AU409303B2 - Tantalum films of unique structure - Google Patents

Tantalum films of unique structure

Info

Publication number
AU409303B2
AU409303B2 AU3147/66A AU314766A AU409303B2 AU 409303 B2 AU409303 B2 AU 409303B2 AU 3147/66 A AU3147/66 A AU 3147/66A AU 314766 A AU314766 A AU 314766A AU 409303 B2 AU409303 B2 AU 409303B2
Authority
AU
Australia
Prior art keywords
unique structure
tantalum films
tantalum
films
unique
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU3147/66A
Other versions
AU314766A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of AU409303B2 publication Critical patent/AU409303B2/en
Publication of AU314766A publication Critical patent/AU314766A/en
Expired legal-status Critical Current

Links

AU3147/66A 1965-04-05 1966-03-21 Tantalum films of unique structure Expired AU409303B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS448553 1965-04-05

Publications (2)

Publication Number Publication Date
AU409303B2 true AU409303B2 (en) 1967-09-21
AU314766A AU314766A (en) 1967-09-21

Family

ID=

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