CA997228A - Deposition of films - Google Patents
Deposition of filmsInfo
- Publication number
- CA997228A CA997228A CA179,634A CA174634A CA997228A CA 997228 A CA997228 A CA 997228A CA 174634 A CA174634 A CA 174634A CA 997228 A CA997228 A CA 997228A
- Authority
- CA
- Canada
- Prior art keywords
- films
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26677272A | 1972-06-27 | 1972-06-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA997228A true CA997228A (en) | 1976-09-21 |
Family
ID=23015944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA179,634A Expired CA997228A (en) | 1972-06-27 | 1973-06-21 | Deposition of films |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS4952734A (en) |
CA (1) | CA997228A (en) |
DE (1) | DE2332020A1 (en) |
FR (1) | FR2190947A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19503589A1 (en) * | 1995-02-03 | 1996-08-08 | Bosch Siemens Hausgeraete | Water supply device for a water-bearing household appliance |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2482329A (en) * | 1946-05-27 | 1949-09-20 | Rca Corp | Apparatus for selective vapor coating |
NL291466A (en) * | 1962-04-13 | |||
US3554512A (en) * | 1969-03-24 | 1971-01-12 | George H Elliott | Crucible for holding molten semiconductor materials |
US3667424A (en) * | 1969-04-14 | 1972-06-06 | Stanford Research Inst | Multi-station vacuum apparatus |
-
1973
- 1973-06-21 CA CA179,634A patent/CA997228A/en not_active Expired
- 1973-06-23 DE DE19732332020 patent/DE2332020A1/en active Pending
- 1973-06-26 FR FR7323240A patent/FR2190947A1/en active Granted
- 1973-06-27 JP JP7274873A patent/JPS4952734A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
FR2190947B1 (en) | 1977-05-13 |
JPS4952734A (en) | 1974-05-22 |
DE2332020A1 (en) | 1974-01-10 |
FR2190947A1 (en) | 1974-02-01 |
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