CA1010157A - Oxide isolated integrated circuit structure and method for fabricating - Google Patents

Oxide isolated integrated circuit structure and method for fabricating

Info

Publication number
CA1010157A
CA1010157A CA209,524A CA209524A CA1010157A CA 1010157 A CA1010157 A CA 1010157A CA 209524 A CA209524 A CA 209524A CA 1010157 A CA1010157 A CA 1010157A
Authority
CA
Canada
Prior art keywords
fabricating
integrated circuit
circuit structure
isolated integrated
oxide isolated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA209,524A
Other versions
CA209524S (en
Inventor
Bernard T. Murphy
Roger Edwards
William J. Evans
Wesley N. Grant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA1010157A publication Critical patent/CA1010157A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
CA209,524A 1974-01-14 1974-09-19 Oxide isolated integrated circuit structure and method for fabricating Expired CA1010157A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US43289674A 1974-01-14 1974-01-14

Publications (1)

Publication Number Publication Date
CA1010157A true CA1010157A (en) 1977-05-10

Family

ID=23718017

Family Applications (1)

Application Number Title Priority Date Filing Date
CA209,524A Expired CA1010157A (en) 1974-01-14 1974-09-19 Oxide isolated integrated circuit structure and method for fabricating

Country Status (7)

Country Link
JP (1) JPS50104579A (en)
CA (1) CA1010157A (en)
DE (1) DE2500867A1 (en)
FR (1) FR2258001B1 (en)
GB (1) GB1485183A (en)
IT (1) IT1028309B (en)
NL (1) NL7500360A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2605641C3 (en) * 1976-02-12 1979-12-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen High frequency transistor and process for its manufacture
FR2470444A1 (en) * 1979-11-21 1981-05-29 Radiotechnique Compelec Electrical connection network on semiconductor base mfg. method - using floating conductors isolated from base and formed by localised anodic oxidation of metallic coating

Also Published As

Publication number Publication date
FR2258001A1 (en) 1975-08-08
FR2258001B1 (en) 1978-08-25
GB1485183A (en) 1977-09-08
JPS50104579A (en) 1975-08-18
DE2500867A1 (en) 1975-07-24
NL7500360A (en) 1975-07-16
IT1028309B (en) 1979-01-30

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