CA785269A - Magnetic control of film deposition - Google Patents

Magnetic control of film deposition

Info

Publication number
CA785269A
CA785269A CA785269A CA785269DA CA785269A CA 785269 A CA785269 A CA 785269A CA 785269 A CA785269 A CA 785269A CA 785269D A CA785269D A CA 785269DA CA 785269 A CA785269 A CA 785269A
Authority
CA
Canada
Prior art keywords
film deposition
magnetic control
magnetic
control
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA785269A
Inventor
Kay Eric
P. Poenisch Arthur
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA785269A publication Critical patent/CA785269A/en
Expired legal-status Critical Current

Links

CA785269A Magnetic control of film deposition Expired CA785269A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA785269T

Publications (1)

Publication Number Publication Date
CA785269A true CA785269A (en) 1968-05-14

Family

ID=36247936

Family Applications (1)

Application Number Title Priority Date Filing Date
CA785269A Expired CA785269A (en) Magnetic control of film deposition

Country Status (1)

Country Link
CA (1) CA785269A (en)

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