CA748835A - Method of depositing very thin films - Google Patents

Method of depositing very thin films

Info

Publication number
CA748835A
CA748835A CA748835A CA748835DA CA748835A CA 748835 A CA748835 A CA 748835A CA 748835 A CA748835 A CA 748835A CA 748835D A CA748835D A CA 748835DA CA 748835 A CA748835 A CA 748835A
Authority
CA
Canada
Prior art keywords
depositing
thin films
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA748835A
Inventor
L. Caswell Hollis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA748835A publication Critical patent/CA748835A/en
Expired legal-status Critical Current

Links

CA748835A Method of depositing very thin films Expired CA748835A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA748835T

Publications (1)

Publication Number Publication Date
CA748835A true CA748835A (en) 1966-12-20

Family

ID=36183197

Family Applications (1)

Application Number Title Priority Date Filing Date
CA748835A Expired CA748835A (en) Method of depositing very thin films

Country Status (1)

Country Link
CA (1) CA748835A (en)

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