiva pre-colapsada con region colapsada en forma anular.
WO2013093001A3 (en) Pump housing with an interior for accommodating a pump rotor
MX2013011036A (es) Motor de corriente directa sin escobillas, con rotor externo.
EP1793480A3 (en) Flywheel electric generator
WO2011149283A3 (ko) 오원자 헤테로고리를 포함하는 화합물 및 이를 이용한 유기전기소자, 그 단말
WO2008152957A1 (ja) 電動ポンプ用ロータ及び電動ポンプ
TW200603280A (en) Plasma source coil and plasma chamber using the same
TW200701595A (en) Motor rotor
WO2008099610A1 (ja) イオンポンプ装置
WO2007124195A3 (en) Stator coil assembly
WO2018081040A9 (en) Blood pump with in-situ attaching motor stators
MX2015005918A (es) Dispositivo giratorio trocoide.
WO2013144284A3 (en) Permanent magnet rotor
WO2016004382A3 (en) Rotary machine with encoder directly connected to rotor
ATE537046T1 (de) Vakuumpumpe
EP4148814A4 (en) POLE, WRAPPED BATTERY CELL AND BATTERY
EP2284980A3 (en) Generator with axial gap and permanent magnets
WO2012057488A3 (en) Hermetic compressor
WO2011131598A3 (de) Flügelzellenpumpe
WO2014037752A3 (en) Magnetic gear for use with wellbore instruments
WO2009057981A3 (en) Coreless motor

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08710379

Country of ref document: EP

Kind code of ref document: A1

DPE1 Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101)
ENP Entry into the national phase

Ref document number: 2008558010

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2008710379

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 12527193

Country of ref document: US