GB1489941A - Charged particle beam apparatus - Google Patents

Charged particle beam apparatus

Info

Publication number
GB1489941A
GB1489941A GB11403/75A GB1140375A GB1489941A GB 1489941 A GB1489941 A GB 1489941A GB 11403/75 A GB11403/75 A GB 11403/75A GB 1140375 A GB1140375 A GB 1140375A GB 1489941 A GB1489941 A GB 1489941A
Authority
GB
United Kingdom
Prior art keywords
anode
final
plates
lens
march
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11403/75A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB1489941A publication Critical patent/GB1489941A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/029—Schematic arrangements for beam forming

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
GB11403/75A 1974-03-22 1975-03-19 Charged particle beam apparatus Expired GB1489941A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/454,038 US3932749A (en) 1974-03-22 1974-03-22 Electron gun

Publications (1)

Publication Number Publication Date
GB1489941A true GB1489941A (en) 1977-10-26

Family

ID=23803032

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11403/75A Expired GB1489941A (en) 1974-03-22 1975-03-19 Charged particle beam apparatus

Country Status (5)

Country Link
US (1) US3932749A (OSRAM)
JP (1) JPS514950A (OSRAM)
DE (1) DE2512628C2 (OSRAM)
FR (1) FR2265174B3 (OSRAM)
GB (1) GB1489941A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4350927A (en) * 1980-05-23 1982-09-21 The United States Of America As Represented By The United States Department Of Energy Means for the focusing and acceleration of parallel beams of charged particles
US4816685A (en) * 1987-10-23 1989-03-28 Lauronics, Inc. Ion volume ring
GB2406704B (en) * 2003-09-30 2007-02-07 Ims Nanofabrication Gmbh Particle-optic electrostatic lens

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
DE1299088C2 (de) * 1966-06-10 1974-10-17 Siemens AG, Berlin und München, 8000 München Ablenkeinrichtung fuer den korpuskularstrahl in einem korpuskularstrahlgeraet, insbesondere elektronenmikroskop
US3452241A (en) * 1966-09-06 1969-06-24 Rca Corp Electron gun suitable for electron microscope
AT275617B (de) * 1968-02-23 1969-10-27 Zeiss Carl Fa Verfahren und Anordnung zur Justierung des Elektronenstrahles in einem Elektronenmikroskop
DE1802450B1 (de) * 1968-09-02 1970-07-02 Siemens Ag Verfahren zur Scharfstellung eines korpuskularstrahloptischen Bildes
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
US3801784A (en) * 1972-04-14 1974-04-02 Research Corp Scanning electron microscope operating in area scan and angle scan modes

Also Published As

Publication number Publication date
JPS514950A (OSRAM) 1976-01-16
US3932749A (en) 1976-01-13
FR2265174A1 (OSRAM) 1975-10-17
DE2512628A1 (de) 1975-09-25
DE2512628C2 (de) 1985-04-04
FR2265174B3 (OSRAM) 1977-04-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930319