DE3149919C2 - - Google Patents

Info

Publication number
DE3149919C2
DE3149919C2 DE3149919A DE3149919A DE3149919C2 DE 3149919 C2 DE3149919 C2 DE 3149919C2 DE 3149919 A DE3149919 A DE 3149919A DE 3149919 A DE3149919 A DE 3149919A DE 3149919 C2 DE3149919 C2 DE 3149919C2
Authority
DE
Germany
Prior art keywords
polyimide
metallization
solution
copper
nitrogen compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3149919A
Other languages
German (de)
English (en)
Other versions
DE3149919A1 (de
Inventor
Hans-Joachim Grapentin
Hartmut Ing.(Grad.) Mahlkow
Juergen 1000 Berlin De Skupsch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech Deutschland GmbH and Co KG
Original Assignee
Schering AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schering AG filed Critical Schering AG
Priority to DE19813149919 priority Critical patent/DE3149919A1/de
Priority to IT24646/82A priority patent/IT1155419B/it
Priority to JP57214808A priority patent/JPS58108228A/ja
Priority to IE2933/82A priority patent/IE53985B1/en
Priority to GB08235408A priority patent/GB2123854B/en
Priority to US06/449,492 priority patent/US4517254A/en
Priority to FR8220828A priority patent/FR2518102B1/fr
Publication of DE3149919A1 publication Critical patent/DE3149919A1/de
Application granted granted Critical
Publication of DE3149919C2 publication Critical patent/DE3149919C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18—Pretreatment of the material to be coated
    • C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/22—Roughening, e.g. by etching
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/381—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9335—Product by special process
    • Y10S428/936—Chemical deposition, e.g. electroless plating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12556—Organic component
    • Y10T428/12569—Synthetic resin
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12903—Cu-base component
    • Y10T428/1291—Next to Co-, Cu-, or Ni-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31721—Of polyimide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Laminated Bodies (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
DE19813149919 1981-12-11 1981-12-11 Verfahren zum haftfesten metallisieren von polyimid Granted DE3149919A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE19813149919 DE3149919A1 (de) 1981-12-11 1981-12-11 Verfahren zum haftfesten metallisieren von polyimid
IT24646/82A IT1155419B (it) 1981-12-11 1982-12-09 Procedimento di metallizzazione fortemente adesiva di poliimmide
JP57214808A JPS58108228A (ja) 1981-12-11 1982-12-09 ポリイミドの固着金属化法
IE2933/82A IE53985B1 (en) 1981-12-11 1982-12-10 Process for strongly-bonded metallisation of polyimides
GB08235408A GB2123854B (en) 1981-12-11 1982-12-13 Process for strongly-bonded metallisation of polyimides
US06/449,492 US4517254A (en) 1981-12-11 1982-12-13 Adhesive metallization of polyimide
FR8220828A FR2518102B1 (fr) 1981-12-11 1982-12-13 Procede pour realiser sur un polyimide un depot metallique adherant bien, materiau composite polyimide-metal ainsi obtenu et application de ce materiau a la fabrication d'objets moules.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19813149919 DE3149919A1 (de) 1981-12-11 1981-12-11 Verfahren zum haftfesten metallisieren von polyimid

Publications (2)

Publication Number Publication Date
DE3149919A1 DE3149919A1 (de) 1983-06-23
DE3149919C2 true DE3149919C2 (enExample) 1990-01-11

Family

ID=6148931

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813149919 Granted DE3149919A1 (de) 1981-12-11 1981-12-11 Verfahren zum haftfesten metallisieren von polyimid

Country Status (7)

Country Link
US (1) US4517254A (enExample)
JP (1) JPS58108228A (enExample)
DE (1) DE3149919A1 (enExample)
FR (1) FR2518102B1 (enExample)
GB (1) GB2123854B (enExample)
IE (1) IE53985B1 (enExample)
IT (1) IT1155419B (enExample)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3328765A1 (de) * 1983-08-05 1985-02-14 Schering AG, 1000 Berlin und 4709 Bergkamen Loesung zur vorbehandlung von polyimid
DE3328339A1 (de) * 1983-08-05 1985-02-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur metallisierung einer kunststoffoberflaeche
DE3447669A1 (de) * 1983-12-29 1985-07-18 Hitachi, Ltd., Tokio/Tokyo Verbundstruktur aus metall und kunstharz sowie verfahren zu deren herstellung
DE3504455A1 (de) * 1984-02-17 1985-08-22 Omi International Corp. (eine Gesellschaft n.d.Ges.d. Staates Delaware), Warren, Mich. Verfahren zur behandlung eines elektrisch nicht leitenden substrats vor der stromlosen metallisierung
US4659587A (en) * 1984-10-11 1987-04-21 Hitachi, Ltd. Electroless plating process and process for producing multilayer wiring board
DE3530617A1 (de) * 1985-08-23 1987-02-26 Schering Ag Konditionierungsmittel fuer die behandlung von basismaterialien
US4701351A (en) * 1986-06-16 1987-10-20 International Business Machines Corporation Seeding process for electroless metal deposition
US4775449A (en) * 1986-12-29 1988-10-04 General Electric Company Treatment of a polyimide surface to improve the adhesion of metal deposited thereon
US4832799A (en) * 1987-02-24 1989-05-23 Polyonics Corporation Process for coating at least one surface of a polyimide sheet with copper
US4806395A (en) * 1987-02-24 1989-02-21 Polyonics Corporation Textured polyimide film
US4725504A (en) * 1987-02-24 1988-02-16 Polyonics Corporation Metal coated laminate products made from textured polyimide film
US4842946A (en) * 1987-09-28 1989-06-27 General Electric Company Method for treating a polyimide surface to improve the adhesion of metal deposited thereon, and articles produced thereby
DE3743743A1 (de) * 1987-12-23 1989-07-06 Basf Ag Polymere konditionierungsmittel zur vorbehandlung von nichtmetallischen oberflaechen fuer eine chemische metallisierung
DE3813430A1 (de) * 1988-04-18 1989-10-26 Schering Ag Verfahren zur beidseitigen metallisierung von polyimid-folien
US5104734A (en) * 1988-06-03 1992-04-14 International Business Machines Corporation Method for improving adhesion between a polyimide layer and a metal and the article obtained
US4873136A (en) * 1988-06-16 1989-10-10 General Electric Company Method for preparing polymer surfaces for subsequent plating thereon, and improved metal-plated plastic articles made therefrom
US5156731A (en) * 1988-12-13 1992-10-20 Sumitomo Metal Mining Co. Ltd. Polyimide substrate and method of manufacturing a printed wiring board using the substrate
US5242713A (en) * 1988-12-23 1993-09-07 International Business Machines Corporation Method for conditioning an organic polymeric material
US4981715A (en) * 1989-08-10 1991-01-01 Microelectronics And Computer Technology Corporation Method of patterning electroless plated metal on a polymer substrate
US5084299A (en) * 1989-08-10 1992-01-28 Microelectronics And Computer Technology Corporation Method for patterning electroless plated metal on a polymer substrate
US5192581A (en) * 1989-08-10 1993-03-09 Microelectronics And Computer Technology Corporation Protective layer for preventing electroless deposition on a dielectric
US5133840A (en) * 1990-05-15 1992-07-28 International Business Machines Corporation Surface midification of a polyimide
US5187241A (en) * 1990-05-15 1993-02-16 International Business Machines Corporation Isoimide modifications of a polyimide and reaction thereof with nucleophiles
US5441770A (en) * 1990-05-18 1995-08-15 Shipley Company Inc. Conditioning process for electroless plating of polyetherimides
US5156732A (en) * 1990-07-11 1992-10-20 Sumitomo Metal Mining Co. Ltd. Polyimide substrate and method of manufacturing a printed wiring board using the substrate
US5151304A (en) * 1991-01-22 1992-09-29 International Business Machines Corporation Structure and method for enhancing adhesion to a polyimide surface
US5147518A (en) * 1991-03-07 1992-09-15 E. I. Du Pont De Nemours And Company Process for adhering metal to polyimide film
US5156710A (en) * 1991-05-06 1992-10-20 International Business Machines Corporation Method of laminating polyimide to thin sheet metal
US5380560A (en) * 1992-07-28 1995-01-10 International Business Machines Corporation Palladium sulfate solution for the selective seeding of the metal interconnections on polyimide dielectrics for electroless metal deposition
ES2155075T3 (es) * 1993-03-18 2001-05-01 Atotech Usa Inc Metodo de revestimiento por inmersion, auto-acelerante y auto-renovador, sin formaldehido.
US5418073A (en) * 1993-10-25 1995-05-23 Pre Finish Metals Incorporated Method of forming noise-damping composite with externally galvanized surfaces and composite formed thereby
US5658414A (en) 1995-03-03 1997-08-19 Kraft Foods, Inc. Organometallic solvent seaming of cellulosic materials
US5690777A (en) * 1995-03-03 1997-11-25 Kraft Foods, Inc. Seamed cellulosic materials using organometallic solvents
DE19615242A1 (de) * 1996-04-18 1997-10-23 Daimler Benz Ag Verfahren zur Herstellung von Schichtsystemen auf Kunststoffoberflächen
US6468672B1 (en) 2000-06-29 2002-10-22 Lacks Enterprises, Inc. Decorative chrome electroplate on plastics
US20050238812A1 (en) * 2002-06-04 2005-10-27 Bhangale Sunil M Method for electroless metalisation of polymer substrate
SG107593A1 (en) * 2002-06-04 2004-12-29 Agency Science Tech & Res Method for electroless metalisation of polymer substrate
JP2007271026A (ja) * 2006-03-31 2007-10-18 Denso Corp 流体制御弁
JP2008255460A (ja) * 2007-04-09 2008-10-23 Rohm & Haas Electronic Materials Llc ポリイミド樹脂の無電解めっき処理方法
KR102055812B1 (ko) * 2009-06-08 2019-12-13 바스프 에스이 금속 피복을 위한 플라스틱 표면의 전처리를 위한 이온성 액체의 용도
EP2845923B1 (en) * 2013-09-04 2018-11-28 Rohm and Haas Electronic Materials LLC Electroless metallization of dielectrics with stable alkaline catalysts containing pyrazine derivatives
EP2845922A1 (en) * 2013-09-04 2015-03-11 Rohm and Haas Electronic Materials LLC Electroless metallization of dielectrics with alkaline stable pyrimidine derivative containing catalysts
US9918389B2 (en) 2013-09-04 2018-03-13 Rohm And Haas Electronic Materials Llc Electroless metallization of dielectrics with alkaline stable pyrazine derivative containing catalysts
TWI615073B (zh) * 2015-04-09 2018-02-11 柏彌蘭金屬化研究股份有限公司 製成可撓式金屬積層材之方法
CN114300351B (zh) * 2021-12-28 2024-11-01 青岛天银纺织科技有限公司 晶体芯片混合金属化方法及晶体芯片和电子器件

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3573973A (en) * 1967-11-13 1971-04-06 Ibm High speed additive circuit process
BE747271A (fr) * 1969-03-13 1970-08-17 Ampex Traitement de surface pour rendre hydrophiles des matetiaux polymeres, notamment en vue de leur placage par les
CA954391A (en) * 1971-06-14 1974-09-10 Western Electric Company, Incorporated Method of improving adhesive properties of a polymeric material to a species deposited thereon
US3736170A (en) * 1971-06-28 1973-05-29 Ibm Process for improved adhesion of electroless copper to a polyimide surface
US3770528A (en) * 1971-09-29 1973-11-06 Martin Processing Co Inc Method for the surface treatment of polyimide materials
US3821016A (en) * 1972-05-19 1974-06-28 Western Electric Co Method of forming an adherent metallic pattern on a polyimide surface
US3791848A (en) * 1972-05-19 1974-02-12 Western Electric Co A method of improving the adherence of a metal deposit to a polyimide surface
JPS4983765A (enExample) * 1972-12-16 1974-08-12
CA1053994A (en) * 1974-07-03 1979-05-08 Amp Incorporated Sensitization of polyimide polymer for electroless metal deposition
US3928670A (en) * 1974-09-23 1975-12-23 Amp Inc Selective plating on non-metallic surfaces
US4070851A (en) * 1976-06-23 1978-01-31 Package Machinery Company Gum stick wrapping machine

Also Published As

Publication number Publication date
IT8224646A1 (it) 1984-06-09
US4517254A (en) 1985-05-14
IT1155419B (it) 1987-01-28
FR2518102B1 (fr) 1986-09-19
FR2518102A1 (fr) 1983-06-17
IT8224646A0 (it) 1982-12-09
DE3149919A1 (de) 1983-06-23
GB2123854B (en) 1986-04-16
IE53985B1 (en) 1989-05-10
IE822933L (en) 1983-06-11
JPS58108228A (ja) 1983-06-28
GB2123854A (en) 1984-02-08

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ATOTECH DEUTSCHLAND GMBH, 10553 BERLIN, DE