AU416173B2 - Apparatus for surface coating by deposition of coating materials in vacuo by thermal evaporation or cathodic sputtering - Google Patents

Apparatus for surface coating by deposition of coating materials in vacuo by thermal evaporation or cathodic sputtering

Info

Publication number
AU416173B2
AU416173B2 AU27551/67A AU2755167A AU416173B2 AU 416173 B2 AU416173 B2 AU 416173B2 AU 27551/67 A AU27551/67 A AU 27551/67A AU 2755167 A AU2755167 A AU 2755167A AU 416173 B2 AU416173 B2 AU 416173B2
Authority
AU
Australia
Prior art keywords
vacuo
deposition
thermal evaporation
coating
cathodic sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU27551/67A
Other versions
AU2755167A (en
Inventor
Callez Pierre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Glass Europe SA
Original Assignee
Glaverbel Belgium SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glaverbel Belgium SA filed Critical Glaverbel Belgium SA
Application granted granted Critical
Publication of AU416173B2 publication Critical patent/AU416173B2/en
Publication of AU2755167A publication Critical patent/AU2755167A/en
Expired legal-status Critical Current

Links

AU27551/67A 1966-10-05 1967-09-21 Apparatus for surface coating by deposition of coating materials in vacuo by thermal evaporation or cathodic sputtering Expired AU416173B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LULU52106 1966-10-05

Publications (2)

Publication Number Publication Date
AU416173B2 true AU416173B2 (en) 1971-08-16
AU2755167A AU2755167A (en) 1971-08-16

Family

ID=

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