DE3408848C2 - - Google Patents

Info

Publication number
DE3408848C2
DE3408848C2 DE3408848A DE3408848A DE3408848C2 DE 3408848 C2 DE3408848 C2 DE 3408848C2 DE 3408848 A DE3408848 A DE 3408848A DE 3408848 A DE3408848 A DE 3408848A DE 3408848 C2 DE3408848 C2 DE 3408848C2
Authority
DE
Germany
Prior art keywords
plate
mold
portions
metal
easily removable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3408848A
Other languages
English (en)
Other versions
DE3408848A1 (de
Inventor
Erwin Prof. Dr. Becker
Wolfgang Dr. 7500 Karlsruhe De Ehrfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to DE19843408848 priority Critical patent/DE3408848A1/de
Priority to EP85101038A priority patent/EP0154797B1/de
Priority to AT85101038T priority patent/ATE37757T1/de
Priority to US06/708,841 priority patent/US4563250A/en
Priority to BR8501058A priority patent/BR8501058A/pt
Priority to JP60046718A priority patent/JPS60208041A/ja
Publication of DE3408848A1 publication Critical patent/DE3408848A1/de
Application granted granted Critical
Publication of DE3408848C2 publication Critical patent/DE3408848C2/de
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04Electron multipliers
    • H01J43/06Electrode arrangements
    • H01J43/18Electrode arrangements using essentially more than one dynode
    • H01J43/24Dynodes having potential gradient along their surfaces
    • H01J43/246Microchannel plates [MCP]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/12Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H01J9/125Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/32Secondary emission electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Tubes For Measurement (AREA)
  • Paper (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
DE19843408848 1984-03-10 1984-03-10 Verfahren zur herstellung von vielkanalplatten Granted DE3408848A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19843408848 DE3408848A1 (de) 1984-03-10 1984-03-10 Verfahren zur herstellung von vielkanalplatten
EP85101038A EP0154797B1 (de) 1984-03-10 1985-02-01 Verfahren zur Herstellung von Vielkanalplatten und deren Verwendung
AT85101038T ATE37757T1 (de) 1984-03-10 1985-02-01 Verfahren zur herstellung von vielkanalplatten und deren verwendung.
US06/708,841 US4563250A (en) 1984-03-10 1985-03-06 Method for producing multichannel plates
BR8501058A BR8501058A (pt) 1984-03-10 1985-03-08 Processo para produzir uma placa de canais multiplos e estrutura
JP60046718A JPS60208041A (ja) 1984-03-10 1985-03-11 マルチチヤンネル板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843408848 DE3408848A1 (de) 1984-03-10 1984-03-10 Verfahren zur herstellung von vielkanalplatten

Publications (2)

Publication Number Publication Date
DE3408848A1 DE3408848A1 (de) 1985-09-19
DE3408848C2 true DE3408848C2 (de) 1987-04-16

Family

ID=6230128

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843408848 Granted DE3408848A1 (de) 1984-03-10 1984-03-10 Verfahren zur herstellung von vielkanalplatten

Country Status (6)

Country Link
US (1) US4563250A (de)
EP (1) EP0154797B1 (de)
JP (1) JPS60208041A (de)
AT (1) ATE37757T1 (de)
BR (1) BR8501058A (de)
DE (1) DE3408848A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3841621A1 (de) * 1988-12-10 1990-07-12 Draegerwerk Ag Elektrochemische messzelle mit mikrostrukturierten kapillaroeffnungen in der messelektrode
DE10305427A1 (de) * 2003-02-03 2004-08-12 Siemens Ag Herstellungsverfahren für eine Lochscheibe sowie einteilige Lochscheibe zum Ausstoßen eines Fluids

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69030145T2 (de) * 1989-08-18 1997-07-10 Galileo Electro Optics Corp Kontinuierliche Dünnschicht-Dynoden
US5189777A (en) * 1990-12-07 1993-03-02 Wisconsin Alumni Research Foundation Method of producing micromachined differential pressure transducers
US5206983A (en) * 1991-06-24 1993-05-04 Wisconsin Alumni Research Foundation Method of manufacturing micromechanical devices
US5190637A (en) * 1992-04-24 1993-03-02 Wisconsin Alumni Research Foundation Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
US5378583A (en) * 1992-12-22 1995-01-03 Wisconsin Alumni Research Foundation Formation of microstructures using a preformed photoresist sheet
EP0872331A1 (de) * 1997-04-16 1998-10-21 Matsushita Electric Industrial Co., Ltd. Prägeplatten-Schutzschicht für eine Vorrichtung zum Spritzgiessen eines optischen Informationsträgers, Vorrichtung zum Spritzgiessen eines optischen Informationsträgers, Verfahren zum Spritzgiesen eines optischen Informationsträgers mit dem Prägeplatten-Schutzschicht
US6521149B1 (en) * 2000-06-06 2003-02-18 Gerald T. Mearini Solid chemical vapor deposition diamond microchannel plate
US7154086B2 (en) * 2003-03-19 2006-12-26 Burle Technologies, Inc. Conductive tube for use as a reflectron lens
US20080073516A1 (en) * 2006-03-10 2008-03-27 Laprade Bruce N Resistive glass structures used to shape electric fields in analytical instruments

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031423A (en) * 1969-04-30 1977-06-21 American Optical Corporation Channel structure for multi-channel electron multipliers and method of making same
GB1434053A (en) * 1973-04-06 1976-04-28 Mullard Ltd Electron multipliers
FR2434480A1 (fr) * 1978-08-21 1980-03-21 Labo Electronique Physique Dispositif multiplicateur d'electrons a galettes de microcanaux antiretour optique pour tube intensificateur d'images
DE2922642C2 (de) * 1979-06-02 1981-10-01 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen von Platten für den Aufbau von Trenndüsenelementen
DE3039110A1 (de) * 1980-10-16 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Verfahren fuer die spannungsfreie entwicklung von bestrahlten polymethylmetacrylatschichten
DE3150257A1 (de) * 1981-12-18 1983-06-30 Siemens AG, 1000 Berlin und 8000 München Bildverstaerker
DE3206820C2 (de) * 1982-02-26 1984-02-09 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen von Trenndüsenelementen
DE3221981C2 (de) * 1982-06-11 1985-08-29 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen von aus Trennkörpern mit Abschlußplatten bestehenden Trenndüsenelementen zur Trennung gas- oder dampfförmiger Gemische

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3841621A1 (de) * 1988-12-10 1990-07-12 Draegerwerk Ag Elektrochemische messzelle mit mikrostrukturierten kapillaroeffnungen in der messelektrode
DE10305427A1 (de) * 2003-02-03 2004-08-12 Siemens Ag Herstellungsverfahren für eine Lochscheibe sowie einteilige Lochscheibe zum Ausstoßen eines Fluids
DE10305427B4 (de) * 2003-02-03 2006-05-24 Siemens Ag Herstellungsverfahren für eine Lochscheibe zum Ausstoßen eines Fluids

Also Published As

Publication number Publication date
JPH0552618B2 (de) 1993-08-05
US4563250A (en) 1986-01-07
ATE37757T1 (de) 1988-10-15
EP0154797A2 (de) 1985-09-18
EP0154797B1 (de) 1988-10-05
JPS60208041A (ja) 1985-10-19
EP0154797A3 (en) 1986-12-30
DE3408848A1 (de) 1985-09-19
BR8501058A (pt) 1985-10-29

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8181 Inventor (new situation)

Free format text: BECKER, ERWIN, PROF. DR. EHRFELD, WOLFGANG, DR., 7500 KARLSRUHE, DE

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee