DE10234690A1 - Ein Verfahren zum Verbessern der Leistungshandhabungskapazität von MEMS-Schaltern - Google Patents

Ein Verfahren zum Verbessern der Leistungshandhabungskapazität von MEMS-Schaltern

Info

Publication number
DE10234690A1
DE10234690A1 DE10234690A DE10234690A DE10234690A1 DE 10234690 A1 DE10234690 A1 DE 10234690A1 DE 10234690 A DE10234690 A DE 10234690A DE 10234690 A DE10234690 A DE 10234690A DE 10234690 A1 DE10234690 A1 DE 10234690A1
Authority
DE
Germany
Prior art keywords
electromagnetic switch
micromachined
switch
plate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10234690A
Other languages
German (de)
English (en)
Inventor
Marvin Glenn Wong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE10234690A1 publication Critical patent/DE10234690A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/52—Cooling of switch parts

Landscapes

  • Micromachines (AREA)
DE10234690A 2001-10-31 2002-07-30 Ein Verfahren zum Verbessern der Leistungshandhabungskapazität von MEMS-Schaltern Withdrawn DE10234690A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/004,032 US20030080839A1 (en) 2001-10-31 2001-10-31 Method for improving the power handling capacity of MEMS switches

Publications (1)

Publication Number Publication Date
DE10234690A1 true DE10234690A1 (de) 2003-05-22

Family

ID=21708793

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10234690A Withdrawn DE10234690A1 (de) 2001-10-31 2002-07-30 Ein Verfahren zum Verbessern der Leistungshandhabungskapazität von MEMS-Schaltern

Country Status (5)

Country Link
US (2) US20030080839A1 (enExample)
JP (1) JP2003203549A (enExample)
DE (1) DE10234690A1 (enExample)
GB (1) GB2385985B (enExample)
TW (1) TW546672B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101891140B (zh) * 2006-10-24 2012-12-12 精工爱普生株式会社 Mems器件

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WO2002073673A1 (en) * 2001-03-13 2002-09-19 Rochester Institute Of Technology A micro-electro-mechanical switch and a method of using and making thereof
AU2002303933A1 (en) * 2001-05-31 2002-12-09 Rochester Institute Of Technology Fluidic valves, agitators, and pumps and methods thereof
US7211923B2 (en) * 2001-10-26 2007-05-01 Nth Tech Corporation Rotational motion based, electrostatic power source and methods thereof
US7378775B2 (en) * 2001-10-26 2008-05-27 Nth Tech Corporation Motion based, electrostatic power source and methods thereof
US20030080839A1 (en) * 2001-10-31 2003-05-01 Wong Marvin Glenn Method for improving the power handling capacity of MEMS switches
US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
US6850133B2 (en) * 2002-08-14 2005-02-01 Intel Corporation Electrode configuration in a MEMS switch
EP1556877B1 (en) * 2002-10-25 2007-01-24 Analog Devices, Inc. A micromachined relay with inorganic insulation
US20060232365A1 (en) * 2002-10-25 2006-10-19 Sumit Majumder Micro-machined relay
FR2858459B1 (fr) * 2003-08-01 2006-03-10 Commissariat Energie Atomique Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
US7287328B2 (en) * 2003-08-29 2007-10-30 Rochester Institute Of Technology Methods for distributed electrode injection
US7217582B2 (en) 2003-08-29 2007-05-15 Rochester Institute Of Technology Method for non-damaging charge injection and a system thereof
US8581308B2 (en) * 2004-02-19 2013-11-12 Rochester Institute Of Technology High temperature embedded charge devices and methods thereof
US8514169B2 (en) 2004-09-27 2013-08-20 Qualcomm Mems Technologies, Inc. Apparatus and system for writing data to electromechanical display elements
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
CN101049045B (zh) * 2004-10-27 2011-09-21 爱普科斯公司 减少mems器件中的空气阻尼
JP4791766B2 (ja) * 2005-05-30 2011-10-12 株式会社東芝 Ｍｅｍｓ技術を使用した半導体装置
JP4489651B2 (ja) * 2005-07-22 2010-06-23 株式会社日立製作所 半導体装置およびその製造方法
US20070074731A1 (en) * 2005-10-05 2007-04-05 Nth Tech Corporation Bio-implantable energy harvester systems and methods thereof
JP5202236B2 (ja) * 2007-11-13 2013-06-05 株式会社半導体エネルギー研究所 微小電気機械スイッチ及びその作製方法
JP5210901B2 (ja) 2008-02-06 2013-06-12 株式会社半導体エネルギー研究所 液晶表示装置
US8451077B2 (en) 2008-04-22 2013-05-28 International Business Machines Corporation MEMS switches with reduced switching voltage and methods of manufacture
US8405649B2 (en) 2009-03-27 2013-03-26 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
JP5877992B2 (ja) 2010-10-25 2016-03-08 株式会社半導体エネルギー研究所 表示装置
US8953120B2 (en) 2011-01-07 2015-02-10 Semiconductor Energy Laboratory Co., Ltd. Display device
CN104409286B (zh) * 2014-11-28 2016-07-06 京东方科技集团股份有限公司 一种微电子开关及有源矩阵有机发光显示装置
US10681777B2 (en) 2016-04-01 2020-06-09 Infineon Technologies Ag Light emitter devices, optical filter structures and methods for forming light emitter devices and optical filter structures
US10347814B2 (en) 2016-04-01 2019-07-09 Infineon Technologies Ag MEMS heater or emitter structure for fast heating and cooling cycles
US10955599B2 (en) 2016-04-01 2021-03-23 Infineon Technologies Ag Light emitter devices, photoacoustic gas sensors and methods for forming light emitter devices
FR3058567B1 (fr) 2016-11-08 2019-01-25 Stmicroelectronics (Rousset) Sas Circuit integre comportant une structure antifusible, et procede de realisation

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US3067279A (en) * 1958-03-31 1962-12-04 Westinghouse Electric Corp Cooling means for conducting parts
GB2095911B (en) * 1981-03-17 1985-02-13 Standard Telephones Cables Ltd Electrical switch device
US4617542A (en) * 1983-10-17 1986-10-14 Imcs Corporation High voltage switching device
JP2700991B2 (ja) * 1993-10-20 1998-01-21 日本メクトロン株式会社 静電マイクロアクチュエ−タ−
US5411077A (en) * 1994-04-11 1995-05-02 Minnesota Mining And Manufacturing Company Flexible thermal transfer apparatus for cooling electronic components
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
JPH1012757A (ja) * 1996-06-25 1998-01-16 Kokusai Electric Co Ltd マイクロパッケージ
US6404942B1 (en) * 1998-10-23 2002-06-11 Corning Incorporated Fluid-encapsulated MEMS optical switch
US6323447B1 (en) * 1998-12-30 2001-11-27 Agilent Technologies, Inc. Electrical contact breaker switch, integrated electrical contact breaker switch, and electrical contact switching method
US6160230A (en) * 1999-03-01 2000-12-12 Raytheon Company Method and apparatus for an improved single pole double throw micro-electrical mechanical switch
JP2000311572A (ja) * 1999-04-27 2000-11-07 Omron Corp 静電リレー
US6373356B1 (en) * 1999-05-21 2002-04-16 Interscience, Inc. Microelectromechanical liquid metal current carrying system, apparatus and method
US6469602B2 (en) * 1999-09-23 2002-10-22 Arizona State University Electronically switching latching micro-magnetic relay and method of operating same
WO2001052302A1 (en) * 2000-01-10 2001-07-19 Tokyo Electron Limited Segmented electrode assembly and method for plasma processing
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device
US6504118B2 (en) * 2000-10-27 2003-01-07 Daniel J Hyman Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism
EP1374267A1 (en) * 2001-03-12 2004-01-02 HRL Laboratories Torsion spring for electro-mechanical switches and a cantilever-type rf micro-electromechanical switch incorporating the torsion spring
US20030080839A1 (en) * 2001-10-31 2003-05-01 Wong Marvin Glenn Method for improving the power handling capacity of MEMS switches
US6512322B1 (en) * 2001-10-31 2003-01-28 Agilent Technologies, Inc. Longitudinal piezoelectric latching relay
US6515404B1 (en) * 2002-02-14 2003-02-04 Agilent Technologies, Inc. Bending piezoelectrically actuated liquid metal switch
US20040112727A1 (en) * 2002-12-12 2004-06-17 Wong Marvin Glenn Laser cut channel plate for a switch

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101891140B (zh) * 2006-10-24 2012-12-12 精工爱普生株式会社 Mems器件
CN102173374B (zh) * 2006-10-24 2013-01-02 精工爱普生株式会社 Mems 器件

Also Published As

Publication number Publication date
US20030080839A1 (en) 2003-05-01
GB2385985B (en) 2005-08-17
GB2385985A (en) 2003-09-03
JP2003203549A (ja) 2003-07-18
US20040140872A1 (en) 2004-07-22
GB0224881D0 (en) 2002-12-04
TW546672B (en) 2003-08-11

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OP8 Request for examination as to paragraph 44 patent law
8130 Withdrawal