DE2457377A1 - Verfahren zum aetzen eines polymerfilms auf der basis eines polyimids - Google Patents

Verfahren zum aetzen eines polymerfilms auf der basis eines polyimids

Info

Publication number
DE2457377A1
DE2457377A1 DE19742457377 DE2457377A DE2457377A1 DE 2457377 A1 DE2457377 A1 DE 2457377A1 DE 19742457377 DE19742457377 DE 19742457377 DE 2457377 A DE2457377 A DE 2457377A DE 2457377 A1 DE2457377 A1 DE 2457377A1
Authority
DE
Germany
Prior art keywords
film
hydroxide
etching
polyimide
etching solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19742457377
Other languages
German (de)
English (en)
Other versions
DE2457377C2 (enrdf_load_stackoverflow
Inventor
John Gaylord Fish
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of DE2457377A1 publication Critical patent/DE2457377A1/de
Application granted granted Critical
Publication of DE2457377C2 publication Critical patent/DE2457377C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/02—Chemical treatment or coating of shaped articles made of macromolecular substances with solvents, e.g. swelling agents
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/002—Etching of the substrate by chemical or physical means by liquid chemical etching
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
    • C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08J2379/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0313—Organic insulating material
    • H05K1/032—Organic insulating material consisting of one material
    • H05K1/0346—Organic insulating material consisting of one material containing N
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0154—Polyimide
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0783—Using solvent, e.g. for cleaning; Regulating solvent content of pastes or coatings for adjusting the viscosity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
DE19742457377 1973-12-19 1974-12-04 Verfahren zum aetzen eines polymerfilms auf der basis eines polyimids Granted DE2457377A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US426275A US3871930A (en) 1973-12-19 1973-12-19 Method of etching films made of polyimide based polymers

Publications (2)

Publication Number Publication Date
DE2457377A1 true DE2457377A1 (de) 1975-07-03
DE2457377C2 DE2457377C2 (enrdf_load_stackoverflow) 1988-01-28

Family

ID=23690105

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19742457377 Granted DE2457377A1 (de) 1973-12-19 1974-12-04 Verfahren zum aetzen eines polymerfilms auf der basis eines polyimids

Country Status (6)

Country Link
US (1) US3871930A (enrdf_load_stackoverflow)
JP (1) JPS5911355B2 (enrdf_load_stackoverflow)
DE (1) DE2457377A1 (enrdf_load_stackoverflow)
FR (1) FR2255366B1 (enrdf_load_stackoverflow)
GB (1) GB1491238A (enrdf_load_stackoverflow)
NL (1) NL185017C (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2645947A1 (de) * 1975-10-22 1977-04-28 Int Computers Ltd Verfahren zur herstellung gedruckter schaltungen
DE3215411A1 (de) * 1982-04-24 1983-10-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum herstellen von oeffnungen mit hilfe einer maske in einer auf einer unterlage befindlichen schicht

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3971661A (en) * 1972-06-14 1976-07-27 Westinghouse Electric Corporation Formation of openings in dielectric sheet
US4093461A (en) * 1975-07-18 1978-06-06 Gaf Corporation Positive working thermally stable photoresist composition, article and method of using
DE2541624C2 (de) * 1975-09-18 1982-09-16 Ibm Deutschland Gmbh, 7000 Stuttgart Wässrige Ätzlösung und Verfahren zum Ätzen von Polymerfilmen oder Folien auf Polyimidbasis
US4327171A (en) * 1976-05-28 1982-04-27 Stanley Poler Method of making an intra-ocular lens-mount element
US4159222A (en) * 1977-01-11 1979-06-26 Pactel Corporation Method of manufacturing high density fine line printed circuitry
US4306925A (en) * 1977-01-11 1981-12-22 Pactel Corporation Method of manufacturing high density printed circuit
DE2919841A1 (de) * 1979-05-16 1980-11-20 Siemens Ag Verfahren zur phototechnischen herstellung von reliefstrukturen
US4276186A (en) * 1979-06-26 1981-06-30 International Business Machines Corporation Cleaning composition and use thereof
JPS5896632A (ja) * 1981-12-02 1983-06-08 Sumitomo Bakelite Co Ltd ポリイミド系樹脂のエツチング方法
DE3215410A1 (de) * 1982-04-24 1983-10-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum herstellen von oeffnungen mit hilfe einer maske in einer auf einer unterlage befindlichen schicht
US4411735A (en) * 1982-05-06 1983-10-25 National Semiconductor Corporation Polymeric insulation layer etching process and composition
DE3740369A1 (de) * 1987-11-25 1989-06-08 Schering Ag Verfahren zur vorbehandlung von kunststoffen
JPH02144987A (ja) * 1988-11-26 1990-06-04 Sumitomo Metal Mining Co Ltd プリント配線板の製造方法
DE3902991A1 (de) * 1989-01-30 1990-08-02 Schering Ag Verfahren zur haftfesten metallisierung von hochtemperaturstabilen kunststoffen
US5350489A (en) * 1990-10-19 1994-09-27 Purex Co., Ltd. Treatment method of cleaning surface of plastic molded item
DE69128451T2 (de) * 1990-10-19 1998-06-18 Purex Co Behandlungsmethode zur Reinigung der Oberfläche von geformten Kunststoffgegenständen
CH681758A5 (en) * 1991-02-28 1993-05-14 Dyconex Patente Ag C O Heinze Plastics foil micro-sieve
US5227008A (en) * 1992-01-23 1993-07-13 Minnesota Mining And Manufacturing Company Method for making flexible circuits
US5391397A (en) * 1994-04-05 1995-02-21 Motorola, Inc. Method of adhesion to a polyimide surface by formation of covalent bonds
US5925260A (en) * 1997-01-02 1999-07-20 Micron Technology, Inc. Removal of polyimide from dies and wafers
US6177357B1 (en) 1999-04-30 2001-01-23 3M Innovative Properties Company Method for making flexible circuits
US20040038451A1 (en) * 1999-10-06 2004-02-26 Hawks Douglas A. Method suitable for forming a microelectronic device package
US20070120089A1 (en) * 2005-11-28 2007-05-31 3M Innovative Properties Company Polymer etchant and method of using same
CN109467700B (zh) * 2018-10-31 2021-05-04 江苏亚宝绝缘材料股份有限公司 一种严格等摩尔单体结合补偿加料的树脂合成方法及聚酰胺酸树脂

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3361589A (en) * 1964-10-05 1968-01-02 Du Pont Process for treating polyimide surface with basic compounds, and polyimide surface having thin layer of polyamide acid
US3770528A (en) * 1971-09-29 1973-11-06 Martin Processing Co Inc Method for the surface treatment of polyimide materials

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3736170A (en) * 1971-06-28 1973-05-29 Ibm Process for improved adhesion of electroless copper to a polyimide surface
US3767490A (en) * 1971-06-29 1973-10-23 Ibm Process for etching organic coating layers
US3791848A (en) * 1972-05-19 1974-02-12 Western Electric Co A method of improving the adherence of a metal deposit to a polyimide surface

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3361589A (en) * 1964-10-05 1968-01-02 Du Pont Process for treating polyimide surface with basic compounds, and polyimide surface having thin layer of polyamide acid
US3770528A (en) * 1971-09-29 1973-11-06 Martin Processing Co Inc Method for the surface treatment of polyimide materials

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2645947A1 (de) * 1975-10-22 1977-04-28 Int Computers Ltd Verfahren zur herstellung gedruckter schaltungen
DE3215411A1 (de) * 1982-04-24 1983-10-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum herstellen von oeffnungen mit hilfe einer maske in einer auf einer unterlage befindlichen schicht

Also Published As

Publication number Publication date
NL185017C (nl) 1990-01-02
JPS5911355B2 (ja) 1984-03-14
DE2457377C2 (enrdf_load_stackoverflow) 1988-01-28
GB1491238A (en) 1977-11-09
JPS5092973A (enrdf_load_stackoverflow) 1975-07-24
NL7410943A (nl) 1975-06-23
FR2255366B1 (enrdf_load_stackoverflow) 1979-07-06
NL185017B (nl) 1989-08-01
FR2255366A1 (enrdf_load_stackoverflow) 1975-07-18
US3871930A (en) 1975-03-18

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: C09K 13/00

8128 New person/name/address of the agent

Representative=s name: PRINZ, E., DIPL.-ING. LEISER, G., DIPL.-ING., PAT.

D2 Grant after examination
8364 No opposition during term of opposition