DE2500867A1 - Oxidisoliertes ic-halbleiterbauelement und verfahren zu seiner herstellung - Google Patents

Oxidisoliertes ic-halbleiterbauelement und verfahren zu seiner herstellung

Info

Publication number
DE2500867A1
DE2500867A1 DE19752500867 DE2500867A DE2500867A1 DE 2500867 A1 DE2500867 A1 DE 2500867A1 DE 19752500867 DE19752500867 DE 19752500867 DE 2500867 A DE2500867 A DE 2500867A DE 2500867 A1 DE2500867 A1 DE 2500867A1
Authority
DE
Germany
Prior art keywords
pattern
level
semiconductor body
metallization
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19752500867
Other languages
German (de)
English (en)
Inventor
Roger Edwards
William Joshua Evans
Wesley Norman Grant
Bernard Thomas Murphy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of DE2500867A1 publication Critical patent/DE2500867A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Element Separation (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE19752500867 1974-01-14 1975-01-10 Oxidisoliertes ic-halbleiterbauelement und verfahren zu seiner herstellung Withdrawn DE2500867A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US43289674A 1974-01-14 1974-01-14

Publications (1)

Publication Number Publication Date
DE2500867A1 true DE2500867A1 (de) 1975-07-24

Family

ID=23718017

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19752500867 Withdrawn DE2500867A1 (de) 1974-01-14 1975-01-10 Oxidisoliertes ic-halbleiterbauelement und verfahren zu seiner herstellung

Country Status (7)

Country Link
JP (1) JPS50104579A (fr)
CA (1) CA1010157A (fr)
DE (1) DE2500867A1 (fr)
FR (1) FR2258001B1 (fr)
GB (1) GB1485183A (fr)
IT (1) IT1028309B (fr)
NL (1) NL7500360A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2605641C3 (de) * 1976-02-12 1979-12-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen Hochfrequenztransistor und Verfahren zu seiner Herstellung
FR2470444A1 (fr) * 1979-11-21 1981-05-29 Radiotechnique Compelec Perfectionnement au procede de realisation d'un reseau de connexions par anodisation localisee sur un support semi-conducteur

Also Published As

Publication number Publication date
NL7500360A (nl) 1975-07-16
JPS50104579A (fr) 1975-08-18
FR2258001B1 (fr) 1978-08-25
GB1485183A (en) 1977-09-08
FR2258001A1 (fr) 1975-08-08
IT1028309B (it) 1979-01-30
CA1010157A (en) 1977-05-10

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8130 Withdrawal