DE2512628C2 - Elektronenkanone - Google Patents
ElektronenkanoneInfo
- Publication number
- DE2512628C2 DE2512628C2 DE2512628A DE2512628A DE2512628C2 DE 2512628 C2 DE2512628 C2 DE 2512628C2 DE 2512628 A DE2512628 A DE 2512628A DE 2512628 A DE2512628 A DE 2512628A DE 2512628 C2 DE2512628 C2 DE 2512628C2
- Authority
- DE
- Germany
- Prior art keywords
- plates
- electron gun
- electrode
- output electrode
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 201000009310 astigmatism Diseases 0.000 claims description 15
- 125000006850 spacer group Chemical group 0.000 claims description 9
- 238000010586 diagram Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/029—Schematic arrangements for beam forming
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/454,038 US3932749A (en) | 1974-03-22 | 1974-03-22 | Electron gun |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2512628A1 DE2512628A1 (de) | 1975-09-25 |
| DE2512628C2 true DE2512628C2 (de) | 1985-04-04 |
Family
ID=23803032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2512628A Expired DE2512628C2 (de) | 1974-03-22 | 1975-03-21 | Elektronenkanone |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3932749A (OSRAM) |
| JP (1) | JPS514950A (OSRAM) |
| DE (1) | DE2512628C2 (OSRAM) |
| FR (1) | FR2265174B3 (OSRAM) |
| GB (1) | GB1489941A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4350927A (en) * | 1980-05-23 | 1982-09-21 | The United States Of America As Represented By The United States Department Of Energy | Means for the focusing and acceleration of parallel beams of charged particles |
| US4816685A (en) * | 1987-10-23 | 1989-03-28 | Lauronics, Inc. | Ion volume ring |
| GB2406704B (en) * | 2003-09-30 | 2007-02-07 | Ims Nanofabrication Gmbh | Particle-optic electrostatic lens |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3191028A (en) * | 1963-04-22 | 1965-06-22 | Albert V Crewe | Scanning electron microscope |
| DE1299088C2 (de) * | 1966-06-10 | 1974-10-17 | Siemens AG, Berlin und München, 8000 München | Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop |
| US3452241A (en) * | 1966-09-06 | 1969-06-24 | Rca Corp | Electron gun suitable for electron microscope |
| AT275617B (de) * | 1968-02-23 | 1969-10-27 | Zeiss Carl Fa | Verfahren und Anordnung zur Justierung des Elektronenstrahles in einem Elektronenmikroskop |
| DE1802450B1 (de) * | 1968-09-02 | 1970-07-02 | Siemens Ag | Verfahren zur Scharfstellung eines korpuskularstrahloptischen Bildes |
| US3787696A (en) * | 1972-03-15 | 1974-01-22 | Etec Corp | Scanning electron microscope electron-optical column construction |
| US3801784A (en) * | 1972-04-14 | 1974-04-02 | Research Corp | Scanning electron microscope operating in area scan and angle scan modes |
-
1974
- 1974-03-22 US US05/454,038 patent/US3932749A/en not_active Expired - Lifetime
-
1975
- 1975-03-19 GB GB11403/75A patent/GB1489941A/en not_active Expired
- 1975-03-19 JP JP50032495A patent/JPS514950A/ja active Pending
- 1975-03-21 DE DE2512628A patent/DE2512628C2/de not_active Expired
- 1975-03-21 FR FR7508916A patent/FR2265174B3/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS514950A (OSRAM) | 1976-01-16 |
| US3932749A (en) | 1976-01-13 |
| FR2265174A1 (OSRAM) | 1975-10-17 |
| DE2512628A1 (de) | 1975-09-25 |
| FR2265174B3 (OSRAM) | 1977-04-15 |
| GB1489941A (en) | 1977-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE2518688C2 (de) | Röntgenröhre | |
| DE2553625A1 (de) | Elektronenstrahlkanone | |
| DE2801916C2 (de) | Strahlerzeugungssystem für eine Fernsehbildröhre | |
| DE2800066A1 (de) | Elektronenstrahlroehre | |
| DE2658316B2 (de) | Glüheimissionselektronen strahlquelle | |
| DE2516464C3 (de) | Kathodenstrahlröhre | |
| DE2512628C2 (de) | Elektronenkanone | |
| DE922365C (de) | Roentgenroehre mit sehr feinem Brennfleck | |
| DE69028620T2 (de) | Röntgenröhre mit Austrittsfenster | |
| DE1541005C3 (de) | Elektronenentladungsvorrichtung | |
| DE1212645B (de) | Elektronenstrahlroehre mit einer vierpoligen elektrostatischen Elektronenlinse | |
| DE2714846C2 (de) | Aufnahmeröhre mit einer als Nebenbeleuchtungsquelle dienenden Lampe | |
| DE2512626A1 (de) | Ionenstrahlquelle und damit ausgestattete bombardierungsvorrichtung | |
| DE814918C (de) | Elektrisches Entladungsgefaess mit einem gerichteten Elektronenbuendel | |
| DE720676C (de) | Anordnung zur Konzentration eines Elektronenstrahlenbuendels zu einem fadenfoermigen Strahl in einer hoch evakuierten Roehre mit Gluehkathode | |
| DE2142436C2 (de) | Fernsehkameraröhre und Verfahren zum Betrieb | |
| DE2140523A1 (de) | Elektronenstrahlerzeuger | |
| DE1918877B2 (de) | Farbbildwiedergaberoehre | |
| DE925664C (de) | Elektronenbuendelungs- und -ablenkvorrichtung fuer elektrische Entladungsgefaesse | |
| DE828266C (de) | Isolator fuer Hochspannungszwecke | |
| DE1539800C3 (de) | Kathodenstrahlröhre | |
| DE1169594B (de) | Elektronenstrahlerzeugungssystem fuer Kathodenstrahlroehren | |
| DE3343750A1 (de) | Achsenversetzter elektronenstrahlerzeuger | |
| DE756102C (de) | Elektrische Linse, bei der sich Elektroden gegeneinander unter Vermittlung von konischen Passflaechen abstuetzen, fuer Korpuskular-strahlapparate, insbesondere fuer Elektronenmikroskope | |
| DE1286648B (de) | Elektronenstrahlroehre mit zwei vierpoligen elektrostatischen Elektronenlinsen |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8328 | Change in the person/name/address of the agent |
Free format text: DERZEIT KEIN VERTRETER BESTELLT |
|
| 8339 | Ceased/non-payment of the annual fee |