EP0154797A3 - Manufacturing process for multichannel plates, and their use - Google Patents

Manufacturing process for multichannel plates, and their use Download PDF

Info

Publication number
EP0154797A3
EP0154797A3 EP85101038A EP85101038A EP0154797A3 EP 0154797 A3 EP0154797 A3 EP 0154797A3 EP 85101038 A EP85101038 A EP 85101038A EP 85101038 A EP85101038 A EP 85101038A EP 0154797 A3 EP0154797 A3 EP 0154797A3
Authority
EP
European Patent Office
Prior art keywords
plate
mold
portions
metal
easily removable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85101038A
Other languages
German (de)
Other versions
EP0154797A2 (en
EP0154797B1 (en
Inventor
Erwin Prof. Dr. Becker
Wolfgang Dr. Ehrfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to AT85101038T priority Critical patent/ATE37757T1/en
Publication of EP0154797A2 publication Critical patent/EP0154797A2/en
Publication of EP0154797A3 publication Critical patent/EP0154797A3/en
Application granted granted Critical
Publication of EP0154797B1 publication Critical patent/EP0154797B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/18—Electrode arrangements using essentially more than one dynode
    • H01J43/24—Dynodes having potential gradient along their surfaces
    • H01J43/246—Microchannel plates [MCP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/32—Secondary emission electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Tubes For Measurement (AREA)
  • Paper (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)

Abstract

A method for producing a multichannel plate containing a plurality of generally parallel channels for use in structures for amplifying or converting optical images or other two-dimensional signal patterns by secondary electron multiplication, which method includes: producing a positive mold of the plate, by the steps of: (i) providing a body having the external shape of the plate to be produced and made of a material whose ability to be removed from the body is altered by exposure to a selected radiation; (ii) irradiating the body with the selected radiation in a pattern corresponding to the plate to be produced and in a manner to render the portions of the body corresponding to the channels more easily removable than the remaining portions of the body; and (iii) removing the more easily removable portions of the body; forming a metal negative mold, by the steps of: (i) attaching the positive mold to a metal electrode; (ii) electrolytically depositing metal on the electrode and in the openings created in the positive mold by said step of removing more easily removable portions; and (iii) removing the positive mold from the deposited metal; and forming the multichannel plate from the negative mold.
EP85101038A 1984-03-10 1985-02-01 Manufacturing process for multichannel plates, and their use Expired EP0154797B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85101038T ATE37757T1 (en) 1984-03-10 1985-02-01 PROCESS FOR MANUFACTURE OF MULTI-CHANNEL PLATES AND THEIR USE.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3408848 1984-03-10
DE3408848A DE3408848C2 (en) 1984-03-10 1984-03-10 Process for the production of multi-channel plates

Publications (3)

Publication Number Publication Date
EP0154797A2 EP0154797A2 (en) 1985-09-18
EP0154797A3 true EP0154797A3 (en) 1986-12-30
EP0154797B1 EP0154797B1 (en) 1988-10-05

Family

ID=6230128

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85101038A Expired EP0154797B1 (en) 1984-03-10 1985-02-01 Manufacturing process for multichannel plates, and their use

Country Status (6)

Country Link
US (1) US4563250A (en)
EP (1) EP0154797B1 (en)
JP (1) JPS60208041A (en)
AT (1) ATE37757T1 (en)
BR (1) BR8501058A (en)
DE (1) DE3408848C2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3841621A1 (en) * 1988-12-10 1990-07-12 Draegerwerk Ag ELECTROCHEMICAL MEASURING CELL WITH MICROSTRUCTURED CAPILLARY OPENINGS IN THE MEASURING ELECTRODE
EP0413482B1 (en) * 1989-08-18 1997-03-12 Galileo Electro-Optics Corp. Thin-film continuous dynodes
US5189777A (en) * 1990-12-07 1993-03-02 Wisconsin Alumni Research Foundation Method of producing micromachined differential pressure transducers
US5206983A (en) * 1991-06-24 1993-05-04 Wisconsin Alumni Research Foundation Method of manufacturing micromechanical devices
US5190637A (en) * 1992-04-24 1993-03-02 Wisconsin Alumni Research Foundation Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
US5378583A (en) * 1992-12-22 1995-01-03 Wisconsin Alumni Research Foundation Formation of microstructures using a preformed photoresist sheet
EP0872331A1 (en) * 1997-04-16 1998-10-21 Matsushita Electric Industrial Co., Ltd. Stamper protecting layer for optical disk molding apparatus, optical disk molding apparatus and optical disk molding method using the stamper protecting layer
US6521149B1 (en) * 2000-06-06 2003-02-18 Gerald T. Mearini Solid chemical vapor deposition diamond microchannel plate
DE10305427B4 (en) * 2003-02-03 2006-05-24 Siemens Ag Production method for a perforated disk for ejecting a fluid
US7154086B2 (en) * 2003-03-19 2006-12-26 Burle Technologies, Inc. Conductive tube for use as a reflectron lens
US20080073516A1 (en) * 2006-03-10 2008-03-27 Laprade Bruce N Resistive glass structures used to shape electric fields in analytical instruments

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031423A (en) * 1969-04-30 1977-06-21 American Optical Corporation Channel structure for multi-channel electron multipliers and method of making same
GB2029088A (en) * 1978-08-21 1980-03-12 Philips Nv Microchannel plate multipliers

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1434053A (en) * 1973-04-06 1976-04-28 Mullard Ltd Electron multipliers
DE2922642C2 (en) * 1979-06-02 1981-10-01 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Process for the manufacture of plates for the construction of separation nozzle elements
DE3039110A1 (en) * 1980-10-16 1982-05-13 Siemens AG, 1000 Berlin und 8000 München METHOD FOR THE STRESS-FREE DEVELOPMENT OF IRRADIATED POLYMETHYL META ACRYLATE LAYERS
DE3150257A1 (en) * 1981-12-18 1983-06-30 Siemens AG, 1000 Berlin und 8000 München Image intensifier
DE3206820C2 (en) * 1982-02-26 1984-02-09 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Process for making separation nozzle elements
DE3221981C2 (en) * 1982-06-11 1985-08-29 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Process for the production of separating nozzle elements consisting of separating bodies with end plates for separating gaseous or vaporous mixtures

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031423A (en) * 1969-04-30 1977-06-21 American Optical Corporation Channel structure for multi-channel electron multipliers and method of making same
GB2029088A (en) * 1978-08-21 1980-03-12 Philips Nv Microchannel plate multipliers

Also Published As

Publication number Publication date
JPS60208041A (en) 1985-10-19
DE3408848A1 (en) 1985-09-19
US4563250A (en) 1986-01-07
ATE37757T1 (en) 1988-10-15
BR8501058A (en) 1985-10-29
EP0154797A2 (en) 1985-09-18
DE3408848C2 (en) 1987-04-16
EP0154797B1 (en) 1988-10-05
JPH0552618B2 (en) 1993-08-05

Similar Documents

Publication Publication Date Title
JPS52103209A (en) Method of producing lithographic press plate using laser beam
EP0154797A3 (en) Manufacturing process for multichannel plates, and their use
EP0161476A3 (en) A process for producing a negative tone resist image
MY100637A (en) Embossing tool and method of producing same.
EP0154796A3 (en) Manufacturing process for layered metallic multichannel plates for an image intensifier, and use of plates so manufactured
GB2022855A (en) Method of producing a negative resist pattern
GB2085905B (en) Process for producing gravure printing plates
JPS52150103A (en) Method of producing lithographic printing form and press plate
AU585841B2 (en) Process for the production of an x-ray mask comprising a metal carrier foil
AU581987B2 (en) Method for producing a spinning nozzle plate
JPS53120905A (en) Method of producing lithographic printing plate
ES2015677A6 (en) Process for making gravure formes of variable depth or variable depth and area.
JPS5317407A (en) Method of producing lithographic press plate
JPS5212006A (en) Method of making lithographic press plate employing laser beam
JPS5749530A (en) Manufacture of replica
JPS52107390A (en) Method of producing negative plate with deformed pattern
JPS53100006A (en) Method of producing lithographic printing plate
IT8022954A0 (en) PROCESS FOR MANUFACTURING LATTICES ON CHROME PLATES DIRECTLY USING A PATTERN GENERATOR.
DE2860625D1 (en) Process for manufacturing a permeable diaphragm for an electrolytic cell
JPS5515125A (en) Halftone gravure engraving method
JPS6429827A (en) Reticle and its manufacture
JPS54153863A (en) Manufacture of embossed decorative laminate, embossed plate, and its making
ES8200677A1 (en) Manufacture of compound shadow mask
JPS5413334A (en) Exposure
JPS54106828A (en) Method of producing cadmium cathode plate

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Designated state(s): AT CH FR GB IT LI NL SE

17P Request for examination filed

Effective date: 19850805

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT CH FR GB IT LI NL SE

17Q First examination report despatched

Effective date: 19880311

ITF It: translation for a ep patent filed
GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT CH FR GB IT LI NL SE

REF Corresponds to:

Ref document number: 37757

Country of ref document: AT

Date of ref document: 19881015

Kind code of ref document: T

ET Fr: translation filed
GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
ITTA It: last paid annual fee
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 19940224

Year of fee payment: 10

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19941116

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19941221

Year of fee payment: 11

EAL Se: european patent in force in sweden

Ref document number: 85101038.9

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Effective date: 19950201

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 19950216

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19950228

Year of fee payment: 11

Ref country code: FR

Payment date: 19950228

Year of fee payment: 11

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19960201

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Effective date: 19960202

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19960228

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19960228

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Effective date: 19960901

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19960201

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Effective date: 19961031

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 19960901

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST