DE2330381C3 - Feinzerteilte, beim Wärmebehandeln einen dichten Glaskeramikkörper bildende Glasmasse zur Erzielung von Mehrschicht-Schaltungsanordnungen mit niedrigen Dielektrizitätskonstanten - Google Patents
Feinzerteilte, beim Wärmebehandeln einen dichten Glaskeramikkörper bildende Glasmasse zur Erzielung von Mehrschicht-Schaltungsanordnungen mit niedrigen DielektrizitätskonstantenInfo
- Publication number
- DE2330381C3 DE2330381C3 DE2330381A DE2330381A DE2330381C3 DE 2330381 C3 DE2330381 C3 DE 2330381C3 DE 2330381 A DE2330381 A DE 2330381A DE 2330381 A DE2330381 A DE 2330381A DE 2330381 C3 DE2330381 C3 DE 2330381C3
- Authority
- DE
- Germany
- Prior art keywords
- dielectric
- weight
- glass
- percent
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011521 glass Substances 0.000 title claims description 71
- 238000010438 heat treatment Methods 0.000 title claims description 25
- 239000002241 glass-ceramic Substances 0.000 title claims description 3
- 239000000758 substrate Substances 0.000 claims description 16
- 229910001597 celsian Inorganic materials 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 9
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 6
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000011161 development Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 20
- 239000000203 mixture Substances 0.000 description 14
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Inorganic materials [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 12
- 239000013078 crystal Substances 0.000 description 10
- 239000011787 zinc oxide Substances 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 7
- 239000003989 dielectric material Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 238000001465 metallisation Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000292 calcium oxide Substances 0.000 description 6
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 6
- 239000002243 precursor Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- ZOIVSVWBENBHNT-UHFFFAOYSA-N dizinc;silicate Chemical compound [Zn+2].[Zn+2].[O-][Si]([O-])([O-])[O-] ZOIVSVWBENBHNT-UHFFFAOYSA-N 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 229910052861 titanite Inorganic materials 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 239000000395 magnesium oxide Substances 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910015999 BaAl Inorganic materials 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910052810 boron oxide Inorganic materials 0.000 description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000009969 flowable effect Effects 0.000 description 2
- 150000004706 metal oxides Chemical group 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000006069 physical mixture Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- RUJPNZNXGCHGID-UHFFFAOYSA-N (Z)-beta-Terpineol Natural products CC(=C)C1CCC(C)(O)CC1 RUJPNZNXGCHGID-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- 101100453790 Drosophila melanogaster Kebab gene Proteins 0.000 description 1
- 239000004606 Fillers/Extenders Substances 0.000 description 1
- LFVLUOAHQIVABZ-UHFFFAOYSA-N Iodofenphos Chemical compound COP(=S)(OC)OC1=CC(Cl)=C(I)C=C1Cl LFVLUOAHQIVABZ-UHFFFAOYSA-N 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-N Propionic acid Chemical class CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- -1 aliphatic alcohols Chemical class 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- 239000006105 batch ingredient Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 101150073385 fau gene Proteins 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 235000015231 kebab Nutrition 0.000 description 1
- 210000004072 lung Anatomy 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 239000010665 pine oil Substances 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- QJVXKWHHAMZTBY-GCPOEHJPSA-N syringin Chemical compound COC1=CC(\C=C\CO)=CC(OC)=C1O[C@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 QJVXKWHHAMZTBY-GCPOEHJPSA-N 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
- 235000007586 terpenes Nutrition 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4685—Manufacturing of cross-over conductors
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
- C03C10/0036—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
- C03C10/0036—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
- C03C10/0045—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents containing SiO2, Al2O3 and MgO as main constituents
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
- C03C10/0054—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing PbO, SnO2, B2O3
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26249172A | 1972-06-14 | 1972-06-14 | |
| US00380600A US3848079A (en) | 1972-06-14 | 1973-07-19 | Pointed circuits with crystallized glass low k crossover dielectrics |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2330381A1 DE2330381A1 (de) | 1974-01-03 |
| DE2330381B2 DE2330381B2 (de) | 1975-03-20 |
| DE2330381C3 true DE2330381C3 (de) | 1975-10-23 |
Family
ID=26949252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2330381A Expired DE2330381C3 (de) | 1972-06-14 | 1973-06-14 | Feinzerteilte, beim Wärmebehandeln einen dichten Glaskeramikkörper bildende Glasmasse zur Erzielung von Mehrschicht-Schaltungsanordnungen mit niedrigen Dielektrizitätskonstanten |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US3785837A (enExample) |
| CA (1) | CA980460A (enExample) |
| DE (1) | DE2330381C3 (enExample) |
| FR (1) | FR2187715B1 (enExample) |
| GB (1) | GB1390887A (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3837869A (en) * | 1972-07-20 | 1974-09-24 | Du Pont | Celsian containing dielectric crossover compositions |
| US3968412A (en) * | 1973-07-27 | 1976-07-06 | General Electric Company | Thick film capacitor |
| US3957496A (en) * | 1975-09-23 | 1976-05-18 | The United States Of America As Represented By The United States Energy Research And Development Administration | Molybdenum sealing glass-ceramic composition |
| US4118595A (en) * | 1977-06-06 | 1978-10-03 | Bell Telephone Laboratories, Incorporated | Crossovers and method of fabrication |
| DE3140971A1 (de) * | 1980-10-17 | 1982-06-16 | RCA Corp., 10020 New York, N.Y. | "kreuzungsisolierfarbe" |
| US4385127A (en) * | 1981-11-23 | 1983-05-24 | Corning Glass Works | Glass-ceramic coatings for use on metal substrates |
| DE3534712A1 (de) * | 1985-09-28 | 1987-04-09 | Bosch Gmbh Robert | Isolationsbeschichtung fuer ein elektrisch leitfaehiges substrat |
| EP0234338A1 (de) * | 1986-02-13 | 1987-09-02 | W.C. Heraeus GmbH | Ein Antrag gemäss Regel 88 EPÜ auf Berichtigung der Beschreibungsseite 22, Zeile 3 liegt vor. Über diesen Antrag wird im Laufe des Verfahrens von der Prüfungsabteilung eine Entscheidung getroffen werden |
| EP0253341A1 (en) * | 1986-07-15 | 1988-01-20 | E.I. Du Pont De Nemours And Company | Glass ceramic dielectric compositions |
| EP0253343A1 (en) * | 1986-07-15 | 1988-01-20 | E.I. Du Pont De Nemours And Company | Glass cermic dielectric compositions |
| US4948759A (en) * | 1986-07-15 | 1990-08-14 | E. I. Du Pont De Nemours And Company | Glass ceramic dielectric compositions |
| US4820661A (en) * | 1986-07-15 | 1989-04-11 | E. I. Du Pont De Nemours And Company | Glass ceramic dielectric compositions |
| DE3788432T2 (de) * | 1986-07-15 | 1994-06-09 | Du Pont | Glaskeramische dielektrische Zusammensetzungen. |
| US5286270A (en) * | 1990-09-07 | 1994-02-15 | Ferro Corporation | Method of forming glass having a Znz SiO4 enamel layer thereon |
| JP2756075B2 (ja) * | 1993-08-06 | 1998-05-25 | 三菱電機株式会社 | 金属ベース基板およびそれを用いた電子機器 |
| US5397830A (en) * | 1994-01-24 | 1995-03-14 | Ferro Corporation | Dielectric materials |
| US5714246A (en) * | 1994-05-13 | 1998-02-03 | Ferro Corporation | Conductive silver low temperature cofired metallic green tape |
| US5801108A (en) * | 1996-09-11 | 1998-09-01 | Motorola Inc. | Low temperature cofireable dielectric paste |
| RU2188171C2 (ru) * | 2000-06-19 | 2002-08-27 | Белорусский государственный технологический университет | Стекло для стеклокристаллического цемента |
| DE10103621C2 (de) * | 2001-01-27 | 2003-01-16 | Ego Elektro Geraetebau Gmbh | Passivierungspaste, Beschichtungsverfahren und Heizelement |
| JP3988533B2 (ja) * | 2002-05-23 | 2007-10-10 | 株式会社村田製作所 | ガラスセラミック組成物、ガラスセラミック、およびセラミック多層基板 |
| CN110482867B (zh) * | 2019-09-06 | 2022-02-08 | 安徽凯盛基础材料科技有限公司 | 用于高频高速覆铜板低介电玻璃微球及制备方法 |
| CN111875414B (zh) * | 2020-06-30 | 2022-08-05 | 蒙娜丽莎集团股份有限公司 | 高太阳光反射率陶瓷板及其制备方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3464836A (en) * | 1964-11-02 | 1969-09-02 | Anaconda Wire & Cable Co | Ceramic filament,electrical apparatus made therewith and method of making same |
| GB1180908A (en) * | 1966-11-17 | 1970-02-11 | English Electric Co Ltd | Improvements in or relating to processes for Forming an Insulating Coating on Silicon, and to Coated Silicon |
| US3586522A (en) * | 1967-06-01 | 1971-06-22 | Du Pont | Glass-ceramics containing baal2si208 crystalline phase |
-
1972
- 1972-06-14 US US00262491A patent/US3785837A/en not_active Expired - Lifetime
-
1973
- 1973-06-13 FR FR7321457A patent/FR2187715B1/fr not_active Expired
- 1973-06-13 CA CA173,936A patent/CA980460A/en not_active Expired
- 1973-06-14 DE DE2330381A patent/DE2330381C3/de not_active Expired
- 1973-06-14 GB GB2845273A patent/GB1390887A/en not_active Expired
- 1973-07-19 US US00380600A patent/US3848079A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE2330381A1 (de) | 1974-01-03 |
| US3785837A (en) | 1974-01-15 |
| CA980460A (en) | 1975-12-23 |
| GB1390887A (en) | 1975-04-16 |
| DE2330381B2 (de) | 1975-03-20 |
| FR2187715B1 (enExample) | 1976-05-28 |
| US3848079A (en) | 1974-11-12 |
| FR2187715A1 (enExample) | 1974-01-18 |
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