DE3112564A1 - Gekapselte halbleiteranordnung - Google Patents

Gekapselte halbleiteranordnung

Info

Publication number
DE3112564A1
DE3112564A1 DE19813112564 DE3112564A DE3112564A1 DE 3112564 A1 DE3112564 A1 DE 3112564A1 DE 19813112564 DE19813112564 DE 19813112564 DE 3112564 A DE3112564 A DE 3112564A DE 3112564 A1 DE3112564 A1 DE 3112564A1
Authority
DE
Germany
Prior art keywords
encapsulation
arrangement according
coating
glass
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19813112564
Other languages
German (de)
English (en)
Inventor
Kazumichi Kodaira Mitsusada
Katsumi Nishitama Tokyo Ogiue
Kanji Higashiyamato Otsuka
Kunizou Kodaira Sahara
Masao Kunitachi Sekibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VLSI Technology Research Association
Original Assignee
VLSI Technology Research Association
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VLSI Technology Research Association filed Critical VLSI Technology Research Association
Publication of DE3112564A1 publication Critical patent/DE3112564A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/40—Fillings or auxiliary members in containers, e.g. centering rings
    • H10W76/42—Fillings
    • H10W76/48—Fillings including materials for absorbing or reacting with moisture or other undesired substances
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00—Arrangements for protection of devices
    • H10W42/20—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
    • H10W42/25—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons against alpha rays, e.g. for outer space applications
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/137—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being directly on the semiconductor body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/10—Containers or parts thereof
    • H10W76/12—Containers or parts thereof characterised by their shape
    • H10W76/15—Containers comprising an insulating or insulated base
    • H10W76/157—Containers comprising an insulating or insulated base having interconnections parallel to the insulating or insulated base
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/68—Shapes or dispositions thereof
    • H10W70/682—Shapes or dispositions thereof comprising holes having chips therein
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/015—Manufacture or treatment of bond wires
    • H10W72/01515—Forming coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522—Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
DE19813112564 1980-03-31 1981-03-30 Gekapselte halbleiteranordnung Withdrawn DE3112564A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4050580A JPS56137658A (en) 1980-03-31 1980-03-31 Semiconductor device

Publications (1)

Publication Number Publication Date
DE3112564A1 true DE3112564A1 (de) 1982-06-03

Family

ID=12582402

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19813112564 Withdrawn DE3112564A1 (de) 1980-03-31 1981-03-30 Gekapselte halbleiteranordnung

Country Status (3)

Country Link
US (1) US4630095A (enExample)
JP (1) JPS56137658A (enExample)
DE (1) DE3112564A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2538618A1 (fr) * 1982-12-28 1984-06-29 Inf Milit Spatiale Aeronaut Boitier pour composant electronique comportant un element fixant l'humidite
EP0163082A1 (en) * 1984-05-02 1985-12-04 GTE Products Corporation Packaged integrated circuit chip
EP0163081A1 (en) * 1984-05-02 1985-12-04 GTE Products Corporation Method of making encapsulated IC chip

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0237752Y2 (enExample) * 1985-05-21 1990-10-12
JPH0783075B2 (ja) * 1986-03-14 1995-09-06 三菱電機株式会社 半導体装置の製造方法
US4769345A (en) * 1987-03-12 1988-09-06 Olin Corporation Process for producing a hermetically sealed package for an electrical component containing a low amount of oxygen and water vapor
US4958216A (en) * 1987-03-23 1990-09-18 Kyocera Corporation Package for housing semiconductor elements
US4961106A (en) * 1987-03-27 1990-10-02 Olin Corporation Metal packages having improved thermal dissipation
US5365113A (en) * 1987-06-30 1994-11-15 Hitachi, Ltd. Semiconductor device
US5184208A (en) * 1987-06-30 1993-02-02 Hitachi, Ltd. Semiconductor device
JPH0727921B2 (ja) * 1987-07-31 1995-03-29 日本電気株式会社 半導体装置の製造方法
US4953002A (en) * 1988-03-31 1990-08-28 Honeywell Inc. Semiconductor device housing with magnetic field protection
US5041396A (en) * 1989-07-18 1991-08-20 Vlsi Technology, Inc. Reusable package for holding a semiconductor chip and method for reusing the package
US5196919A (en) * 1990-12-07 1993-03-23 Kyocera America, Inc. Use of a contamination shield during the manufacture of semiconductor packages
US5360572A (en) * 1991-11-29 1994-11-01 The United States Of America As Represented By The Secretary Of The Air Force Aerogel mesh getter
US5308533A (en) * 1991-11-29 1994-05-03 The United States Of America As Represented By The Secretary Of The Air Force Aerogel mesh getter
US5244707A (en) * 1992-01-10 1993-09-14 Shores A Andrew Enclosure for electronic devices
US5734226A (en) * 1992-08-12 1998-03-31 Micron Technology, Inc. Wire-bonded getters useful in evacuated displays
JP2522186B2 (ja) * 1993-10-15 1996-08-07 日本電気株式会社 半導体パッケ―ジ
US5883429A (en) * 1995-04-25 1999-03-16 Siemens Aktiengesellschaft Chip cover
US5939785A (en) * 1996-04-12 1999-08-17 Texas Instruments Incorporated Micromechanical device including time-release passivant
US5929515A (en) * 1997-10-01 1999-07-27 The Charles Stark Draper Laboratory, Inc. Gettering enclosure for a semiconductor device
AU2003200747B2 (en) * 1998-01-05 2006-11-23 Combimatrix Corporation Gettering device for ion capture
US6093302A (en) * 1998-01-05 2000-07-25 Combimatrix Corporation Electrochemical solid phase synthesis
CA2251251A1 (en) * 1998-10-21 2000-04-21 Hualon Microelectronics Corporation A construction method of hybrid integrated circuit with charge coupled device for image sensing (ccdis)
US7091605B2 (en) * 2001-09-21 2006-08-15 Eastman Kodak Company Highly moisture-sensitive electronic device element and method for fabrication
US6543617B2 (en) * 2001-03-09 2003-04-08 International Business Machines Corporation Packaged radiation sensitive coated workpiece process for making and method of storing same
TW533188B (en) * 2001-07-20 2003-05-21 Getters Spa Support for microelectronic, microoptoelectronic or micromechanical devices
TW583049B (en) * 2001-07-20 2004-04-11 Getters Spa Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
US6929974B2 (en) * 2002-10-18 2005-08-16 Motorola, Inc. Feedthrough design and method for a hermetically sealed microdevice
JP2005129735A (ja) * 2003-10-23 2005-05-19 Fujitsu Media Device Kk 電子部品
US7871660B2 (en) * 2003-11-14 2011-01-18 Saes Getters, S.P.A. Preparation of getter surfaces using caustic chemicals
US7042076B2 (en) * 2004-03-09 2006-05-09 Northrop Grumman Corporation Vacuum sealed microdevice packaging with getters
JP4885426B2 (ja) * 2004-03-12 2012-02-29 ルネサスエレクトロニクス株式会社 半導体記憶装置、半導体装置及びその製造方法
US7211881B2 (en) * 2004-03-24 2007-05-01 Hewlett-Packard Development Company, L.P. Structure for containing desiccant
WO2006067730A2 (en) * 2004-12-22 2006-06-29 Koninklijke Philips Electronics N.V. Device and method for holding a substrate
JP4453546B2 (ja) * 2004-12-22 2010-04-21 日産自動車株式会社 パッケージ素子
FR2956521B1 (fr) * 2010-02-16 2012-08-17 Thales Sa Dispositif comprenant des composants electriques, electroniques, electromecaniques ou electro-optiques, a sensibilite reduite a faible debit de dose
ITMI20111987A1 (it) 2011-11-03 2013-05-04 Getters Spa Getters compositi perfezionati
EP2736071B8 (en) 2012-11-22 2017-04-19 Tronic's Microsystems S.A. Wafer level package with getter
US20240006267A1 (en) * 2022-06-29 2024-01-04 Texas Instruments Incorporated Hermetic Package Cooling Using Silver Tubes with Getter Absorption Material

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2686279A (en) * 1949-09-28 1954-08-10 Rca Corp Semiconductor device
JPS5258469A (en) * 1975-11-10 1977-05-13 Hitachi Ltd Resin-molded type semiconductor device
US4427992A (en) * 1975-12-17 1984-01-24 Motorola, Inc. Method for incorporating a desiccant in a semiconductor package
JPS55130149A (en) * 1979-03-30 1980-10-08 Hitachi Ltd Semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2538618A1 (fr) * 1982-12-28 1984-06-29 Inf Milit Spatiale Aeronaut Boitier pour composant electronique comportant un element fixant l'humidite
EP0113282A1 (fr) * 1982-12-28 1984-07-11 Thomson-Csf Boîtier pour composant électronique comportant un élément fixant l'humidité
US4553020A (en) * 1982-12-28 1985-11-12 Compagnie D'informatique Militaire, Spatiale Et Aeronautique Electronic component package comprising a moisture-retention element
EP0163082A1 (en) * 1984-05-02 1985-12-04 GTE Products Corporation Packaged integrated circuit chip
EP0163081A1 (en) * 1984-05-02 1985-12-04 GTE Products Corporation Method of making encapsulated IC chip

Also Published As

Publication number Publication date
US4630095A (en) 1986-12-16
JPS56137658A (en) 1981-10-27
JPS6255301B2 (enExample) 1987-11-19

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination