CN206649281U - A kind of more turntable driving axles fix polygon prism light path direct write equipment - Google Patents
A kind of more turntable driving axles fix polygon prism light path direct write equipment Download PDFInfo
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- CN206649281U CN206649281U CN201621246320.6U CN201621246320U CN206649281U CN 206649281 U CN206649281 U CN 206649281U CN 201621246320 U CN201621246320 U CN 201621246320U CN 206649281 U CN206649281 U CN 206649281U
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- light path
- stomata
- polygon prism
- direct write
- prism light
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Abstract
The utility model discloses a kind of more turntable driving axles to fix polygon prism light path direct write equipment, belongs to direct write exposure technique field.More turntable driving axles of the present utility model fix polygon prism light path direct write equipment, and mainly vacuum cup structure is improved, when solve thing problems, such as to produce platelet due to gas leakage and caused by suction deficiency.Further, the gas cell distribution on sucker for it is middle dredge, it is four careful, effectively prevented the problem of board edge tilts, saved stomata quantity, reduce cost.
Description
Technical field
It the utility model is related to a kind of more turntable driving axles and fix polygon prism light path direct write equipment, belong to direct write exposure technique
Field.
Background technology
PCB (printed circuit board (PCB)) is the supporter of electronic component, while is also the carrier of electronic component electrical connection.
Common PCB production equipments have traditional exposure machine, polygon prism structure laser direct-writing exposure machine, the exposure of DMD structures laser direct-writing
Machine etc..Image directly can be imaged by laser direct-writing exposure machine on pcb board, relative to traditional exposure machine, it is not necessary to use
The film, the image of formation are apparent.
With functional requirement more and more higher of the market to pcb board, pcb board also becomes to become increasingly complex, and system compatibility is got over
It is high, it is sometimes necessary to the very big substrate of size, still, 48 inches of super large plate to be more than for size, is not had also in the prior art
The technology and equipment that can be processed with high quality.Traditional exposure machine can produce super large plate, but its machining accuracy is poor, does not reach
The requirement of high density, thin space.
Laser direct writing equipment can expose at present circuit board full-size (610 × 530), with the size of circuit board
Increase, it will cause contour size of the unit(s) to become big, influence to splice precision and aligning accuracy, cause yields to decline.
If the method for the size that can be exposed by increasing sucker prepares laser direct-writing exposure machine, due to required vacuum
Sucker size is bigger, and sometimes more than 55 inches, there are the following problems for meeting:(1) when the pcb board actual size exposed
When smaller, and sucker structure supports larger vacuum range, and the region for being not covered with plank can produce gas leakage, influence to inhale
Absorption of the disk to substrate;(2) tilted due to might have corner during substrate transport, if pull of vacuum is inadequate, sucker can not
Plank is inhaled and put down, influences whether to expose the quality of pcb board, substrate can be caused to scrap.To solve this problem, current method has
Three kinds:
Method one:Directly ignore the problem, but can require very high to client factory pcb board, plank not usually, can back and forth
Return and plank is bent manually, have a strong impact on production efficiency.
Method two:For various sizes of plank, different sucker backing plates is designed.The hole covering model of vacuum is inhaled on backing plate
Enclose, it is in the same size with plank.This method is simple, and operation is somewhat troublesome, but when producing 55 inches of plank, it is necessary to change
55 inches of backing plate, difficulty are multiplied, and change the time of backing plate, can increase by 150%~200%, have a strong impact on production efficiency.
Method three:Do not covered for plank and vacuumize region, blocked with article, conventional is to cut the used film.
This method very economical material benefit, but it is pretty troublesome, and different size of pcb board is, it is necessary to the film be cut into different sizes, for a long time
Get off, the film accumulation after the cutting of board producing region can be caused, the size for finding needs also bothers.
As can be seen here, generally use changes the suitable sucker of size in the prior art or searching shape size is suitably useless
The film is abandoned to block the mode of air leakage point, can all substantially reduce production efficiency.
To sum up, the problems such as current polygon prism light path direct write equipment presence can not produce super large plate, vacuum cup gas leakage is urgently
It is to be solved.
Utility model content
For problem above, the utility model provides vacuum cup and a kind of more turntable drivings containing the vacuum cup
Axle fixes polygon prism light path direct write equipment, can not be produced in super large plate, vacuum cup gas leakage, exposure process with solving prior art
The problems such as focusing and position inaccurate.
First purpose of the present utility model be to provide a kind of vacuum cup, the vacuum cup, including suction cup main body and
Vacuum generating device;A number of stomata, each each correspondence one in promoting the circulation of qi hole are distributed in suction cup main body in terms of rows and columns
Relay, each row stomata also each one relay of correspondence;Air vent switch is each connected between stomata and vacuum generating device;
The relay and the relay of the stomata column that air vent switch is expert at the stomata simultaneously are connected.
In a kind of embodiment of the present utility model, the air vent switch is located at what stomata was connected with vacuum generating device
On vacuum line.
In a kind of embodiment of the present utility model, the air vent switch is electromagnetic switch.
In a kind of embodiment of the present utility model, the relay is connected with master control device.
In a kind of embodiment of the present utility model, the stomata is in suction cup main body in middle thin, four careful points
Cloth form.
In a kind of embodiment of the present utility model, the line space and column pitch of the stomata by among suction cup main body to
Both sides are in the form of uniformly successively decreasing.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region
Away from 1-3 inches are up to, positioned at the minimum 5-8mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, between the line space or row of the stomata of suction cup main body central region
Away from being up to 3.5 inches, positioned at the minimum 5.9mm of line space or column pitch of the stomata of suction cup main body fringe region.
In a kind of embodiment of the present utility model, opening shape of the stomata in suction cup main body can be round
The arbitrary shapes such as shape, ellipse, square, rectangle, for example, it is circular.Using square or rectangular opening shape, its
The linear shape of edge of opening, it is easier to being equally that the substrate edges that edge is linear agree with.
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 10mm2~
500mm2。
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 50mm2~
350mm2。
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 100mm2~
250mm2。
In a kind of embodiment of the present utility model, aperture area of the stomata in suction cup main body is 200mm2。
In a kind of embodiment of the present utility model, the Breadth Maximum of the suction cup main body is 55 inches.
In a kind of embodiment of the present utility model, the card of the suction cup main body is integral card or by polylith disk
Face combines.
In a kind of embodiment of the present utility model, the card of the suction cup main body by the big disk assembled of two pieces of grades and
Into.
In a kind of embodiment of the present utility model, the suction cup main body can be divided into chuck support structure and backing plate,
It can also be the integral structure that backing plate is integrated with chuck support structure.When suction cup main body is chuck support structure and backing plate
During separated structure, backing plate is arranged on chuck support structure surface, and pad surfaces are designed with equally distributed stomata, below backing plate
It is the vacuum air-channel being connected with stomata.
Second purpose of the present utility model is to provide the device containing vacuum cup of the present utility model.
In a kind of embodiment of the present utility model, described device can be various types of exposure machines.
3rd purpose of the present utility model is to provide more turntable driving axles containing vacuum cup of the present utility model and consolidated
Determine polygon prism light path direct write equipment.
More turntable driving axles, which fix polygon prism light path direct write equipment, includes base, polygon prism light path, connecting plate, vacuum
Sucker, multiple moving parts, camera;The moving parts include a turntable driving Y-axis and a lifting driving Z axis;Vacuum
Sucker is located above moving parts.
In a kind of embodiment of the present utility model, the vacuum cup be it is above-mentioned refer to it is of the present utility model any
A kind of vacuum cup.
In a kind of embodiment of the present utility model, the polygon prism light path is connected by connecting plate with base.
In the utility model, more turntable driving axles refer to containing two or more moving parts, and moving parts include one
Turntable driving Y-axis and a lifting driving Z axis;Fixation refers to that polygon prism light path position is fixed, irremovable.
In a kind of embodiment of the present utility model, more turntable driving axles are fixed polygon prism light path direct write equipment and contained
There are two moving parts.
In a kind of embodiment of the present utility model, the vacuum cup is objective table, the lifting with moving parts
Drive Z axis connection.
In a kind of embodiment of the present utility model, it is set up in parallel between the multiple moving parts along X-direction.
In a kind of embodiment of the present utility model, the number of the multiple moving parts is two.
In a kind of embodiment of the present utility model, the card of the suction cup main body of the vacuum cup is integral card
Or formed by polylith disk assembled.When being formed by polylith disk assembled, every piece of card corresponds to one or more moving parts.
In a kind of embodiment of the present utility model, the suction cup main body of the vacuum cup is identical by the size of left and right two
Card merge form;Each corresponding moving parts of card.
In a kind of embodiment of the present utility model, any connection is not taken between described two cards, or use
Ball pivot chain structure connects, or using Hard link.
In a kind of embodiment of the present utility model, the camera is located above vacuum cup.
In a kind of embodiment of the present utility model, the turntable driving Y-axis is below lifting driving Z axis, with liter
Drop driving Z axis connection.
The advantages of the utility model and effect:
(1) more turntable driving axles of the present utility model fix polygon prism light path direct write equipment, mainly to vacuum cup structure
Improved.Vacuum cup of the present utility model is the vacuum cup of automation, and a series of stomata is distributed with chuck surface,
When having pcb board covering above stomata, stomata closed-circuit working, when there is no pcb board covering above stomata, stomata closure, effectively
When solving production platelet, caused by due to gas leakage the problem of suction deficiency.Further, during the gas cell distribution on sucker is
Between dredge, it is four careful, both make it that there was stomata marginal portion to different size of pcb board all the time, effectively prevents board edge when placing
The problem of tilting, the place of too many stomata can not be needed to save stomata quantity in centre again, reduce cost, improve effect
Rate.
(2) more turntable driving axles of the present utility model fix polygon prism light path direct write equipment, and exposure machine sucker width can be with
Be arranged to 55 inches, can produce 55 inches of super large plate, at the same and can ensure high accuracy, high density, fine rule away from etc. demand;And inhale
Multigroup moving parts are connected below disk, the kinematic axis of multigroup moving parts is synchronized with the movement, and improves exposure accuracy and runs steady
Qualitative, for exposed lines spacing up to less than 30 microns, ill-exposed rate drops to less than 0.1%.
(3) direct write equipment of the present utility model, fixed polygon prism light path, light path can form a long sections band, due to
Fixed, light path resistance to overturning is preferable;Can be by changing the height of lifting shaft, corresponding different thickness of slab so that light path is optimal
Focal plane keeps constant;Meanwhile using more lifting shafts, objective table support can be strengthened, reduce deformation.
(4) the utility model can support 1.2m × 1m backboard, both can be that one piece big plate or platelet are spelled
Big plate is formed together.The utility model greatly supplements the vacancy in market.
(5) for polygon prism light path direct write equipment of the present utility model using polygon prism light path design is fixed, light path is irremovable,
Disposable exposure is completed, and effectively prevent the problem of exposure brought due to light path displacement error is inaccurate;Equipment bottom is multigroup
The design of moving parts, vacuum cup is possessed multiple strong points, sucker is had more preferable stability in motion process, simultaneously
Sucker run-off the straight caused by the connection that is likely to occur is insecure when avoiding the unimodule from supporting larger sucker, the problems such as rotating.
Brief description of the drawings
Fig. 1 is vacuum cup structural representation of the present utility model;Wherein, 1 suction cup main body, 3 stomatas, 4 relays, 6 total
Control device;
Fig. 2 is the vacuum generating device and stomata connection diagram of vacuum cup of the present utility model;Wherein, 2 vacuum are sent out
Generating apparatus, 5 air vent switch;
Fig. 3 is that traditional vacuum cup places the structural representation after substrate;Wherein, 14 substrate;
Fig. 4 is that vacuum cup of the present utility model places a kind of structural representation after substrate;
Fig. 5 is to adjust a kind of structural representation after the substrate position on vacuum cup of the present utility model;
Fig. 6 is that double turntable driving axles containing vacuum cup of the present utility model fix polygon prism light path direct write equipment;Its
In, 7 bases, 8 polygon prism light paths, 10 vacuum cups, 12 turntable driving Y-axis, 15 connecting plates, 16 cameras;
Fig. 7 is that double turntable driving axles fixation polygon prism light path direct write equipment take down the schematic diagram after vacuum cup;Wherein, 13
Lifting driving Z axis.
Specific embodiment
Polygon prism light path:Exposure figure is changed by polygon prism upset;
Turntable driving Y-axis:Also scan axis or Y-axis are, for doing the continuous scanning motion of constant speed, drives sucker
Motion.
Lifting driving Z axis:Also lifting shaft or Z axis are, for controlling the lifting of sucker.
Sucker:For adsorbing, the objective table of fixed pcb board;Pcb board can be adsorbed above by negative pressure, it is real in exposure
The fixation of existing pcb board and the flatness on pcb board surface;
Base:Marble support base;
Here is that the utility model is specifically described.
Embodiment 1:Vacuum cup
Vacuum cup structure of the present utility model is as shown in Figure 1-2.
The utility model vacuum cup, including suction cup main body 1 and vacuum generating device 2;With row and column in suction cup main body 1
The a number of stomata 3 of formal distribution, each each one relay 4 of correspondence in promoting the circulation of qi hole 3, each row stomata also each correspondence one after
Electrical equipment;Air vent switch 5 is each connected between stomata 3 and vacuum generating device 2;Air vent switch 5 is expert at the stomata simultaneously
Relay connected with the relay of the stomata column.
Each relay is connected with master control device 6.Air vent switch is located at the vacuum tube that stomata is connected with vacuum generating device
Lu Shang.The air vent switch can be electromagnetic switch.The stomata, can be uniformly distributed in suction cup main body.
Using such structure and connected mode, when vacuum cup works, a certain size substrate is placed on vacuum suction
On disk, for the stomata row or stomata row for thering is substrate to cover, the relay path corresponding to the row or column;For certain stomata
Speech, only when it is expert at and column corresponding to relay all make for path, the air vent switch of the stomata is just opened, and then
Vacuum generating device and stomata UNICOM, stomata work.In the case of this, the air vent switch not covered substantially is closing
State, so as to solve it is larger produce PCB using vacuum cup when existing leakage problem.
Embodiment 2:Vacuum cup
The vacuum cup of the present embodiment, it is made that and changes on the basis of the vacuum cup as shown in Figure 1-2 of embodiment 1
Enter.
The stomata 3 is in suction cup main body 1 in middle thin, four careful distribution forms.
Traditional vacuum cup, stomata is usually to use equally distributed form, may when producing less pcb board
After substrate 14 is placed in suction cup main body, the lucky position in certain edge where substrate far from both sides stomata farther out (as shown in Figure 3) so that
Cause the marginal portion to be tilted because there is no pull of vacuum, production is impacted.Using this centre of the utility model
Dredge, after four careful distribution forms, as illustrated in figures 4-5, when smaller substrate is placed on vacuum cup, select substrate is close
Suction cup main body edge is placed, now if the substrate edges of intermediate region are just from both sides stomata farther out in the suction cup main body,
It can so select the substrate edges being moved in nearest a line or a row stomata and be allowed to cover just;Due to sucker master
The surrounding stomata of body is closeer, and this movement will not cause phenomenon of another lateral edges of substrate from stomata farther out.
Alternatively, the line space of the stomata and column pitch by among suction cup main body to both sides in the form of uniformly successively decreasing.
Alternatively, positioned at suction cup main body central region stomata line space or column pitch be up to 1-3 inches, positioned at suction
The minimum 5-8mm of line space or column pitch of the stomata of disc main body fringe region.Opening shape of the stomata in suction cup main body can
To be the arbitrary shapes such as circle, ellipse, square, rectangle, for example, it is circular.Opening surface of the stomata in suction cup main body
Product can be arbitrary, such as 10mm2~500mm2。
Alternatively, the card of the suction cup main body is integral card or formed by polylith disk assembled.
Embodiment 3:Double turntable driving axles fix polygon prism light path direct write equipment
So that double turntable driving axles containing two moving parts fix polygon prism light path direct write equipment as an example illustrate
It is bright.
As shown in fig. 6-7, it is straight for double turntable driving axles fixation polygon prism light path containing vacuum cup of the present utility model
Write device.
Double turntable driving axles, which fix polygon prism light path direct write equipment, includes 8, base 7, polygon prism light path motions
Component, vacuum cup 10, connecting plate 15, camera 16;The moving parts include a turntable driving Y-axis 12 and a lifting is driven
Dynamic Z axis 13;Vacuum cup 10 is located above moving parts.
The polygon prism light path 8 is connected by connecting plate 15 with base 7.The turntable driving Y-axis 12 is positioned at lifting driving Z
The lower section of axle 13, it is connected with lifting driving Z axis 13;The vacuum cup 10, as objective table, the lifting with moving parts drive Z
Axle 13 connects.Vacuum cup, corresponding change in location occurs as turntable driving Y-axis, lifting drive the movement of Z axis 13.
Base has function of shock insulation, horizontal positioned, and all parts are respectively mounted above it.
The camera 16 is located at the top of vacuum cup 10, for capturing the exposure area of the big plates of PCB.
Pcb board is placed on vacuum cup 10 (objective table), lifting driving Z axis 13 controls the height of objective table 10 to find light
Road optimal focal plane;Determine that pcb board exposes original position by camera 16 to find, objective table is moved to by turntable driving Y-axis 12
Expose original position;Polygon prism light path 8 starts to expose, while turntable driving Y-axis 12 controls objective table scanning until end exposure
Position stops.Equipment of the present utility model, can be by changing the height of lifting shaft, corresponding different thickness of slab so that light path is most
Good focal plane keeps constant;Meanwhile using double lifting shafts, objective table support can be strengthened, reduce deformation.
Alternatively, the card of the suction cup main body of the vacuum cup is integral card.
Embodiment 4:Double turntable driving axles fix polygon prism light path direct write equipment
So that double turntable driving axles containing two moving parts fix polygon prism light path direct write equipment as an example illustrate
It is bright.
Double turntable driving axles of the present embodiment fix polygon prism light path direct write equipment, are made that on the basis of embodiment 3
Improve.
The card of the suction cup main body of the vacuum cup is formed by polylith disk assembled;Corresponding one or more of every piece of card
Individual moving parts.
Alternatively, the suction cup main body of the vacuum cup is merged by the size identical card of left and right two and formed;Each disk
The corresponding moving parts in face.
Any connection is not taken between two cards of the composition suction cup main body, or is connected using ball pivot chain structure,
Or using Hard link.
To produce the pcb board of 55*40 inches, limited because domestic processing technology is horizontal, can not produce that precision is high, area is big
Sucker, therefore can only take the mode of two pieces of sucker card splicings.In the utility model, two pieces of left and right sucker, if using respectively
The screw of dry quantity is fixed on corresponding Z axis mounting surface, and then the connected mode between two pieces of suckers, can there is following 3 kinds:
(1) any connection is not taken between sucker, the simple precision for relying on the Y-axis of platform courses two.Advantage be it is simple in construction,
It is economical and practical, when producing less than 24 inches of plank, it is only necessary to expose a sucker scope, it is not necessary to which two suckers are all
It is exposed, production plank size is more flexible, closer to client's use demand.
(2) connected between sucker using ball pivot chain structure, two sucker Z-directions can have the inconsistent situation of slight height, Y
Uniformity is realized by platform courses in the motion process of direction.Advantage is unlocked once there is some Y-axis, passes through the company of two suckers
Connect, another Y-axis can be driven to unlock, effectively avoid the damage of plank.Because two Z axis difference in height conventional methods can not be surveyed accurately
It is poor more or less all to have certain altitude to micron level for amount.This method can effectively reduce that Z axis is highly inconsistent to be caused
Situations such as stuck during existing Z axis motion;
(3) Hard link is used between sucker, i.e., is fixed two suckers with modes such as screws.Advantage is that whether Y-axis is dashed forward
So power-off, or Z axis are highly inconsistent, are scrapped all without plank is caused.
Above-mentioned three kinds of connection methods, according to actual conditions one way in which can be selected to be attached.
Although the utility model is disclosed as above with preferred embodiment, it is not limited to the utility model, any
Person skilled in the art, is not departing from spirit and scope of the present utility model, can all do various change and modification, therefore this
What the protection domain of utility model should be defined by claims is defined.
Claims (7)
1. a kind of more turntable driving axles fix polygon prism light path direct write equipment, it is characterised in that more turntable driving axles are fixed
Polygon prism light path direct write equipment includes base, polygon prism light path, connecting plate, vacuum cup, multiple moving parts, camera;It is described
Moving parts include a turntable driving Y-axis and a lifting driving Z axis;Vacuum cup is located above moving parts;It is described more
Optical path prism is connected by connecting plate with base;
The vacuum cup includes suction cup main body and vacuum generating device;A fixed number is distributed in suction cup main body in terms of rows and columns
The stomata of amount, each each one relay of correspondence in promoting the circulation of qi hole, each row stomata also each one relay of correspondence;Each stomata with it is true
Air vent switch is connected between empty generating means;The relay and the stomata column that air vent switch is expert at the stomata simultaneously
Relay connection;
The opening shape of the stomata is square or rectangle.
2. more turntable driving axles according to claim 1 fix polygon prism light path direct write equipment, it is characterised in that the gas
Hole switch is on the vacuum line that stomata is connected with vacuum generating device.
3. more turntable driving axles according to claim 1 fix polygon prism light path direct write equipment, it is characterised in that positioned at suction
The line space or column pitch of the stomata of disc main body central region are up to 3.5 inches.
4. more turntable driving axles according to claim 1 fix polygon prism light path direct write equipment, it is characterised in that positioned at suction
The minimum 5.9mm of line space or column pitch of the stomata of disc main body fringe region.
5. more turntable driving axles according to claim 1 fix polygon prism light path direct write equipment, it is characterised in that described more
Turntable driving axle fixes polygon prism light path direct write equipment and contains two moving parts.
6. more turntable driving axles according to claim 1 fix polygon prism light path direct write equipment, it is characterised in that the phase
Machine is located above vacuum cup.
7. more turntable driving axles according to claim 1 fix polygon prism light path direct write equipment, it is characterised in that described to sweep
Driving Y-axis is retouched below lifting driving Z axis, is connected with lifting driving Z axis.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201621246320.6U CN206649281U (en) | 2016-11-22 | 2016-11-22 | A kind of more turntable driving axles fix polygon prism light path direct write equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201621246320.6U CN206649281U (en) | 2016-11-22 | 2016-11-22 | A kind of more turntable driving axles fix polygon prism light path direct write equipment |
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Publication Number | Publication Date |
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CN206649281U true CN206649281U (en) | 2017-11-17 |
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ID=60283575
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CN201621246320.6U Active CN206649281U (en) | 2016-11-22 | 2016-11-22 | A kind of more turntable driving axles fix polygon prism light path direct write equipment |
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2016
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