GB1067831A - Improvements in thin film circuits - Google Patents

Improvements in thin film circuits

Info

Publication number
GB1067831A
GB1067831A GB10180/64A GB1018064A GB1067831A GB 1067831 A GB1067831 A GB 1067831A GB 10180/64 A GB10180/64 A GB 10180/64A GB 1018064 A GB1018064 A GB 1018064A GB 1067831 A GB1067831 A GB 1067831A
Authority
GB
United Kingdom
Prior art keywords
thin film
film circuits
ring
circuits
tantalide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB10180/64A
Other languages
English (en)
Inventor
Roger George Duck Worth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Electronics Ltd
Original Assignee
Ultra Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Electronics Ltd filed Critical Ultra Electronics Ltd
Priority to GB10180/64A priority Critical patent/GB1067831A/en
Priority to NL6502933A priority patent/NL6502933A/xx
Priority to DE1965U0011512 priority patent/DE1590786B1/de
Priority to FR8622A priority patent/FR1428353A/fr
Priority to SE03132/65A priority patent/SE329427B/xx
Priority to CH338565A priority patent/CH438441A/fr
Priority to JP40014233A priority patent/JPS517825B1/ja
Priority to BE682874D priority patent/BE682874A/xx
Publication of GB1067831A publication Critical patent/GB1067831A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G7/00—Botany in general
    • A01G7/02—Treatment of plants with carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/50—Carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D99/00—Subject matter not provided for in other groups of this subclass
    • F23D99/002—Burners specially adapted for specific applications
    • F23D99/004—Burners specially adapted for specific applications for use in particular heating operations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2206/00—Burners for specific applications
    • F23D2206/0094—Gas burners adapted for use in illumination and heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Environmental Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Combustion & Propulsion (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Botany (AREA)
  • Ecology (AREA)
  • Forests & Forestry (AREA)
  • General Engineering & Computer Science (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Conductive Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Surface Treatment Of Glass (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
GB10180/64A 1964-03-11 1964-03-11 Improvements in thin film circuits Expired GB1067831A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB10180/64A GB1067831A (en) 1964-03-11 1964-03-11 Improvements in thin film circuits
NL6502933A NL6502933A (enrdf_load_stackoverflow) 1964-03-11 1965-03-08
DE1965U0011512 DE1590786B1 (de) 1964-03-11 1965-03-09 Verfahren zur Herstellung von Mikro-Miniatur-Schaltungen bzw.Schaltungsbauelementen
FR8622A FR1428353A (fr) 1964-03-11 1965-03-10 Procédé de fabrication de circuits ou d'éléments de circuits micro-miniaturisés
SE03132/65A SE329427B (enrdf_load_stackoverflow) 1964-03-11 1965-03-10
CH338565A CH438441A (fr) 1964-03-11 1965-03-11 Procédé de fabrication d'un circuit microminiature ou au moins d'un élément de circuit
JP40014233A JPS517825B1 (enrdf_load_stackoverflow) 1964-03-11 1965-03-11
BE682874D BE682874A (enrdf_load_stackoverflow) 1964-03-11 1966-06-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB10180/64A GB1067831A (en) 1964-03-11 1964-03-11 Improvements in thin film circuits

Publications (1)

Publication Number Publication Date
GB1067831A true GB1067831A (en) 1967-05-03

Family

ID=9963030

Family Applications (1)

Application Number Title Priority Date Filing Date
GB10180/64A Expired GB1067831A (en) 1964-03-11 1964-03-11 Improvements in thin film circuits

Country Status (8)

Country Link
JP (1) JPS517825B1 (enrdf_load_stackoverflow)
BE (1) BE682874A (enrdf_load_stackoverflow)
CH (1) CH438441A (enrdf_load_stackoverflow)
DE (1) DE1590786B1 (enrdf_load_stackoverflow)
FR (1) FR1428353A (enrdf_load_stackoverflow)
GB (1) GB1067831A (enrdf_load_stackoverflow)
NL (1) NL6502933A (enrdf_load_stackoverflow)
SE (1) SE329427B (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3627577A (en) * 1968-05-22 1971-12-14 Bell Telephone Labor Inc Thin film resistors
DE2262022A1 (de) * 1971-12-30 1973-07-05 Western Electric Co Verfahren zur einstellung des widerstands-temperaturkoeffizienten
US3784951A (en) * 1968-05-22 1974-01-08 Bell Telephone Labor Inc Thin film resistors
US4382977A (en) * 1982-01-11 1983-05-10 The United States Of America As Represented By The Secretary Of The Army Method of producing smooth metallic layers on a substrate

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3641402A (en) * 1969-12-30 1972-02-08 Ibm Semiconductor device with beta tantalum-gold composite conductor metallurgy
US3737343A (en) * 1971-04-19 1973-06-05 Bell Telephone Labor Inc Technique for the preparation of ion implanted tantalum-aluminum alloy
DE3480243D1 (en) * 1983-03-31 1989-11-23 Matsushita Electric Ind Co Ltd Method of manufacturing thin-film integrated devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1119357B (de) * 1956-02-27 1961-12-14 Union Carbide Corp Verfahren zur Herstellung einer elektrisch leitenden, lichtdurchlaessigen Schicht auf einem beliebigen Traegermaterial
NL253260A (enrdf_load_stackoverflow) * 1959-06-30

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3627577A (en) * 1968-05-22 1971-12-14 Bell Telephone Labor Inc Thin film resistors
US3784951A (en) * 1968-05-22 1974-01-08 Bell Telephone Labor Inc Thin film resistors
JPS524752B1 (enrdf_load_stackoverflow) * 1968-05-22 1977-02-07
DE2262022A1 (de) * 1971-12-30 1973-07-05 Western Electric Co Verfahren zur einstellung des widerstands-temperaturkoeffizienten
US4382977A (en) * 1982-01-11 1983-05-10 The United States Of America As Represented By The Secretary Of The Army Method of producing smooth metallic layers on a substrate

Also Published As

Publication number Publication date
NL6502933A (enrdf_load_stackoverflow) 1965-09-13
JPS517825B1 (enrdf_load_stackoverflow) 1976-03-11
CH438441A (fr) 1967-06-30
SE329427B (enrdf_load_stackoverflow) 1970-10-12
FR1428353A (fr) 1966-02-11
DE1590786B1 (de) 1971-01-07
BE682874A (enrdf_load_stackoverflow) 1966-12-01

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