DE1590786B1 - Verfahren zur Herstellung von Mikro-Miniatur-Schaltungen bzw.Schaltungsbauelementen - Google Patents

Verfahren zur Herstellung von Mikro-Miniatur-Schaltungen bzw.Schaltungsbauelementen

Info

Publication number
DE1590786B1
DE1590786B1 DE1965U0011512 DEU0011512A DE1590786B1 DE 1590786 B1 DE1590786 B1 DE 1590786B1 DE 1965U0011512 DE1965U0011512 DE 1965U0011512 DE U0011512 A DEU0011512 A DE U0011512A DE 1590786 B1 DE1590786 B1 DE 1590786B1
Authority
DE
Germany
Prior art keywords
aluminum
metals
tantalum
cathode
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE1965U0011512
Other languages
German (de)
English (en)
Inventor
Duckworth Roger George
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Electronics Ltd
Original Assignee
Ultra Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Electronics Ltd filed Critical Ultra Electronics Ltd
Publication of DE1590786B1 publication Critical patent/DE1590786B1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G7/00—Botany in general
    • A01G7/02—Treatment of plants with carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/50—Carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D99/00—Subject matter not provided for in other groups of this subclass
    • F23D99/002—Burners specially adapted for specific applications
    • F23D99/004—Burners specially adapted for specific applications for use in particular heating operations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2206/00—Burners for specific applications
    • F23D2206/0094—Gas burners adapted for use in illumination and heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Environmental Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Combustion & Propulsion (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Botany (AREA)
  • Ecology (AREA)
  • Forests & Forestry (AREA)
  • General Engineering & Computer Science (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Conductive Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Surface Treatment Of Glass (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
DE1965U0011512 1964-03-11 1965-03-09 Verfahren zur Herstellung von Mikro-Miniatur-Schaltungen bzw.Schaltungsbauelementen Withdrawn DE1590786B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB10180/64A GB1067831A (en) 1964-03-11 1964-03-11 Improvements in thin film circuits

Publications (1)

Publication Number Publication Date
DE1590786B1 true DE1590786B1 (de) 1971-01-07

Family

ID=9963030

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1965U0011512 Withdrawn DE1590786B1 (de) 1964-03-11 1965-03-09 Verfahren zur Herstellung von Mikro-Miniatur-Schaltungen bzw.Schaltungsbauelementen

Country Status (8)

Country Link
JP (1) JPS517825B1 (enrdf_load_stackoverflow)
BE (1) BE682874A (enrdf_load_stackoverflow)
CH (1) CH438441A (enrdf_load_stackoverflow)
DE (1) DE1590786B1 (enrdf_load_stackoverflow)
FR (1) FR1428353A (enrdf_load_stackoverflow)
GB (1) GB1067831A (enrdf_load_stackoverflow)
NL (1) NL6502933A (enrdf_load_stackoverflow)
SE (1) SE329427B (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3627577A (en) * 1968-05-22 1971-12-14 Bell Telephone Labor Inc Thin film resistors
US3784951A (en) * 1968-05-22 1974-01-08 Bell Telephone Labor Inc Thin film resistors
US3641402A (en) * 1969-12-30 1972-02-08 Ibm Semiconductor device with beta tantalum-gold composite conductor metallurgy
US3737343A (en) * 1971-04-19 1973-06-05 Bell Telephone Labor Inc Technique for the preparation of ion implanted tantalum-aluminum alloy
BE793097A (fr) * 1971-12-30 1973-04-16 Western Electric Co Procede pour ajuster le coefficient de resistance en fonction de la temperature d'alliages tantale-aluminium
US4382977A (en) * 1982-01-11 1983-05-10 The United States Of America As Represented By The Secretary Of The Army Method of producing smooth metallic layers on a substrate
DE3480243D1 (en) * 1983-03-31 1989-11-23 Matsushita Electric Ind Co Ltd Method of manufacturing thin-film integrated devices

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1266026A (fr) * 1959-06-30 1961-07-07 Balzers Hochvakuum Procédé pour améliorer la conductivité électrique de couches minces non métalliques appliquées sur un support
DE1119357B (de) * 1956-02-27 1961-12-14 Union Carbide Corp Verfahren zur Herstellung einer elektrisch leitenden, lichtdurchlaessigen Schicht auf einem beliebigen Traegermaterial

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1119357B (de) * 1956-02-27 1961-12-14 Union Carbide Corp Verfahren zur Herstellung einer elektrisch leitenden, lichtdurchlaessigen Schicht auf einem beliebigen Traegermaterial
FR1266026A (fr) * 1959-06-30 1961-07-07 Balzers Hochvakuum Procédé pour améliorer la conductivité électrique de couches minces non métalliques appliquées sur un support

Also Published As

Publication number Publication date
NL6502933A (enrdf_load_stackoverflow) 1965-09-13
JPS517825B1 (enrdf_load_stackoverflow) 1976-03-11
CH438441A (fr) 1967-06-30
SE329427B (enrdf_load_stackoverflow) 1970-10-12
GB1067831A (en) 1967-05-03
FR1428353A (fr) 1966-02-11
BE682874A (enrdf_load_stackoverflow) 1966-12-01

Similar Documents

Publication Publication Date Title
DE1490927C3 (de) Verfahren zur Herstellung eines Schicht Widerstandselementes unter Verwendung von Tantalmtnd
DE3941046C2 (enrdf_load_stackoverflow)
DE4117518C2 (de) Vorrichtung zum Sputtern mit bewegtem, insbesondere rotierendem Target
DE1246072B (de) Verfahren zur Herstellung einer Schaltung mit Widerstands- und Kondensatorelementen
DE1465702A1 (de) Verfahren zur Haltbarmachung eines schwer schmelzbaren duennschichtigen Metallwiderstandes
DE1590768C3 (de) Verfahren zur Herstellung einer zusammenhängenden dünnen, metalleitenden Widerstandsschicht auf einem isolierenden Tragkörper
DE1590786B1 (de) Verfahren zur Herstellung von Mikro-Miniatur-Schaltungen bzw.Schaltungsbauelementen
DE3601439C1 (de) Schichtverbundwerkstoff,insbesondere fuer Gleit- und Reibelemente,sowie Verfahren zu seiner Herstellung
DE2361804C2 (de) Verfahren zur Herstellung von supraleitenden Kontakten in Tieftemperatur-Schaltkreisen und Anwendung des Verfahrens bei der Herstellung von Tieftemperatur-Schaltkreisen mit Josephson-Elementen
DE2063580C2 (de) Verfahren zum Aufbringen einer transparenten, elektrisch leitfähigen Indiumoxidschicht
DE919360C (de) Selen-Gleichrichter mit Tellur und Verfahren zu seiner Herstellung
DE1204738B (de) Elektrischer Schichtwiderstand
DE1590786C (de) Verfahren zur Herstellung von Mikro Miniatur Schaltungen bzw Schaltungsbauele menten
DE1665426A1 (de) Ohmscher Widerstand und Verfahren zu seiner Herstellung
DE2461096C3 (de) Verfahren zur Herstellung eines Dunnschichtwiderstandes
DE2032639C3 (de) Verfahren zum Niederschlagen einer dünnen Goldschicht auf einem Träger durch Kathodenzerstäubung
WO2017127859A1 (de) Verfahren zur abscheidung einer schicht auf einem gleitlagerelementrohling
DE812379C (de) Verfahren zur Herstellung duenner zusammenhaengender Oberflaechen-schichten aus Edelmetall, insbesondere aus Silber und Gold
DE900971C (de) Elektrischer Kondensator aus metallisierten Dielektrikumsbaendern
DE2323988A1 (de) Verfahren zur abscheidung sehr duenner metallischer schichten
DE1058805B (de) Verfahren zum Herstellen durchscheinender und elektrisch leitender Goldueberzuege
DE1195135B (de) Verfahren zur Verbesserung der elektrischen Leitfaehigkeit von auf Unterlagen, wie Glas und Kunststoffen, insbesondere durch Vakuum-bedampfen aufgebrachten duennen, licht-durchlaessigen oxydischen Schichten
DE1923317B2 (de) Verfahren zum Niederschlagen von Kontaktmaterial auf einen Halbleiterkörper
DE1564821C (de) Elektrischer Kondensator
DE2540999B2 (de) Elektrischer Steckkontakt mit einer Kontaktschicht aus einer Silber-Palladium-Legierung

Legal Events

Date Code Title Description
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee