EP0154797A3 - Manufacturing process for multichannel plates, and their use - Google Patents

Manufacturing process for multichannel plates, and their use Download PDF

Info

Publication number
EP0154797A3
EP0154797A3 EP85101038A EP85101038A EP0154797A3 EP 0154797 A3 EP0154797 A3 EP 0154797A3 EP 85101038 A EP85101038 A EP 85101038A EP 85101038 A EP85101038 A EP 85101038A EP 0154797 A3 EP0154797 A3 EP 0154797A3
Authority
EP
European Patent Office
Prior art keywords
plate
mold
portions
metal
easily removable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP85101038A
Other languages
English (en)
Other versions
EP0154797A2 (de
EP0154797B1 (de
Inventor
Erwin Prof. Dr. Becker
Wolfgang Dr. Ehrfeld
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Karlsruher Institut fuer Technologie KIT
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to AT85101038T priority Critical patent/ATE37757T1/de
Publication of EP0154797A2 publication Critical patent/EP0154797A2/de
Publication of EP0154797A3 publication Critical patent/EP0154797A3/de
Application granted granted Critical
Publication of EP0154797B1 publication Critical patent/EP0154797B1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/18—Electrode arrangements using essentially more than one dynode
    • H01J43/24—Dynodes having potential gradient along their surfaces
    • H01J43/246—Microchannel plates [MCP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
    • H01J9/125—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes of secondary emission electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/32—Secondary emission electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electron Tubes For Measurement (AREA)
  • Blow-Moulding Or Thermoforming Of Plastics Or The Like (AREA)
  • Paper (AREA)
EP85101038A 1984-03-10 1985-02-01 Verfahren zur Herstellung von Vielkanalplatten und deren Verwendung Expired EP0154797B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85101038T ATE37757T1 (de) 1984-03-10 1985-02-01 Verfahren zur herstellung von vielkanalplatten und deren verwendung.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3408848A DE3408848C2 (de) 1984-03-10 1984-03-10 Verfahren zur Herstellung von Vielkanalplatten
DE3408848 1984-03-10

Publications (3)

Publication Number Publication Date
EP0154797A2 EP0154797A2 (de) 1985-09-18
EP0154797A3 true EP0154797A3 (en) 1986-12-30
EP0154797B1 EP0154797B1 (de) 1988-10-05

Family

ID=6230128

Family Applications (1)

Application Number Title Priority Date Filing Date
EP85101038A Expired EP0154797B1 (de) 1984-03-10 1985-02-01 Verfahren zur Herstellung von Vielkanalplatten und deren Verwendung

Country Status (6)

Country Link
US (1) US4563250A (de)
EP (1) EP0154797B1 (de)
JP (1) JPS60208041A (de)
AT (1) ATE37757T1 (de)
BR (1) BR8501058A (de)
DE (1) DE3408848C2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3841621A1 (de) * 1988-12-10 1990-07-12 Draegerwerk Ag Elektrochemische messzelle mit mikrostrukturierten kapillaroeffnungen in der messelektrode
DE69030145T2 (de) * 1989-08-18 1997-07-10 Galileo Electro Optics Corp Kontinuierliche Dünnschicht-Dynoden
US5189777A (en) * 1990-12-07 1993-03-02 Wisconsin Alumni Research Foundation Method of producing micromachined differential pressure transducers
US5206983A (en) * 1991-06-24 1993-05-04 Wisconsin Alumni Research Foundation Method of manufacturing micromechanical devices
US5190637A (en) * 1992-04-24 1993-03-02 Wisconsin Alumni Research Foundation Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
US5378583A (en) * 1992-12-22 1995-01-03 Wisconsin Alumni Research Foundation Formation of microstructures using a preformed photoresist sheet
EP0872331A1 (de) 1997-04-16 1998-10-21 Matsushita Electric Industrial Co., Ltd. Prägeplatten-Schutzschicht für eine Vorrichtung zum Spritzgiessen eines optischen Informationsträgers, Vorrichtung zum Spritzgiessen eines optischen Informationsträgers, Verfahren zum Spritzgiesen eines optischen Informationsträgers mit dem Prägeplatten-Schutzschicht
US6521149B1 (en) * 2000-06-06 2003-02-18 Gerald T. Mearini Solid chemical vapor deposition diamond microchannel plate
DE10305427B4 (de) * 2003-02-03 2006-05-24 Siemens Ag Herstellungsverfahren für eine Lochscheibe zum Ausstoßen eines Fluids
US7154086B2 (en) * 2003-03-19 2006-12-26 Burle Technologies, Inc. Conductive tube for use as a reflectron lens
US20080073516A1 (en) * 2006-03-10 2008-03-27 Laprade Bruce N Resistive glass structures used to shape electric fields in analytical instruments

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031423A (en) * 1969-04-30 1977-06-21 American Optical Corporation Channel structure for multi-channel electron multipliers and method of making same
GB2029088A (en) * 1978-08-21 1980-03-12 Philips Nv Microchannel plate multipliers

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1434053A (en) * 1973-04-06 1976-04-28 Mullard Ltd Electron multipliers
DE2922642C2 (de) * 1979-06-02 1981-10-01 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen von Platten für den Aufbau von Trenndüsenelementen
DE3039110A1 (de) * 1980-10-16 1982-05-13 Siemens AG, 1000 Berlin und 8000 München Verfahren fuer die spannungsfreie entwicklung von bestrahlten polymethylmetacrylatschichten
DE3150257A1 (de) * 1981-12-18 1983-06-30 Siemens AG, 1000 Berlin und 8000 München Bildverstaerker
DE3206820C2 (de) * 1982-02-26 1984-02-09 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen von Trenndüsenelementen
DE3221981C2 (de) * 1982-06-11 1985-08-29 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen von aus Trennkörpern mit Abschlußplatten bestehenden Trenndüsenelementen zur Trennung gas- oder dampfförmiger Gemische

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4031423A (en) * 1969-04-30 1977-06-21 American Optical Corporation Channel structure for multi-channel electron multipliers and method of making same
GB2029088A (en) * 1978-08-21 1980-03-12 Philips Nv Microchannel plate multipliers

Also Published As

Publication number Publication date
EP0154797A2 (de) 1985-09-18
BR8501058A (pt) 1985-10-29
ATE37757T1 (de) 1988-10-15
DE3408848C2 (de) 1987-04-16
EP0154797B1 (de) 1988-10-05
DE3408848A1 (de) 1985-09-19
US4563250A (en) 1986-01-07
JPS60208041A (ja) 1985-10-19
JPH0552618B2 (de) 1993-08-05

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