EP0154796A3 - Manufacturing process for layered metallic multichannel plates for an image intensifier, and use of plates so manufactured - Google Patents

Manufacturing process for layered metallic multichannel plates for an image intensifier, and use of plates so manufactured Download PDF

Info

Publication number
EP0154796A3
EP0154796A3 EP85101037A EP85101037A EP0154796A3 EP 0154796 A3 EP0154796 A3 EP 0154796A3 EP 85101037 A EP85101037 A EP 85101037A EP 85101037 A EP85101037 A EP 85101037A EP 0154796 A3 EP0154796 A3 EP 0154796A3
Authority
EP
European Patent Office
Prior art keywords
plate
channels
negative mold
plates
produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85101037A
Other languages
German (de)
Other versions
EP0154796B1 (en
EP0154796A2 (en
Inventor
Erwin Prof. Dr. Becker
Wolfgang Dr. Ehrfeld
Frank Dr. Becker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to AT85101037T priority Critical patent/ATE38451T1/en
Publication of EP0154796A2 publication Critical patent/EP0154796A2/en
Publication of EP0154796A3 publication Critical patent/EP0154796A3/en
Application granted granted Critical
Publication of EP0154796B1 publication Critical patent/EP0154796B1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/18—Electrode arrangements using essentially more than one dynode
    • H01J43/24—Dynodes having potential gradient along their surfaces
    • H01J43/246—Microchannel plates [MCP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/32—Secondary emission electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Tubes For Measurement (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Particle Accelerators (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laminated Bodies (AREA)
  • Paper (AREA)

Abstract

A method for producing a multichannel plate containing metal dynodes and having a plurality of generally parallel channels for use in structures for amplifying or converting optical images or other two-dimensional signal patterns by secondary electron multiplication, which method includes: producing a negative mold of the plate by: (i) providing a body having at least the thickness of the plate to be produced and made of an electrically insulating material whose ability to be removed from the body is altered by exposure to a selected radiation; (ii) irradiating the body with the selected radiation in a pattern corresponding to the plate to be produced and in a manner to render portions of the body having the form of a grid surrounding the channels more easily removable than the remaining portions of the body; and (iii) removing the more easily removable portions of the body to leave columnar structures corresponding to the channels in the plate; depositing metal layers and intermediate layers alternatingly in the openings in the negative mold or in a secondary negative mold produced therefrom, the metal layers being deposited electrolytically and forming dynodes which are spaced apart in the direction of the channels; and removing the negative mold from the deposited layers.
EP85101037A 1984-03-10 1985-02-01 Manufacturing process for layered metallic multichannel plates for an image intensifier, and use of plates so manufactured Expired EP0154796B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85101037T ATE38451T1 (en) 1984-03-10 1985-02-01 METHOD OF MANUFACTURE OF LAYERED MULTI-CHANNEL PLATES OF METAL FOR IMAGE INTENSER AND USE OF THE MULTI-CHANNEL PLATES SO MANUFACTURED.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3408849 1984-03-10
DE3408849A DE3408849C2 (en) 1984-03-10 1984-03-10 Process for producing layered metal multi-channel plates for image intensifiers and use of the multi-channel plates thus produced

Publications (3)

Publication Number Publication Date
EP0154796A2 EP0154796A2 (en) 1985-09-18
EP0154796A3 true EP0154796A3 (en) 1986-12-30
EP0154796B1 EP0154796B1 (en) 1988-11-02

Family

ID=6230129

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85101037A Expired EP0154796B1 (en) 1984-03-10 1985-02-01 Manufacturing process for layered metallic multichannel plates for an image intensifier, and use of plates so manufactured

Country Status (6)

Country Link
US (1) US4563251A (en)
EP (1) EP0154796B1 (en)
JP (1) JPS60208040A (en)
AT (1) ATE38451T1 (en)
BR (1) BR8501057A (en)
DE (1) DE3408849C2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5189777A (en) * 1990-12-07 1993-03-02 Wisconsin Alumni Research Foundation Method of producing micromachined differential pressure transducers
US5206983A (en) * 1991-06-24 1993-05-04 Wisconsin Alumni Research Foundation Method of manufacturing micromechanical devices
US5190637A (en) * 1992-04-24 1993-03-02 Wisconsin Alumni Research Foundation Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
US5378583A (en) * 1992-12-22 1995-01-03 Wisconsin Alumni Research Foundation Formation of microstructures using a preformed photoresist sheet
US5412265A (en) * 1993-04-05 1995-05-02 Ford Motor Company Planar micro-motor and method of fabrication
GB9717210D0 (en) * 1997-08-14 1997-10-22 Central Lab Of The Research Co Electron multiplier array
US5943223A (en) * 1997-10-15 1999-08-24 Reliance Electric Industrial Company Electric switches for reducing on-state power loss
DE10305427B4 (en) * 2003-02-03 2006-05-24 Siemens Ag Production method for a perforated disk for ejecting a fluid
WO2004086964A2 (en) * 2003-04-01 2004-10-14 Council For The Central Laboratory Of The Research Councils Large area detectors and displays
GB0307526D0 (en) * 2003-04-01 2003-05-07 Council Cent Lab Res Councils Electron multiplier array
JP2007516634A (en) * 2003-07-09 2007-06-21 カウンシル フォー ザ セントラル ラボラトリー オブ ザ リサーチ カウンシルズ Imager using a large area electron multiplier

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980001019A1 (en) * 1978-10-30 1980-05-15 Hughes Aircraft Co Multiple grid fabrication method
DE2922642B1 (en) * 1979-06-02 1980-10-23 Kernforschungsz Karlsruhe Process for the production of panels for the construction of partition nozzle elements
DE3007385A1 (en) * 1980-02-27 1981-09-03 Siemens AG, 1000 Berlin und 8000 München Galvanoplastic prodn. of precision planographic elements - e.g. for integrated circuit prodn., pref. using continuous poly:methyl methacrylate composite photo-film
EP0078078A1 (en) * 1981-10-19 1983-05-04 Philips Electronics Uk Limited Laminated channel plate electron multiplier

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1434053A (en) * 1973-04-06 1976-04-28 Mullard Ltd Electron multipliers
DE3039110A1 (en) * 1980-10-16 1982-05-13 Siemens AG, 1000 Berlin und 8000 München METHOD FOR THE STRESS-FREE DEVELOPMENT OF IRRADIATED POLYMETHYL META ACRYLATE LAYERS
DE3150257A1 (en) * 1981-12-18 1983-06-30 Siemens AG, 1000 Berlin und 8000 München Image intensifier
DE3206820C2 (en) * 1982-02-26 1984-02-09 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Process for making separation nozzle elements
DE3221981C2 (en) * 1982-06-11 1985-08-29 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Process for the production of separating nozzle elements consisting of separating bodies with end plates for separating gaseous or vaporous mixtures

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980001019A1 (en) * 1978-10-30 1980-05-15 Hughes Aircraft Co Multiple grid fabrication method
DE2922642B1 (en) * 1979-06-02 1980-10-23 Kernforschungsz Karlsruhe Process for the production of panels for the construction of partition nozzle elements
DE3007385A1 (en) * 1980-02-27 1981-09-03 Siemens AG, 1000 Berlin und 8000 München Galvanoplastic prodn. of precision planographic elements - e.g. for integrated circuit prodn., pref. using continuous poly:methyl methacrylate composite photo-film
EP0078078A1 (en) * 1981-10-19 1983-05-04 Philips Electronics Uk Limited Laminated channel plate electron multiplier

Also Published As

Publication number Publication date
ATE38451T1 (en) 1988-11-15
JPH0535542B2 (en) 1993-05-26
DE3408849C2 (en) 1987-04-16
US4563251A (en) 1986-01-07
EP0154796B1 (en) 1988-11-02
DE3408849A1 (en) 1985-09-19
JPS60208040A (en) 1985-10-19
BR8501057A (en) 1985-10-29
EP0154796A2 (en) 1985-09-18

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