JPS5243796B2 - - Google Patents
Info
- Publication number
- JPS5243796B2 JPS5243796B2 JP47061820A JP6182072A JPS5243796B2 JP S5243796 B2 JPS5243796 B2 JP S5243796B2 JP 47061820 A JP47061820 A JP 47061820A JP 6182072 A JP6182072 A JP 6182072A JP S5243796 B2 JPS5243796 B2 JP S5243796B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47061820A JPS5243796B2 (ru) | 1972-06-22 | 1972-06-22 | |
| DE19732315253 DE2315253A1 (de) | 1972-06-22 | 1973-03-27 | Verfahren zur gasphasenablagerung eines zirkoncarbid-kohlenstoff-materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47061820A JPS5243796B2 (ru) | 1972-06-22 | 1972-06-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4922387A JPS4922387A (ru) | 1974-02-27 |
| JPS5243796B2 true JPS5243796B2 (ru) | 1977-11-01 |
Family
ID=13182087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47061820A Expired JPS5243796B2 (ru) | 1972-06-22 | 1972-06-22 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS5243796B2 (ru) |
| DE (1) | DE2315253A1 (ru) |
-
1972
- 1972-06-22 JP JP47061820A patent/JPS5243796B2/ja not_active Expired
-
1973
- 1973-03-27 DE DE19732315253 patent/DE2315253A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4922387A (ru) | 1974-02-27 |
| DE2315253A1 (de) | 1974-01-24 |