CA783037A - Deposition of thin film by impact evaporation - Google Patents

Deposition of thin film by impact evaporation

Info

Publication number
CA783037A
CA783037A CA783037A CA783037DA CA783037A CA 783037 A CA783037 A CA 783037A CA 783037 A CA783037 A CA 783037A CA 783037D A CA783037D A CA 783037DA CA 783037 A CA783037 A CA 783037A
Authority
CA
Canada
Prior art keywords
deposition
thin film
impact evaporation
evaporation
impact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA783037A
Inventor
Kay Eric
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA783037A publication Critical patent/CA783037A/en
Expired legal-status Critical Current

Links

CA783037A Deposition of thin film by impact evaporation Expired CA783037A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA783037T

Publications (1)

Publication Number Publication Date
CA783037A true CA783037A (en) 1968-04-16

Family

ID=36245711

Family Applications (1)

Application Number Title Priority Date Filing Date
CA783037A Expired CA783037A (en) Deposition of thin film by impact evaporation

Country Status (1)

Country Link
CA (1) CA783037A (en)

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