AU421616B2 - Deposition of insulating films - Google Patents

Deposition of insulating films

Info

Publication number
AU421616B2
AU421616B2 AU2862/66A AU286266A AU421616B2 AU 421616 B2 AU421616 B2 AU 421616B2 AU 2862/66 A AU2862/66 A AU 2862/66A AU 286266 A AU286266 A AU 286266A AU 421616 B2 AU421616 B2 AU 421616B2
Authority
AU
Australia
Prior art keywords
deposition
insulating films
films
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU2862/66A
Other versions
AU286266A (en
Inventor
Raymond Nzenza Joseph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of AU286266A publication Critical patent/AU286266A/en
Publication of AU421616B2 publication Critical patent/AU421616B2/en
Expired legal-status Critical Current

Links

AU2862/66A 1965-03-29 1966-03-14 Deposition of insulating films Expired AU421616B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS446,470 1965-03-29

Publications (2)

Publication Number Publication Date
AU286266A AU286266A (en) 1967-09-14
AU421616B2 true AU421616B2 (en) 1967-09-14

Family

ID=

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