FR1428353A - Procédé de fabrication de circuits ou d'éléments de circuits micro-miniaturisés - Google Patents

Procédé de fabrication de circuits ou d'éléments de circuits micro-miniaturisés

Info

Publication number
FR1428353A
FR1428353A FR8622A FR8622A FR1428353A FR 1428353 A FR1428353 A FR 1428353A FR 8622 A FR8622 A FR 8622A FR 8622 A FR8622 A FR 8622A FR 1428353 A FR1428353 A FR 1428353A
Authority
FR
France
Prior art keywords
micro
circuit elements
miniaturized circuit
manufacturing circuits
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8622A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ultra Electronics Ltd
Original Assignee
Ultra Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ultra Electronics Ltd filed Critical Ultra Electronics Ltd
Application granted granted Critical
Publication of FR1428353A publication Critical patent/FR1428353A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
    • A01G7/00—Botany in general
    • A01G7/02—Treatment of plants with carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/50—Carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D91/00—Burners specially adapted for specific applications, not otherwise provided for
    • F23D91/02—Burners specially adapted for specific applications, not otherwise provided for for use in particular heating operations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2206/00—Burners for specific applications
    • F23D2206/0094—Gas burners adapted for use in illumination and heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Botany (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Inorganic Chemistry (AREA)
  • Ecology (AREA)
  • Forests & Forestry (AREA)
  • Environmental Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Metallurgy (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Surface Treatment Of Glass (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Conductive Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
FR8622A 1964-03-11 1965-03-10 Procédé de fabrication de circuits ou d'éléments de circuits micro-miniaturisés Expired FR1428353A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB10180/64A GB1067831A (en) 1964-03-11 1964-03-11 Improvements in thin film circuits

Publications (1)

Publication Number Publication Date
FR1428353A true FR1428353A (fr) 1966-02-11

Family

ID=9963030

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8622A Expired FR1428353A (fr) 1964-03-11 1965-03-10 Procédé de fabrication de circuits ou d'éléments de circuits micro-miniaturisés

Country Status (8)

Country Link
JP (1) JPS517825B1 (fr)
BE (1) BE682874A (fr)
CH (1) CH438441A (fr)
DE (1) DE1590786B1 (fr)
FR (1) FR1428353A (fr)
GB (1) GB1067831A (fr)
NL (1) NL6502933A (fr)
SE (1) SE329427B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2133869A1 (fr) * 1971-04-19 1972-12-01 Western Electric Co

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3784951A (en) * 1968-05-22 1974-01-08 Bell Telephone Labor Inc Thin film resistors
US3627577A (en) * 1968-05-22 1971-12-14 Bell Telephone Labor Inc Thin film resistors
US3641402A (en) * 1969-12-30 1972-02-08 Ibm Semiconductor device with beta tantalum-gold composite conductor metallurgy
BE793097A (fr) * 1971-12-30 1973-04-16 Western Electric Co Procede pour ajuster le coefficient de resistance en fonction de la temperature d'alliages tantale-aluminium
US4382977A (en) * 1982-01-11 1983-05-10 The United States Of America As Represented By The Secretary Of The Army Method of producing smooth metallic layers on a substrate
US4602192A (en) * 1983-03-31 1986-07-22 Matsushita Electric Industrial Co., Ltd. Thin film integrated device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1119357B (de) * 1956-02-27 1961-12-14 Union Carbide Corp Verfahren zur Herstellung einer elektrisch leitenden, lichtdurchlaessigen Schicht auf einem beliebigen Traegermaterial
NL126129C (fr) * 1959-06-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2133869A1 (fr) * 1971-04-19 1972-12-01 Western Electric Co

Also Published As

Publication number Publication date
SE329427B (fr) 1970-10-12
JPS517825B1 (fr) 1976-03-11
BE682874A (fr) 1966-12-01
GB1067831A (en) 1967-05-03
NL6502933A (fr) 1965-09-13
CH438441A (fr) 1967-06-30
DE1590786B1 (de) 1971-01-07

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