WO2008099612A1 - 真空運搬システム - Google Patents

真空運搬システム Download PDF

Info

Publication number
WO2008099612A1
WO2008099612A1 PCT/JP2008/000227 JP2008000227W WO2008099612A1 WO 2008099612 A1 WO2008099612 A1 WO 2008099612A1 JP 2008000227 W JP2008000227 W JP 2008000227W WO 2008099612 A1 WO2008099612 A1 WO 2008099612A1
Authority
WO
WIPO (PCT)
Prior art keywords
conveyance system
casing
vacuum conveyance
outer periphery
negative electrode
Prior art date
Application number
PCT/JP2008/000227
Other languages
English (en)
French (fr)
Inventor
Shukichi Tanaka
Original Assignee
National Institute Of Information And Communications Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute Of Information And Communications Technology filed Critical National Institute Of Information And Communications Technology
Priority to JP2008558012A priority Critical patent/JP4831549B2/ja
Priority to EP08710381.8A priority patent/EP2112678B1/en
Priority to US12/527,194 priority patent/US8328526B2/en
Publication of WO2008099612A1 publication Critical patent/WO2008099612A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

　【課題】　　本発明は，持ち運び可能な真空運搬システムを提供することを目的とする。 　【解決手段】　上記課題は，ケーシング（１）と前記ケーシング（１）内に設けられる陽極（２）と，　前記ケーシング（１）内壁に固定され，前記陽極（２）の外周に設置される陰極（３）と，前記陰極（３）の外周を囲うように設置される磁石（４）と，前記ケーシング（１）を他の装置と接続するための接続部（５）と，を具備するイオンポンプ（６）を具備する真空運搬システムにより解決される。 　
PCT/JP2008/000227 2007-02-16 2008-02-14 真空運搬システム WO2008099612A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008558012A JP4831549B2 (ja) 2007-02-16 2008-02-14 真空運搬システム
EP08710381.8A EP2112678B1 (en) 2007-02-16 2008-02-14 Vacuum conveyance system
US12/527,194 US8328526B2 (en) 2007-02-16 2008-02-14 Vacuum conveyance system

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007035570 2007-02-16
JP2007-035568 2007-02-16
JP2007-035570 2007-02-16
JP2007035568 2007-02-16

Publications (1)

Publication Number Publication Date
WO2008099612A1 true WO2008099612A1 (ja) 2008-08-21

Family

ID=39689857

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2008/000225 WO2008099610A1 (ja) 2007-02-16 2008-02-14 イオンポンプ装置
PCT/JP2008/000227 WO2008099612A1 (ja) 2007-02-16 2008-02-14 真空運搬システム

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000225 WO2008099610A1 (ja) 2007-02-16 2008-02-14 イオンポンプ装置

Country Status (4)

Country Link
US (2) US8328526B2 (ja)
EP (2) EP2112678B1 (ja)
JP (2) JP4831549B2 (ja)
WO (2) WO2008099610A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2249373B1 (en) * 2008-02-14 2017-08-02 National Institute of Information and Communications Technology Ion pump system and electromagnetic field generator
JP6327974B2 (ja) 2014-06-30 2018-05-23 国立研究開発法人情報通信研究機構 積層型超高真空作成装置
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
JP7008976B2 (ja) * 2017-11-13 2022-01-25 国立研究開発法人情報通信研究機構 真空作成装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0465057A (ja) * 1990-07-04 1992-03-02 Hitachi Ltd 荷電粒子線装置
JPH06232238A (ja) * 1993-02-05 1994-08-19 Hitachi Ltd 試料処理装置および試料処理方法
JPH06349928A (ja) * 1993-06-03 1994-12-22 Hitachi Ltd 試料搬送装置
JPH07312202A (ja) * 1994-03-22 1995-11-28 Ulvac Japan Ltd スパッタイオンポンプ
JPH0927542A (ja) * 1995-07-13 1997-01-28 Hitachi Ltd 搬送容器
JPH0927294A (ja) 1995-07-12 1997-01-28 Ebara Corp イオンポンプ
JPH11248088A (ja) * 1998-03-05 1999-09-14 Isuzu Motors Ltd 断熱壁部材
JP2001332209A (ja) 2000-03-13 2001-11-30 Ulvac Japan Ltd スパッタイオンポンプ
JP2003222574A (ja) * 2002-01-30 2003-08-08 Sumitomo Chem Co Ltd 試料処理装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump
FR1419326A (fr) * 1964-01-02 1966-02-17 Thomson Houston Comp Francaise Perfectionnements aux pompes ioniques
US4389166A (en) * 1979-10-22 1983-06-21 Harvey-Westbury Corp. Self-contained portable air compressor
JPS59123152A (ja) * 1982-12-28 1984-07-16 Hajime Ishimaru イオンポンプ
EP0462554B1 (en) * 1990-06-20 2000-10-11 Hitachi, Ltd. Charged particle beam apparatus
JP2732961B2 (ja) * 1991-07-18 1998-03-30 株式会社日立製作所 荷電粒子線装置
US6090176A (en) * 1997-03-18 2000-07-18 Kabushiki Kaisha Toshiba Sample transferring method and sample transfer supporting apparatus
US6351983B1 (en) * 1999-04-12 2002-03-05 The Regents Of The University Of California Portable gas chromatograph mass spectrometer for on-site chemical analyses
DE10014034C2 (de) * 2000-03-22 2002-01-24 Thomson Tubes Electroniques Gm Plasma-Beschleuniger-Anordnung
US6835048B2 (en) * 2002-12-18 2004-12-28 Varian, Inc. Ion pump having secondary magnetic field
JP2004245660A (ja) * 2003-02-13 2004-09-02 Seiko Instruments Inc 小片試料の作製とその壁面の観察方法及びそのシステム

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0465057A (ja) * 1990-07-04 1992-03-02 Hitachi Ltd 荷電粒子線装置
JPH06232238A (ja) * 1993-02-05 1994-08-19 Hitachi Ltd 試料処理装置および試料処理方法
JPH06349928A (ja) * 1993-06-03 1994-12-22 Hitachi Ltd 試料搬送装置
JPH07312202A (ja) * 1994-03-22 1995-11-28 Ulvac Japan Ltd スパッタイオンポンプ
JPH0927294A (ja) 1995-07-12 1997-01-28 Ebara Corp イオンポンプ
JPH0927542A (ja) * 1995-07-13 1997-01-28 Hitachi Ltd 搬送容器
JPH11248088A (ja) * 1998-03-05 1999-09-14 Isuzu Motors Ltd 断熱壁部材
JP2001332209A (ja) 2000-03-13 2001-11-30 Ulvac Japan Ltd スパッタイオンポンプ
JP2003222574A (ja) * 2002-01-30 2003-08-08 Sumitomo Chem Co Ltd 試料処理装置

Also Published As

Publication number Publication date
EP2112678A1 (en) 2009-10-28
JP4831549B2 (ja) 2011-12-07
US8328526B2 (en) 2012-12-11
US20100143159A1 (en) 2010-06-10
EP2112678A4 (en) 2012-07-18
EP2120255B1 (en) 2018-07-18
EP2112678B1 (en) 2021-03-31
US8246314B2 (en) 2012-08-21
WO2008099610A1 (ja) 2008-08-21
EP2120255A4 (en) 2012-07-18
JPWO2008099612A1 (ja) 2010-05-27
EP2120255A1 (en) 2009-11-18
JP4831548B2 (ja) 2011-12-07
JPWO2008099610A1 (ja) 2010-05-27
US20100098556A1 (en) 2010-04-22

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