CH438441A - Procédé de fabrication d'un circuit microminiature ou au moins d'un élément de circuit - Google Patents
Procédé de fabrication d'un circuit microminiature ou au moins d'un élément de circuitInfo
- Publication number
- CH438441A CH438441A CH338565A CH338565A CH438441A CH 438441 A CH438441 A CH 438441A CH 338565 A CH338565 A CH 338565A CH 338565 A CH338565 A CH 338565A CH 438441 A CH438441 A CH 438441A
- Authority
- CH
- Switzerland
- Prior art keywords
- circuit
- manufacturing
- microminiature
- circuit element
- microminiature circuit
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
- A01G7/00—Botany in general
- A01G7/02—Treatment of plants with carbon dioxide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/50—Carbon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D91/00—Burners specially adapted for specific applications, not otherwise provided for
- F23D91/02—Burners specially adapted for specific applications, not otherwise provided for for use in particular heating operations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2206/00—Burners for specific applications
- F23D2206/0094—Gas burners adapted for use in illumination and heating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Botany (AREA)
- General Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Biodiversity & Conservation Biology (AREA)
- Inorganic Chemistry (AREA)
- Ecology (AREA)
- Forests & Forestry (AREA)
- Environmental Sciences (AREA)
- Combustion & Propulsion (AREA)
- Metallurgy (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Conductive Materials (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB10180/64A GB1067831A (en) | 1964-03-11 | 1964-03-11 | Improvements in thin film circuits |
Publications (1)
Publication Number | Publication Date |
---|---|
CH438441A true CH438441A (fr) | 1967-06-30 |
Family
ID=9963030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH338565A CH438441A (fr) | 1964-03-11 | 1965-03-11 | Procédé de fabrication d'un circuit microminiature ou au moins d'un élément de circuit |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS517825B1 (fr) |
BE (1) | BE682874A (fr) |
CH (1) | CH438441A (fr) |
DE (1) | DE1590786B1 (fr) |
FR (1) | FR1428353A (fr) |
GB (1) | GB1067831A (fr) |
NL (1) | NL6502933A (fr) |
SE (1) | SE329427B (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3784951A (en) * | 1968-05-22 | 1974-01-08 | Bell Telephone Labor Inc | Thin film resistors |
US3627577A (en) * | 1968-05-22 | 1971-12-14 | Bell Telephone Labor Inc | Thin film resistors |
US3641402A (en) * | 1969-12-30 | 1972-02-08 | Ibm | Semiconductor device with beta tantalum-gold composite conductor metallurgy |
US3737343A (en) * | 1971-04-19 | 1973-06-05 | Bell Telephone Labor Inc | Technique for the preparation of ion implanted tantalum-aluminum alloy |
BE793097A (fr) * | 1971-12-30 | 1973-04-16 | Western Electric Co | Procede pour ajuster le coefficient de resistance en fonction de la temperature d'alliages tantale-aluminium |
US4382977A (en) * | 1982-01-11 | 1983-05-10 | The United States Of America As Represented By The Secretary Of The Army | Method of producing smooth metallic layers on a substrate |
DE3480243D1 (en) * | 1983-03-31 | 1989-11-23 | Matsushita Electric Ind Co Ltd | Method of manufacturing thin-film integrated devices |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1119357B (de) * | 1956-02-27 | 1961-12-14 | Union Carbide Corp | Verfahren zur Herstellung einer elektrisch leitenden, lichtdurchlaessigen Schicht auf einem beliebigen Traegermaterial |
NL253260A (fr) * | 1959-06-30 |
-
1964
- 1964-03-11 GB GB10180/64A patent/GB1067831A/en not_active Expired
-
1965
- 1965-03-08 NL NL6502933A patent/NL6502933A/xx unknown
- 1965-03-09 DE DE1965U0011512 patent/DE1590786B1/de not_active Withdrawn
- 1965-03-10 SE SE03132/65A patent/SE329427B/xx unknown
- 1965-03-10 FR FR8622A patent/FR1428353A/fr not_active Expired
- 1965-03-11 JP JP40014233A patent/JPS517825B1/ja active Pending
- 1965-03-11 CH CH338565A patent/CH438441A/fr unknown
-
1966
- 1966-06-21 BE BE682874D patent/BE682874A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
DE1590786B1 (de) | 1971-01-07 |
SE329427B (fr) | 1970-10-12 |
JPS517825B1 (fr) | 1976-03-11 |
NL6502933A (fr) | 1965-09-13 |
BE682874A (fr) | 1966-12-01 |
FR1428353A (fr) | 1966-02-11 |
GB1067831A (en) | 1967-05-03 |
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