DE2716202A1 - Ionenquelle - Google Patents
IonenquelleInfo
- Publication number
- DE2716202A1 DE2716202A1 DE19772716202 DE2716202A DE2716202A1 DE 2716202 A1 DE2716202 A1 DE 2716202A1 DE 19772716202 DE19772716202 DE 19772716202 DE 2716202 A DE2716202 A DE 2716202A DE 2716202 A1 DE2716202 A1 DE 2716202A1
- Authority
- DE
- Germany
- Prior art keywords
- electrode
- ion source
- source according
- ions
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 150000002500 ions Chemical class 0.000 claims description 37
- 239000000463 material Substances 0.000 claims description 23
- 239000011344 liquid material Substances 0.000 claims description 19
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 9
- 229910052721 tungsten Inorganic materials 0.000 claims description 8
- 239000010937 tungsten Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 229910001338 liquidmetal Inorganic materials 0.000 claims 1
- 229910052783 alkali metal Inorganic materials 0.000 description 6
- 150000001340 alkali metals Chemical class 0.000 description 6
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 5
- 229910052744 lithium Inorganic materials 0.000 description 5
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910001413 alkali metal ion Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 210000001331 nose Anatomy 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000012768 molten material Substances 0.000 description 1
- 229910001453 nickel ion Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- -1 silicon ions Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB15111/76A GB1574611A (en) | 1976-04-13 | 1976-04-13 | Ion sources |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2716202A1 true DE2716202A1 (de) | 1977-11-03 |
Family
ID=10053248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19772716202 Ceased DE2716202A1 (de) | 1976-04-13 | 1977-04-12 | Ionenquelle |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4088919A (enExample) |
| JP (1) | JPS5916385B2 (enExample) |
| DE (1) | DE2716202A1 (enExample) |
| FR (1) | FR2348562A1 (enExample) |
| GB (1) | GB1574611A (enExample) |
| NL (1) | NL183554C (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2805273A1 (de) * | 1978-02-08 | 1979-08-09 | Max Planck Gesellschaft | Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen |
| DE3817604A1 (de) * | 1987-05-27 | 1988-12-08 | Mitsubishi Electric Corp | Ionenstrahlgenerator |
| DE3845007C2 (de) * | 1987-05-27 | 2000-09-28 | Mitsubishi Electric Corp | System zur Herstellung von Dünnschichten mittels eines Ionenstrahlgenerators |
| AT506340B1 (de) * | 2008-01-25 | 2012-04-15 | Fotec Forschungs & Technologi | Verfahren zur herstellung einer ionenquelle |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4328667A (en) * | 1979-03-30 | 1982-05-11 | The European Space Research Organisation | Field-emission ion source and ion thruster apparatus comprising such sources |
| JPS5633468A (en) * | 1979-08-23 | 1981-04-03 | Atomic Energy Authority Uk | Spray generating source of fine droplet and ion of liquid material |
| JPS56112058A (en) * | 1980-02-08 | 1981-09-04 | Hitachi Ltd | High brightness ion source |
| US4318029A (en) * | 1980-05-12 | 1982-03-02 | Hughes Aircraft Company | Liquid metal ion source |
| US4318030A (en) * | 1980-05-12 | 1982-03-02 | Hughes Aircraft Company | Liquid metal ion source |
| FR2510305A1 (fr) * | 1981-07-24 | 1983-01-28 | Europ Agence Spatiale | Reservoir pour source ionique a emission de champ, notamment pour propulseur ionique a applications spatiales, et procede de fabrication d'un tel reservoir |
| JPS5830055A (ja) * | 1981-08-18 | 1983-02-22 | New Japan Radio Co Ltd | イオンビ−ム源 |
| JPS5838906B2 (ja) * | 1981-09-03 | 1983-08-26 | 日本電子株式会社 | 金属イオン源 |
| JPS5878557U (ja) * | 1981-11-24 | 1983-05-27 | 株式会社日立製作所 | 電界放出型イオン源 |
| JPS58137941A (ja) * | 1982-02-10 | 1983-08-16 | Jeol Ltd | イオン源 |
| US4577135A (en) * | 1982-02-22 | 1986-03-18 | United Kingdom Atomic Energy Authority | Liquid metal ion sources |
| JPS58163135A (ja) * | 1982-03-20 | 1983-09-27 | Nippon Denshi Zairyo Kk | イオン源 |
| JPS58178944A (ja) * | 1982-04-14 | 1983-10-20 | Hitachi Ltd | イオン源 |
| US4629931A (en) * | 1984-11-20 | 1986-12-16 | Hughes Aircraft Company | Liquid metal ion source |
| JPS60138831A (ja) * | 1984-11-30 | 1985-07-23 | Hitachi Ltd | 荷電粒子源 |
| US4638210A (en) * | 1985-04-05 | 1987-01-20 | Hughes Aircraft Company | Liquid metal ion source |
| DE3677062D1 (de) * | 1985-06-04 | 1991-02-28 | Denki Kagaku Kogyo Kk | Quelle geladener teilchen. |
| JPS61211937A (ja) * | 1985-11-15 | 1986-09-20 | Hitachi Ltd | 電界放出型イオン源 |
| US4731562A (en) * | 1986-05-27 | 1988-03-15 | The United States Of America As Represented By The Department Of Energy | Electrohydrodynamically driven large-area liquid ion sources |
| JPS6417190U (enExample) * | 1987-07-22 | 1989-01-27 | ||
| US5123039A (en) * | 1988-01-06 | 1992-06-16 | Jupiter Toy Company | Energy conversion using high charge density |
| CA1330827C (en) * | 1988-01-06 | 1994-07-19 | Jupiter Toy Company | Production and manipulation of high charge density |
| US5153901A (en) * | 1988-01-06 | 1992-10-06 | Jupiter Toy Company | Production and manipulation of charged particles |
| DE3817897A1 (de) * | 1988-01-06 | 1989-07-20 | Jupiter Toy Co | Die erzeugung und handhabung von ladungsgebilden hoher ladungsdichte |
| US5054046A (en) * | 1988-01-06 | 1991-10-01 | Jupiter Toy Company | Method of and apparatus for production and manipulation of high density charge |
| US5018180A (en) * | 1988-05-03 | 1991-05-21 | Jupiter Toy Company | Energy conversion using high charge density |
| US5584740A (en) * | 1993-03-31 | 1996-12-17 | The United States Of America As Represented By The Secretary Of The Navy | Thin-film edge field emitter device and method of manufacture therefor |
| US5727978A (en) * | 1995-12-19 | 1998-03-17 | Advanced Micro Devices, Inc. | Method of forming electron beam emitting tungsten filament |
| EP1622184B1 (en) * | 2004-07-28 | 2011-05-18 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Emitter for an ion source and method of producing same |
| DE102007027097B4 (de) * | 2007-06-12 | 2010-12-30 | Forschungszentrum Dresden - Rossendorf E.V. | Flüssigmetall-Ionenquelle zur Erzeugung von Lithium-Ionenstrahlen |
| US8453426B2 (en) * | 2009-04-06 | 2013-06-04 | Raytheon Company | Current controlled field emission thruster |
| CN113678224B (zh) * | 2019-07-23 | 2025-01-28 | 株式会社Param | 电子枪装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3852595A (en) * | 1972-09-21 | 1974-12-03 | Stanford Research Inst | Multipoint field ionization source |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3122882A (en) * | 1960-11-23 | 1964-03-03 | Aerojet General Co | Propulsion means |
| US3475636A (en) * | 1967-11-14 | 1969-10-28 | Hughes Aircraft Co | Liquid-metal arc cathode with maximized electron/atom emission ratio |
| GB1442998A (en) * | 1973-01-24 | 1976-07-21 | Atomic Energy Authority Uk | Field emission ion sources |
| DE2333866A1 (de) * | 1973-07-03 | 1975-01-23 | Max Planck Gesellschaft | Felddesorptions-ionenquelle und verfahren zu ihrer herstellung |
-
1976
- 1976-04-13 GB GB15111/76A patent/GB1574611A/en not_active Expired
-
1977
- 1977-04-11 JP JP52041281A patent/JPS5916385B2/ja not_active Expired
- 1977-04-12 DE DE19772716202 patent/DE2716202A1/de not_active Ceased
- 1977-04-12 FR FR7710953A patent/FR2348562A1/fr active Granted
- 1977-04-12 NL NLAANVRAGE7703981,A patent/NL183554C/xx not_active IP Right Cessation
- 1977-04-12 US US05/786,872 patent/US4088919A/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3852595A (en) * | 1972-09-21 | 1974-12-03 | Stanford Research Inst | Multipoint field ionization source |
Non-Patent Citations (1)
| Title |
|---|
| US-Z.: J.Vac.Sci.Technol., Vol. 12, No. 6, Nov./Dez. 1975, S. 1208 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2805273A1 (de) * | 1978-02-08 | 1979-08-09 | Max Planck Gesellschaft | Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen |
| DE3817604A1 (de) * | 1987-05-27 | 1988-12-08 | Mitsubishi Electric Corp | Ionenstrahlgenerator |
| DE3817604C2 (de) * | 1987-05-27 | 2000-05-18 | Mitsubishi Electric Corp | Ionenstrahlgenerator |
| DE3845007C2 (de) * | 1987-05-27 | 2000-09-28 | Mitsubishi Electric Corp | System zur Herstellung von Dünnschichten mittels eines Ionenstrahlgenerators |
| AT506340B1 (de) * | 2008-01-25 | 2012-04-15 | Fotec Forschungs & Technologi | Verfahren zur herstellung einer ionenquelle |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2348562B1 (enExample) | 1982-07-23 |
| JPS5916385B2 (ja) | 1984-04-14 |
| GB1574611A (en) | 1980-09-10 |
| FR2348562A1 (fr) | 1977-11-10 |
| JPS52125998A (en) | 1977-10-22 |
| US4088919A (en) | 1978-05-09 |
| NL183554B (nl) | 1988-06-16 |
| NL183554C (nl) | 1988-11-16 |
| NL7703981A (nl) | 1977-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2716202A1 (de) | Ionenquelle | |
| DE68926742T2 (de) | Vorrichtung und verfahren zur beschichtung von materialien durch einen pulsierenden plasmastrahl | |
| DE2602649C2 (enExample) | ||
| DE3106368C2 (de) | Gleichstrom-Gasentladungsanzeigevorrichtung | |
| DE1044295B (de) | Ionenquelle | |
| DE2951287A1 (de) | Verfahren zur herstellung von ebenen oberflaechen mit feinsten spitzen im mikrometer-bereich | |
| DE69606256T2 (de) | Verfahren und gerät zum auftragen von kathodenmaterial auf eine drahtkathode | |
| DE1764860B1 (de) | Elektronenstrahlerzeuger und verfahren zu seiner herstellung | |
| DE1521363B2 (de) | Vorrichtung zur Überwachung der Aufdampfung in einer Vakuumanlage | |
| DE3408848C2 (de) | Verfahren zur Herstellung von Vielkanalplatten | |
| DE1225310B (de) | Betriebsverfahren fuer eine Vorrichtung zum Bestrahlen mit Elektronen und Bestrahlungsvorrichtung | |
| DE809223C (de) | Elektrische Entladungsroehre mit kuenstlich gekuehlter Anode | |
| DE1269253B (de) | Durchsichtsphotokathode | |
| DE2516464B2 (de) | Kathodenstrahlröhre | |
| DE2919869C2 (de) | Vorrichtung zum Überziehen von gepulvertem Material mit einer Metallschicht | |
| DE1186953B (de) | Vorratskathode | |
| DE3643208C2 (enExample) | ||
| DE2333866A1 (de) | Felddesorptions-ionenquelle und verfahren zu ihrer herstellung | |
| DE2554030C2 (de) | Sekundärelektronen emittierende Elektrode und Verfahren zu ihrer Herstellung | |
| DE2559065A1 (de) | Verdampfungs-vorrichtung | |
| DE748185C (de) | Verfahren zur Erzeugung kurzzeitiger Roentgenblitze | |
| DE1953687A1 (de) | Verfahren zum Regeln der Fokussierung beim Elektronenstrahlschweissen | |
| DE1214796B (de) | Kathodenstrahlerzeugungssystem und Verfahren zum Zusammenbau des Strahlerzeugungssystems | |
| DE891892C (de) | Elektrisches Entladungsgefaess, insbesondere zur Verstaerkung, Gleich-richtung oder Schwingungserzeugung von hohen Frequenzen | |
| DE620158C (de) | Entladungsroehre mit Gasfuellung und kalten Elektroden |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8128 | New person/name/address of the agent |
Representative=s name: SCHWABE, H., DIPL.-ING. SANDMAIR, K., DIPL.-CHEM. |
|
| 8131 | Rejection |