DE102016102206B4 - Schieberventil - Google Patents

Schieberventil

Info

Publication number
DE102016102206B4
DE102016102206B4 DE102016102206.3A DE102016102206A DE102016102206B4 DE 102016102206 B4 DE102016102206 B4 DE 102016102206B4 DE 102016102206 A DE102016102206 A DE 102016102206A DE 102016102206 B4 DE102016102206 B4 DE 102016102206B4
Authority
DE
Germany
Prior art keywords
cam
wall
chamber wall
screw
valve plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102016102206.3A
Other languages
German (de)
English (en)
Other versions
DE102016102206A1 (de
Inventor
Tsuneo Ishigaki
Hiromi Shimoda
Takashi Nagao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Publication of DE102016102206A1 publication Critical patent/DE102016102206A1/de
Application granted granted Critical
Publication of DE102016102206B4 publication Critical patent/DE102016102206B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F16K27/044—Construction of housing; Use of materials therefor of sliding valves slide valves with flat obturating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0272—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor permitting easy assembly or disassembly

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Valve Housings (AREA)
  • Details Of Valves (AREA)
DE102016102206.3A 2015-02-12 2016-02-09 Schieberventil Active DE102016102206B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-025685 2015-02-12
JP2015025685A JP6485689B2 (ja) 2015-02-12 2015-02-12 ゲートバルブ

Publications (2)

Publication Number Publication Date
DE102016102206A1 DE102016102206A1 (de) 2016-08-18
DE102016102206B4 true DE102016102206B4 (de) 2026-06-25

Family

ID=56552488

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102016102206.3A Active DE102016102206B4 (de) 2015-02-12 2016-02-09 Schieberventil

Country Status (7)

Country Link
US (1) US10253889B2 (enExample)
JP (1) JP6485689B2 (enExample)
KR (1) KR102493588B1 (enExample)
CN (1) CN105889622B (enExample)
CH (1) CH710724B1 (enExample)
DE (1) DE102016102206B4 (enExample)
TW (1) TWI673449B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6388182B1 (ja) * 2017-07-25 2018-09-12 Smc株式会社 ゲートバルブの取付構造
JP7057584B2 (ja) * 2018-01-10 2022-04-20 Smc株式会社 弁ロッドに対する弁板の取付構造
JP7385185B2 (ja) * 2019-06-19 2023-11-22 Smc株式会社 ゲート弁における弁ロッドに対する弁板の取付構造、及びその取付構造を有するゲート弁
DE102019133555A1 (de) * 2019-12-09 2021-06-10 Vat Holding Ag Vakuumventil oder Vakuumtür
JP7636714B2 (ja) * 2021-04-20 2025-02-27 Smc株式会社 ゲートバルブ
KR102551853B1 (ko) * 2021-06-30 2023-07-07 주식회사 씰테크 클램프 부재를 포함하는 반도체 진공용 밸브 구조
KR102499321B1 (ko) * 2021-06-30 2023-02-15 주식회사 씰테크 반도체 진공용 밸브 구조
TWI867753B (zh) * 2022-09-23 2024-12-21 瑞士商Ｖａｔ控股股份有限公司 真空閥的關閉組件

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2283494A (en) * 1940-07-22 1942-05-19 Nat Screw & Mfg Company Method of making screw and washer assemblies
US4573616A (en) * 1982-05-24 1986-03-04 Flo-Con Systems, Inc. Valve, clamp, refractory and method
US4781503A (en) * 1983-06-22 1988-11-01 Sfs Stadler Ag Fastener assembly for securing roofing on a soft insulation material to a solid base
US4867428A (en) * 1986-10-21 1989-09-19 Stopinc Aktiengesellschaft Device for clamping fireproof plates in metal frames of slide-valve shutters
JPH04210391A (ja) 1990-12-14 1992-07-31 Fukashi Uragami 表面に吸着し且つそれに沿って移動可能な装置
US5909867A (en) * 1998-05-27 1999-06-08 Vat Holding Ag Closing assembly for a chamber having a through-opening
JP2004360919A (ja) * 2003-06-06 2004-12-24 General Electric Co <Ge> フルポート型外部ジンバル式継手
JP2013036506A (ja) * 2011-08-05 2013-02-21 Applied Materials Inc 連通部開閉装置
EP2740979A1 (de) * 2012-12-05 2014-06-11 VAT Holding AG Vakuumventil

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US769831A (en) * 1903-11-02 1904-09-13 John Edward Lewis Ogden Securing valve-seats.
US2862040A (en) * 1956-01-23 1958-11-25 Louis J Curran Moisture-proof flanged hub type connector
US4556157A (en) 1982-05-24 1985-12-03 Flo-Con Systems, Inc. Pressure fluid teeming valve and method
JPH07450B2 (ja) 1984-08-07 1995-01-11 日本電装株式会社 自動車用空調装置
JPS6145612A (ja) 1984-08-10 1986-03-05 Toshiba Corp 差動増幅回路
JPS6144017U (ja) * 1984-08-27 1986-03-24 三菱自動車工業株式会社 コ−ンワツシヤ−
JPS6145612U (ja) * 1984-08-28 1986-03-26 三菱自動車工業株式会社 コ−ンワツシヤ−
US5141357A (en) * 1991-01-09 1992-08-25 Sundstrand Corp. Misalignment compensating fastener insert
US6443426B1 (en) * 1999-07-07 2002-09-03 Arthur Brenes Slide lock for vacuum valve
KR100684355B1 (ko) * 2005-12-29 2007-02-22 한국단자공업 주식회사 금형조립체의 형상코어편 고정구조
JP2008175330A (ja) * 2007-01-19 2008-07-31 Nobuyuki Sugimura ボルト固定構造
JP4803541B2 (ja) * 2008-11-18 2011-10-26 Ｓｍｃ株式会社 ゲートバルブ
JP5664846B2 (ja) * 2010-05-25 2015-02-04 Smc株式会社 真空用バルブ
JP5725783B2 (ja) * 2010-09-30 2015-05-27 株式会社ブイテックス バルブ装置
EP3283778B1 (en) * 2015-04-17 2020-01-15 Enduralock, LLC Locking fastener with deflectable lock

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2283494A (en) * 1940-07-22 1942-05-19 Nat Screw & Mfg Company Method of making screw and washer assemblies
US4573616A (en) * 1982-05-24 1986-03-04 Flo-Con Systems, Inc. Valve, clamp, refractory and method
US4781503A (en) * 1983-06-22 1988-11-01 Sfs Stadler Ag Fastener assembly for securing roofing on a soft insulation material to a solid base
US4867428A (en) * 1986-10-21 1989-09-19 Stopinc Aktiengesellschaft Device for clamping fireproof plates in metal frames of slide-valve shutters
JPH04210391A (ja) 1990-12-14 1992-07-31 Fukashi Uragami 表面に吸着し且つそれに沿って移動可能な装置
US5909867A (en) * 1998-05-27 1999-06-08 Vat Holding Ag Closing assembly for a chamber having a through-opening
JP2004360919A (ja) * 2003-06-06 2004-12-24 General Electric Co <Ge> フルポート型外部ジンバル式継手
JP2013036506A (ja) * 2011-08-05 2013-02-21 Applied Materials Inc 連通部開閉装置
EP2740979A1 (de) * 2012-12-05 2014-06-11 VAT Holding AG Vakuumventil

Also Published As

Publication number Publication date
US10253889B2 (en) 2019-04-09
JP2016148404A (ja) 2016-08-18
CH710724A2 (de) 2016-08-15
JP6485689B2 (ja) 2019-03-20
DE102016102206A1 (de) 2016-08-18
TWI673449B (zh) 2019-10-01
TW201641855A (zh) 2016-12-01
KR20160099486A (ko) 2016-08-22
CH710724B1 (de) 2021-07-15
CN105889622B (zh) 2019-05-10
US20160238150A1 (en) 2016-08-18
CN105889622A (zh) 2016-08-24
KR102493588B1 (ko) 2023-01-31

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division