DE2229070A1 - Verfahren zum befestigen eines halbleiterkoerpers an einem substrat - Google Patents
Verfahren zum befestigen eines halbleiterkoerpers an einem substratInfo
- Publication number
- DE2229070A1 DE2229070A1 DE2229070A DE2229070A DE2229070A1 DE 2229070 A1 DE2229070 A1 DE 2229070A1 DE 2229070 A DE2229070 A DE 2229070A DE 2229070 A DE2229070 A DE 2229070A DE 2229070 A1 DE2229070 A1 DE 2229070A1
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- intermediate layer
- pressure
- temperature
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
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- H01L2224/29001—Core members of the layer connector
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
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- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49144—Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Die Bonding (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2844971A GB1389542A (en) | 1971-06-17 | 1971-06-17 | Methods of securing a semiconductor body to a support |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2229070A1 true DE2229070A1 (de) | 1973-01-11 |
Family
ID=10275803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2229070A Withdrawn DE2229070A1 (de) | 1971-06-17 | 1972-06-15 | Verfahren zum befestigen eines halbleiterkoerpers an einem substrat |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3883946A (enExample) |
| DE (1) | DE2229070A1 (enExample) |
| FR (1) | FR2142073B1 (enExample) |
| GB (1) | GB1389542A (enExample) |
| NL (1) | NL7208027A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3413885A1 (de) * | 1983-04-16 | 1984-10-25 | Kabushiki Kaisha Toshiba, Kawasaki, Kanagawa | Halbleitervorrichtung |
| DE4220875A1 (de) * | 1992-06-25 | 1994-01-13 | Eupec Gmbh & Co Kg | Verfahren zum Verbinden eines Halbleiterkörpers mit Kontaktscheiben |
| EP3499553A1 (de) * | 2017-12-13 | 2019-06-19 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung eines mit einer lotvorform verbundenen bauelements mittels heisspressens unterhalb der schmelztemperatur des lotmaterials |
| EP3499554A1 (de) * | 2017-12-13 | 2019-06-19 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung einer sandwichanordnung aus zwei bauelementen mit dazwischen befindlichem lot mittels heisspressens unterhalb der schmelztemperatur des lotmaterials einer lotvorform |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1490125A (en) * | 1975-04-23 | 1977-10-26 | Rolls Royce | Electrophoretic method of applying a coating to a metal surface |
| US3981427A (en) * | 1975-04-28 | 1976-09-21 | Brookes Ronald R | Method of laminating graphite sheets to a metal substrate |
| US3956821A (en) * | 1975-04-28 | 1976-05-18 | Fairchild Camera And Instrument Corporation | Method of attaching semiconductor die to package substrates |
| US4181249A (en) * | 1977-08-26 | 1980-01-01 | Hughes Aircraft Company | Eutectic die attachment method for integrated circuits |
| FR2431900A1 (fr) * | 1978-07-25 | 1980-02-22 | Thomson Csf | Systeme de soudure d'un laser a semiconducteur sur un socle metallique |
| IT1210953B (it) * | 1982-11-19 | 1989-09-29 | Ates Componenti Elettron | Metodo per la saldatura di piastrine di semiconduttore su supporti di metallo non nobile. |
| GB2132601B (en) * | 1982-12-23 | 1986-08-20 | Ferranti Plc | Joining articles of materials of different expansion coefficients |
| SU1114253A1 (ru) * | 1983-02-03 | 1987-03-23 | Научно-Исследовательский Институт Производственного Объединения "Тэз Им.М.И.Калинина" | Способ изготовлени выпр мительных элементов |
| GB8323065D0 (en) * | 1983-08-26 | 1983-09-28 | Rca Corp | Flux free photo-detector soldering |
| US4582240A (en) * | 1984-02-08 | 1986-04-15 | Gould Inc. | Method for low temperature, low pressure metallic diffusion bonding of piezoelectric components |
| US4605833A (en) * | 1984-03-15 | 1986-08-12 | Westinghouse Electric Corp. | Lead bonding of integrated circuit chips |
| US4576326A (en) * | 1984-05-14 | 1986-03-18 | Rca Corporation | Method of bonding semiconductor devices to heatsinks |
| US4609139A (en) * | 1984-05-14 | 1986-09-02 | Rca Corporation | Method of burnishing malleable films on semiconductor substrates |
| US4810671A (en) * | 1986-06-12 | 1989-03-07 | Intel Corporation | Process for bonding die to substrate using a gold/silicon seed |
| US4771018A (en) * | 1986-06-12 | 1988-09-13 | Intel Corporation | Process of attaching a die to a substrate using gold/silicon seed |
| DE3782471D1 (de) * | 1986-08-18 | 1992-12-10 | Siemens Ag | Fuellschichtbauteil. |
| US4829020A (en) * | 1987-10-23 | 1989-05-09 | The United States Of America As Represented By The United States Department Of Energy | Substrate solder barriers for semiconductor epilayer growth |
| JP3579740B2 (ja) * | 1998-04-18 | 2004-10-20 | Tdk株式会社 | 電子部品の製造方法 |
| WO2001028726A1 (en) * | 1998-04-20 | 2001-04-26 | Senju Metal Industry Co., Ltd. | Solder coating material and production method therefor |
| FI108376B (fi) * | 2000-03-21 | 2002-01-15 | Outokumpu Oy | Menetelmõ sõhk÷õjohtavan liitoksen muodostamiseksi |
| KR100387488B1 (ko) * | 2001-04-25 | 2003-06-18 | 현대자동차주식회사 | 레이저 클래딩 공법을 이용한 밸브 시트 제조방법 |
| JP2003209144A (ja) * | 2002-01-16 | 2003-07-25 | Seiko Epson Corp | 半導体装置及びその製造方法、半導体装置の製造装置並びに電子機器 |
| US7436058B2 (en) * | 2002-05-09 | 2008-10-14 | Intel Corporation | Reactive solder material |
| US9214442B2 (en) | 2007-03-19 | 2015-12-15 | Infineon Technologies Ag | Power semiconductor module, method for producing a power semiconductor module, and semiconductor chip |
| US8587116B2 (en) | 2010-09-30 | 2013-11-19 | Infineon Technologies Ag | Semiconductor module comprising an insert |
| CN103305909B (zh) * | 2012-03-14 | 2016-01-20 | 东莞市中镓半导体科技有限公司 | 一种用于GaN生长的复合衬底的制备方法 |
| US10596782B2 (en) * | 2015-06-04 | 2020-03-24 | Sumitomo Electric Industries, Ltd. | Substrate for printed circuit board and printed circuit board |
| CN106735982A (zh) * | 2016-12-09 | 2017-05-31 | 徐超 | 一种电机绕组引线与绕组间电磁线连接方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL275554A (enExample) * | 1961-04-19 | 1900-01-01 | ||
| NL283249A (enExample) * | 1961-09-19 | 1900-01-01 | ||
| US3333324A (en) * | 1964-09-28 | 1967-08-01 | Rca Corp | Method of manufacturing semiconductor devices |
| GB1199955A (en) * | 1967-07-07 | 1970-07-22 | Mullard Ltd | Improvements in or relating to Methods of Manufacturing Semiconductor Devices |
| GB1256518A (enExample) * | 1968-11-30 | 1971-12-08 | ||
| GB1297046A (enExample) * | 1969-08-25 | 1972-11-22 | ||
| GB1374626A (en) * | 1970-10-30 | 1974-11-20 | Matsushita Electronics Corp | Method of making a semiconductor device |
-
1971
- 1971-06-17 GB GB2844971A patent/GB1389542A/en not_active Expired
-
1972
- 1972-06-13 US US262342A patent/US3883946A/en not_active Expired - Lifetime
- 1972-06-13 NL NL7208027A patent/NL7208027A/xx unknown
- 1972-06-15 DE DE2229070A patent/DE2229070A1/de not_active Withdrawn
- 1972-06-19 FR FR7222016A patent/FR2142073B1/fr not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3413885A1 (de) * | 1983-04-16 | 1984-10-25 | Kabushiki Kaisha Toshiba, Kawasaki, Kanagawa | Halbleitervorrichtung |
| DE4220875A1 (de) * | 1992-06-25 | 1994-01-13 | Eupec Gmbh & Co Kg | Verfahren zum Verbinden eines Halbleiterkörpers mit Kontaktscheiben |
| EP3499553A1 (de) * | 2017-12-13 | 2019-06-19 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung eines mit einer lotvorform verbundenen bauelements mittels heisspressens unterhalb der schmelztemperatur des lotmaterials |
| EP3499554A1 (de) * | 2017-12-13 | 2019-06-19 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung einer sandwichanordnung aus zwei bauelementen mit dazwischen befindlichem lot mittels heisspressens unterhalb der schmelztemperatur des lotmaterials einer lotvorform |
| WO2019115077A1 (de) * | 2017-12-13 | 2019-06-20 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung eines mit einer lotvorform verbundenen bauelements |
| WO2019115081A1 (de) * | 2017-12-13 | 2019-06-20 | Heraeus Deutschland GmbH & Co. KG | Verfahren zur herstellung einer festen sandwichanordnung aus zwei bauelementen mit dazwischen befindlichem lot |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7208027A (enExample) | 1972-12-19 |
| GB1389542A (en) | 1975-04-03 |
| US3883946A (en) | 1975-05-20 |
| FR2142073B1 (enExample) | 1977-12-23 |
| FR2142073A1 (enExample) | 1973-01-26 |
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