CA817414A - Sputtering processes for depositing thin films - Google Patents

Sputtering processes for depositing thin films

Info

Publication number
CA817414A
CA817414A CA817414A CA817414DA CA817414A CA 817414 A CA817414 A CA 817414A CA 817414 A CA817414 A CA 817414A CA 817414D A CA817414D A CA 817414DA CA 817414 A CA817414 A CA 817414A
Authority
CA
Canada
Prior art keywords
thin films
depositing thin
sputtering processes
sputtering
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA817414A
Inventor
Stern Emanuel
L. Caswell Hollis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA817414A publication Critical patent/CA817414A/en
Expired legal-status Critical Current

Links

CA817414A Sputtering processes for depositing thin films Expired CA817414A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA817414T

Publications (1)

Publication Number Publication Date
CA817414A true CA817414A (en) 1969-07-08

Family

ID=36289949

Family Applications (1)

Application Number Title Priority Date Filing Date
CA817414A Expired CA817414A (en) Sputtering processes for depositing thin films

Country Status (1)

Country Link
CA (1) CA817414A (en)

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