DE29813290U1 - Vakuumplattenventil und Vakuumkammeranordnung mit einem solchen - Google Patents

Vakuumplattenventil und Vakuumkammeranordnung mit einem solchen

Info

Publication number
DE29813290U1
DE29813290U1 DE29813290U DE29813290U DE29813290U1 DE 29813290 U1 DE29813290 U1 DE 29813290U1 DE 29813290 U DE29813290 U DE 29813290U DE 29813290 U DE29813290 U DE 29813290U DE 29813290 U1 DE29813290 U1 DE 29813290U1
Authority
DE
Germany
Prior art keywords
vacuum
plate valve
chamber arrangement
vacuum chamber
vacuum plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29813290U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evatec Europe GmbH
Original Assignee
Balzers Prozess Systeme Vertriebs- und Service 81245 Muenchen De GmbH
Balzers Prozess Systeme Vertriebs und Service GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Prozess Systeme Vertriebs- und Service 81245 Muenchen De GmbH, Balzers Prozess Systeme Vertriebs und Service GmbH filed Critical Balzers Prozess Systeme Vertriebs- und Service 81245 Muenchen De GmbH
Publication of DE29813290U1 publication Critical patent/DE29813290U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
DE29813290U 1998-02-04 1998-07-27 Vakuumplattenventil und Vakuumkammeranordnung mit einem solchen Expired - Lifetime DE29813290U1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH00273/98A CH692821A5 (de) 1998-02-04 1998-02-04 Vakuumventilplatte und Vakuumkammeranordnung mit einer solchen.

Publications (1)

Publication Number Publication Date
DE29813290U1 true DE29813290U1 (de) 1998-10-29

Family

ID=4183253

Family Applications (2)

Application Number Title Priority Date Filing Date
DE29813290U Expired - Lifetime DE29813290U1 (de) 1998-02-04 1998-07-27 Vakuumplattenventil und Vakuumkammeranordnung mit einem solchen
DE29901625U Expired - Lifetime DE29901625U1 (de) 1998-02-04 1999-02-01 Vakuumanordnung mit einem Vakuumplattenventil

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE29901625U Expired - Lifetime DE29901625U1 (de) 1998-02-04 1999-02-01 Vakuumanordnung mit einem Vakuumplattenventil

Country Status (5)

Country Link
US (1) US6427973B1 (de)
JP (1) JP4452893B2 (de)
CH (1) CH692821A5 (de)
DE (2) DE29813290U1 (de)
WO (1) WO1999040347A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105276215A (zh) * 2015-11-02 2016-01-27 苏州市淞舜五金有限公司 一种平稳密封闸阀

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JP3425937B2 (ja) * 2000-12-04 2003-07-14 入江工研株式会社 ゲート弁
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
US6899316B2 (en) * 2003-04-16 2005-05-31 Vat Holding Ag Closure device for vacuum closure of at least one opening in a wall
US7086638B2 (en) 2003-05-13 2006-08-08 Applied Materials, Inc. Methods and apparatus for sealing an opening of a processing chamber
US6916009B2 (en) * 2003-07-14 2005-07-12 Vat Holding Ag Load-lock device for introducing substrates into a vacuum chamber
JP4458342B2 (ja) * 2004-05-17 2010-04-28 イーグル工業株式会社 ゲートバルブ
US20060124886A1 (en) * 2004-07-08 2006-06-15 Brenes Arthur J Gate valve
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
DE102007059039A1 (de) * 2007-12-06 2009-06-18 Vat Holding Ag Vakuumventil
TWI447319B (zh) * 2007-12-20 2014-08-01 Tel Solar Ag 真空室之閘閥及真空室
DE102008051349B3 (de) * 2008-10-15 2009-11-12 Vat Holding Ag Vakuumventil
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve
JP2013011289A (ja) * 2011-06-28 2013-01-17 Tokyo Electron Ltd ゲートバルブ及びそれを用いた基板処理システム
CN104455518A (zh) * 2014-11-28 2015-03-25 苏州市吴中区大陆电子设备厂 一种闸阀密封结构
KR20170137926A (ko) * 2015-04-23 2017-12-13 제너럴 플라즈마, 인크. 챔버 밸브
CN105257852A (zh) * 2015-11-02 2016-01-20 苏州市淞舜五金有限公司 一种密封闸阀
US10846964B2 (en) 2018-06-01 2020-11-24 Sentrilock, Llc Electronic lockbox with interface to other electronic locks
US11761236B2 (en) 2019-03-27 2023-09-19 Sentrilock, Llc Electronic lockbox
DE102019123563A1 (de) * 2019-09-03 2021-03-04 Vat Holding Ag Vakuumventil für das Be- und/oder Entladen einer Vakuumkammer
JP7089245B1 (ja) * 2020-12-22 2022-06-22 Smc株式会社 デュアルゲートバルブ

Family Cites Families (31)

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US2091671A (en) * 1936-05-25 1937-08-31 Julian A Campbell Valve
US2265176A (en) * 1938-04-22 1941-12-09 Universal Hydraulic Corp Pressure-sealed valve
US2582877A (en) * 1948-07-02 1952-01-15 Lev A Mekler Valve closure
US2825528A (en) * 1953-05-01 1958-03-04 Arthur R Truitt Gate valve with hydraulic expanding gate
US2819034A (en) * 1955-06-03 1958-01-07 Oscar C Holderer Gate valve
US3241807A (en) * 1963-01-11 1966-03-22 Oscar C Holderer Fluid pressure actuated flow control gate valve
US3343562A (en) * 1965-01-15 1967-09-26 Grove Valve & Regulator Co Pivoted valve construction
FR1538390A (fr) * 1967-06-27 1968-09-06 Alcatel Sa Vanne de grand diamètre pour ultravide
US3524467A (en) * 1967-10-13 1970-08-18 Exxon Research Engineering Co Fluid expanded disk valve
FR1566417A (de) * 1968-02-22 1969-05-09
GB1223347A (en) * 1968-12-30 1971-02-24 Exxon Research Engineering Co Gate valve assembly
FR2260694B1 (de) * 1974-02-08 1976-11-26 Motobecane Ateliers
NL7604483A (en) * 1976-04-27 1977-10-31 Ronald Roggeveen Hydraulic or pneumatic sliding stop valve - has two components held against seats by spring mechanisms with controlled force
DE2745139A1 (de) * 1977-10-07 1979-04-12 Leybold Heraeus Gmbh & Co Kg Hochvakuumdichter verschluss
US4157169A (en) * 1977-10-12 1979-06-05 Torr Vacuum Products Fluid operated gate valve for use with vacuum equipment
US4238111A (en) * 1978-08-04 1980-12-09 Torr Vacuum Products, Inc. Gate valve for use with vacuum equipment
DE3209217C2 (de) * 1982-03-13 1985-10-03 Siegfried Haag Schertler Schiebeventil
DE3606236A1 (de) * 1986-02-14 1987-08-27 Martin Westenberg Schieber
US4718637A (en) * 1986-07-02 1988-01-12 Mdc Vacuum Products Corporation High vacuum gate valve having improved metal vacuum joint
JPH02186172A (ja) * 1989-01-10 1990-07-20 Irie Koken Kk 無しゅう動ゲートバルブ用弁体
US5120019A (en) * 1989-08-03 1992-06-09 Brooks Automation, Inc. Valve
JPH03234979A (ja) * 1990-02-09 1991-10-18 Canon Inc 仕切り弁
FR2669393B1 (fr) * 1990-11-16 1993-01-08 Cit Alcatel Vanne d'isolement automatique fonctionnant a la depression et installation utilisant cette vanne.
DE4206739C2 (de) * 1992-03-04 1994-07-14 Wecker Sa Nouvelle Usine Schieber
WO1993023691A1 (en) * 1992-05-15 1993-11-25 Ebara Corporation Gate valve
US5228468A (en) * 1992-06-04 1993-07-20 Ingersoll-Rand Company Valve and valve seat for flat valve and method of making same
JP2655576B2 (ja) * 1992-09-30 1997-09-24 信越半導体株式会社 単結晶引上装置におけるアイソレーションバルブ
CH687986A5 (de) 1993-05-03 1997-04-15 Balzers Hochvakuum Plasmabehandlungsanlage und Verfahren zu deren Betrieb.
JP2613171B2 (ja) * 1993-07-22 1997-05-21 株式会社岸川特殊バルブ ゲートバルブ
US5975492A (en) * 1997-07-14 1999-11-02 Brenes; Arthur Bellows driver slot valve
DE19746241C2 (de) * 1997-10-20 2000-05-31 Vat Holding Ag Haag Einrichtung zum Verschließen einer Öffnung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105276215A (zh) * 2015-11-02 2016-01-27 苏州市淞舜五金有限公司 一种平稳密封闸阀

Also Published As

Publication number Publication date
CH692821A5 (de) 2002-11-15
JP4452893B2 (ja) 2010-04-21
JP2002502946A (ja) 2002-01-29
DE29901625U1 (de) 1999-05-12
US6427973B1 (en) 2002-08-06
WO1999040347A1 (de) 1999-08-12

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19981210

R081 Change of applicant/patentee

Owner name: UNAXIS DEUTSCHLAND VERTRIEBS GMBH, DE

Free format text: FORMER OWNER: BALZERS PROZESS SYSTEME VERTRIEBS- UND SERVICE GMBH, 81476 MUENCHEN, DE

Effective date: 20001219

R150 Utility model maintained after payment of first maintenance fee after three years

Effective date: 20011019

R081 Change of applicant/patentee

Owner name: UNAXIS DEUTSCHLAND VERTRIEBS GMBH, DE

Free format text: FORMER OWNER: UNAXIS DEUTSCHLAND VERTRIEBS GMBH, 81476 MUENCHEN, DE

Effective date: 20040506

R151 Utility model maintained after payment of second maintenance fee after six years

Effective date: 20041018

R152 Utility model maintained after payment of third maintenance fee after eight years

Effective date: 20060803

R071 Expiry of right