DE2941908C2 - Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle - Google Patents

Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle

Info

Publication number
DE2941908C2
DE2941908C2 DE2941908A DE2941908A DE2941908C2 DE 2941908 C2 DE2941908 C2 DE 2941908C2 DE 2941908 A DE2941908 A DE 2941908A DE 2941908 A DE2941908 A DE 2941908A DE 2941908 C2 DE2941908 C2 DE 2941908C2
Authority
DE
Germany
Prior art keywords
silicon
silicon layer
producing
solar cell
gas atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2941908A
Other languages
English (en)
Other versions
DE2941908A1 (de
Inventor
Reinhard Dr.rer.nat. 7101 Flein Dahlberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Licentia Patent Verwaltungs GmbH
Original Assignee
Licentia Patent Verwaltungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Licentia Patent Verwaltungs GmbH filed Critical Licentia Patent Verwaltungs GmbH
Priority to DE2941908A priority Critical patent/DE2941908C2/de
Priority to JP465680A priority patent/JPS5662378A/ja
Priority to IT8025051A priority patent/IT1132906B/it
Priority to GB8031963A priority patent/GB2061000A/en
Priority to SE8007191A priority patent/SE8007191L/xx
Priority to NL8005707A priority patent/NL8005707A/nl
Priority to AU63415/80A priority patent/AU6341580A/en
Priority to FR8022249A priority patent/FR2468210A1/fr
Publication of DE2941908A1 publication Critical patent/DE2941908A1/de
Priority to US06/315,641 priority patent/US4449286A/en
Application granted granted Critical
Publication of DE2941908C2 publication Critical patent/DE2941908C2/de
Expired legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03921—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
    • H01L31/0547—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means comprising light concentrating means of the reflecting type, e.g. parabolic mirrors, concentrators using total internal reflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/52—PV systems with concentrators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/546—Polycrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Coating By Spraying Or Casting (AREA)

Description

20
Die Erfindung betrifft ein Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle, bei dem das Silizium mit Hilfe von Lichtbogen-Spritzen oder Plasma-Spritzen in einer Gas-Atmosphäre auf einen Träger aufgebracht wird.
Ein derartiges Verfahren ist aus der US-B 5 61 404 bekannt. Nach der Herstellung der Silizium-Schicht mit Hilfe von Lichtbogen-Spritzen oder Plasma-Spritzen kann beim bekannten Verfahren eine Wärmebehandlung des aufgebrachten Materials erfolgen.
Gegenstand der der DE-OS 29 24 584 entsprechenden älteren deutschen Patentanmeldung ist ein Verfahren zur Herstellung von Silizium für Solarzellen, bei dem Siliziumdioxid oder Silizium mit höherem Verunrcinigungsgrad in einer reduzierenden Gasatmosphäre in ein Plasma eingebracht wird. Ais reduzierende Gasatmosphäre sollen Wasserstoff oder niedere gesättigte oder ungesättigte Kohlenwasserstoffe verwendet wer- |
den. 40 \
Aus »IBM Techn. Disci. Bull.«, Vol. 19. No. 10,
März 1977. Seiten 3955—6 ist es bekannt, Silizium- f
Schichten nach dem Aufbringen zur Verbesserung der Kristallinität aufzuschmelzen.
Der Erfindung liegt die Aufgabe zugrunde, bei einem Verfahren der eingangs genannten Art die Qualität der Silizium-Schicht zu verbessern. Diese Aufgabe wird nach der Erfindung dadurch gelöst, daß das Silizium in einer Gas-Atmosphäre aufgebracht wird, welche mit dem Silizium nur wenig, mit den Verunreinigungen im Silizium jedoch stark reagiert. ύ
Zu diesem Zweck enthält die Lichtbogen- oder Plasm&a'Tnosphäre beispielsweise Gase wie HCI. HF, CI2, h oder S2. Durch Pulverisieren und Behandeln mit HCI läßt sich Silizium-Pulver beispielsweise von Verunreinigungen wie metallischem Al, Mg oder Na befreien.
Gemäß einer Weiterbildung der Erfindung wird die $
Silizium-Schicht nach dem Aufbringen auf den Träger :'
mit Hilfe eines Lichtbogen-Strahls. Plasma-Strahls oder eines fokussierten Licht- oder LASER-Strahls kurzzeitig aufgeschmolzen.

Claims (2)

Patentansprüche:
1. Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle, bei dem das Silizium mit Hilfe von Lichtbogen-Spritzen oder Plasma-Spritzen in einer Gas-Atmosphäre auf einen Träger aufgebracht wird, dadurch gekennzeichnet, daß das Silizium in einer Gas-Atmosphäre aufgebracht wird, weiche mit dem Silizium nur wenig, mit den Verunreinigungen im Silizium jedoch stark reagiert.
2. Verfahren nach Anspruch 1, bei dem das Silizium nach dem Aufbringen einer Wärmebehandlung unterzogen wird, dadurch gekennzeichnet, daß die Silizium-Schicht bei der Wärmebehandlung aufgeschmolzen wird.
DE2941908A 1979-10-17 1979-10-17 Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle Expired DE2941908C2 (de)

Priority Applications (9)

Application Number Priority Date Filing Date Title
DE2941908A DE2941908C2 (de) 1979-10-17 1979-10-17 Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle
JP465680A JPS5662378A (en) 1979-10-17 1980-01-21 Semiconductor layer solar battery and method of manufacturing same
IT8025051A IT1132906B (it) 1979-10-17 1980-10-01 Cella solare a strato semiconduttore
GB8031963A GB2061000A (en) 1979-10-17 1980-10-03 A semiconductor layer solar cell
SE8007191A SE8007191L (sv) 1979-10-17 1980-10-14 Solcell med halvledarskikt
NL8005707A NL8005707A (nl) 1979-10-17 1980-10-16 Zonnecel met halfgeleiderlaag.
AU63415/80A AU6341580A (en) 1979-10-17 1980-10-16 Manufacture of semiconductor layer solar cell
FR8022249A FR2468210A1 (fr) 1979-10-17 1980-10-17 Photopile semiconductrice multicouche et procede pour sa production
US06/315,641 US4449286A (en) 1979-10-17 1981-10-27 Method for producing a semiconductor layer solar cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2941908A DE2941908C2 (de) 1979-10-17 1979-10-17 Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle

Publications (2)

Publication Number Publication Date
DE2941908A1 DE2941908A1 (de) 1981-04-30
DE2941908C2 true DE2941908C2 (de) 1986-07-03

Family

ID=6083632

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2941908A Expired DE2941908C2 (de) 1979-10-17 1979-10-17 Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle

Country Status (3)

Country Link
US (1) US4449286A (de)
JP (1) JPS5662378A (de)
DE (1) DE2941908C2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4309319A1 (de) * 1992-09-08 1994-03-10 Mitsubishi Electric Corp Dünnschichtsolarzelle und Herstellungsverfahren dazu, Verfahren zur Herstellung eines Halbleiterrohlings und Verfahren zur Herstellung eines Halbleitersubstrates

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DE2941908C2 (de) * 1979-10-17 1986-07-03 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Herstellen einer eine Silizium-Schicht aufweisenden Solarzelle
DE3446286A1 (de) * 1984-12-19 1986-06-19 Sigri GmbH, 8901 Meitingen Verfahren zum beschichten von kohlenstoff- und graphitkoerpern
US4848922A (en) * 1988-04-22 1989-07-18 The United States Of America As Represented By The United States Department Of Energy Photon Calorimeter
US5164040A (en) * 1989-08-21 1992-11-17 Martin Marietta Energy Systems, Inc. Method and apparatus for rapidly growing films on substrates using pulsed supersonic jets
US5075257A (en) * 1990-11-09 1991-12-24 The Board Of Trustees Of The University Of Arkansas Aerosol deposition and film formation of silicon
US5464667A (en) * 1994-08-16 1995-11-07 Minnesota Mining And Manufacturing Company Jet plasma process and apparatus
US6203898B1 (en) * 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
US6620645B2 (en) * 2000-11-16 2003-09-16 G.T. Equipment Technologies, Inc Making and connecting bus bars on solar cells
US6635307B2 (en) 2001-12-12 2003-10-21 Nanotek Instruments, Inc. Manufacturing method for thin-film solar cells
US7074693B2 (en) * 2003-06-24 2006-07-11 Integrated Materials, Inc. Plasma spraying for joining silicon parts
US20080023070A1 (en) * 2006-07-28 2008-01-31 Sanjai Sinha Methods and systems for manufacturing polycrystalline silicon and silicon-germanium solar cells
US20080220558A1 (en) * 2007-03-08 2008-09-11 Integrated Photovoltaics, Inc. Plasma spraying for semiconductor grade silicon
JP4181204B1 (ja) * 2007-05-11 2008-11-12 昭和シェル石油株式会社 太陽電池モジュール
JP2011525301A (ja) * 2008-06-11 2011-09-15 インテバック・インコーポレイテッド イオン注入装置及び半導体素子製造方法
US8545944B2 (en) * 2008-09-19 2013-10-01 Sri International Method for producing solar grade films from semiconductor powders
US20100104769A1 (en) * 2008-10-23 2010-04-29 Boisseau John E Automotive coating surface enhancement using a plasma treatment technique
US8253058B2 (en) * 2009-03-19 2012-08-28 Integrated Photovoltaics, Incorporated Hybrid nozzle for plasma spraying silicon
US20110162703A1 (en) * 2009-03-20 2011-07-07 Solar Implant Technologies, Inc. Advanced high efficientcy crystalline solar cell fabrication method
US8749053B2 (en) 2009-06-23 2014-06-10 Intevac, Inc. Plasma grid implant system for use in solar cell fabrications
FR2963337B1 (fr) * 2010-07-30 2013-03-01 Commissariat Energie Atomique Recyclage de boues de sciage de silicium pour la preparation de lingots ou de plaques par plasma thermique
US8816190B2 (en) * 2011-04-18 2014-08-26 First Solar, Inc. Photovoltaic devices and method of making
CN106847736B (zh) 2011-11-08 2020-08-11 因特瓦克公司 基板处理系统和方法
MY185561A (en) * 2011-11-18 2021-05-20 First Solar Inc Vapor transport deposition method and system for material co-deposition
WO2014100506A1 (en) 2012-12-19 2014-06-26 Intevac, Inc. Grid for plasma ion implant
CN105671474B (zh) 2016-03-18 2018-11-30 李光武 制造半导体基片的方法和装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4309319A1 (de) * 1992-09-08 1994-03-10 Mitsubishi Electric Corp Dünnschichtsolarzelle und Herstellungsverfahren dazu, Verfahren zur Herstellung eines Halbleiterrohlings und Verfahren zur Herstellung eines Halbleitersubstrates

Also Published As

Publication number Publication date
DE2941908A1 (de) 1981-04-30
US4449286A (en) 1984-05-22
JPS5662378A (en) 1981-05-28

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