CA784701A - Deposition of thin films by cathodic sputtering - Google Patents

Deposition of thin films by cathodic sputtering

Info

Publication number
CA784701A
CA784701A CA784701A CA784701DA CA784701A CA 784701 A CA784701 A CA 784701A CA 784701 A CA784701 A CA 784701A CA 784701D A CA784701D A CA 784701DA CA 784701 A CA784701 A CA 784701A
Authority
CA
Canada
Prior art keywords
deposition
thin films
cathodic sputtering
cathodic
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA784701A
Inventor
I. Bertelsen Bruce
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA784701A publication Critical patent/CA784701A/en
Expired legal-status Critical Current

Links

CA784701A Deposition of thin films by cathodic sputtering Expired CA784701A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA784701T

Publications (1)

Publication Number Publication Date
CA784701A true CA784701A (en) 1968-05-07

Family

ID=36247370

Family Applications (1)

Application Number Title Priority Date Filing Date
CA784701A Expired CA784701A (en) Deposition of thin films by cathodic sputtering

Country Status (1)

Country Link
CA (1) CA784701A (en)

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