DE2315253A1 - Verfahren zur gasphasenablagerung eines zirkoncarbid-kohlenstoff-materials - Google Patents

Verfahren zur gasphasenablagerung eines zirkoncarbid-kohlenstoff-materials

Info

Publication number
DE2315253A1
DE2315253A1 DE19732315253 DE2315253A DE2315253A1 DE 2315253 A1 DE2315253 A1 DE 2315253A1 DE 19732315253 DE19732315253 DE 19732315253 DE 2315253 A DE2315253 A DE 2315253A DE 2315253 A1 DE2315253 A1 DE 2315253A1
Authority
DE
Germany
Prior art keywords
temperature
substrate
zirconium
gas
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19732315253
Other languages
German (de)
English (en)
Inventor
Katsuichi Ikawa
Kazumi Iwamoto
Fumiaki Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Original Assignee
Japan Atomic Energy Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Atomic Energy Research Institute filed Critical Japan Atomic Energy Research Institute
Publication of DE2315253A1 publication Critical patent/DE2315253A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
DE19732315253 1972-06-22 1973-03-27 Verfahren zur gasphasenablagerung eines zirkoncarbid-kohlenstoff-materials Pending DE2315253A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47061820A JPS5243796B2 (ru) 1972-06-22 1972-06-22

Publications (1)

Publication Number Publication Date
DE2315253A1 true DE2315253A1 (de) 1974-01-24

Family

ID=13182087

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19732315253 Pending DE2315253A1 (de) 1972-06-22 1973-03-27 Verfahren zur gasphasenablagerung eines zirkoncarbid-kohlenstoff-materials

Country Status (2)

Country Link
JP (1) JPS5243796B2 (ru)
DE (1) DE2315253A1 (ru)

Also Published As

Publication number Publication date
JPS4922387A (ru) 1974-02-27
JPS5243796B2 (ru) 1977-11-01

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